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Chemical analysis in the electron microscope

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The chapter describes principles of the chemical analysis in the SEM and TEM. From "Electron Microscopy and Analysis" textbook by Peter J. Goodhew, John Humphreys and Richard Beanland. Courtesy of Taylor and Francis Books UK.

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Page 2: Chemical analysis in the electron microscope

Contents (Note: Page numbers are as in the whole book so that the index remains valid)

Acronyms …………………………………………………….……………………… iii Preface ………………………………………………………………………………. iv

6 Chemical analysis in the electron microscope 6.1 The generation of X-rays within a specimen ……………... 170 6.2 Detection and counting of X-rays ………………………… 174 6.3 X-ray analysis of bulk specimens …………………………. 184 6.4 X-ray analysis of thin specimens in the TEM ……………... 193 6.5 Quantitative analysis in an electron microscope …………... 196 6.6 Electron energy loss spectroscopy (EELS) ………………... 205 6.7 A brief comparison of techniques …………………………. 212 6.8 Questions …………………………………………………... 213

Further reading ……………………………………………………………..…………... 236 Answers …………………………………………………………………………………... 238 Index …………………………………………………………………………..…………... 243

Page 3: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 4: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 5: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 6: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 7: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 8: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 9: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 10: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 11: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 12: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 13: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 14: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 15: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 16: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 17: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 18: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 19: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 20: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 21: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 22: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 23: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 24: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 25: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 26: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 27: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 28: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 29: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 30: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 31: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 32: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 33: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 34: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 35: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 36: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 37: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 38: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 39: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 40: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 41: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 42: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 43: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 44: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 45: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 46: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 47: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 48: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 49: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 50: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 51: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 52: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 53: Chemical analysis in the electron microscope
Page 54: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 55: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 56: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 57: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 58: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 59: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 60: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 61: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________

Page 62: Chemical analysis in the electron microscope

Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland.

Electron Microscopy and Analysis,__________________________________________________________