Upload houhsiting
View 3.484
Download 0
Embed Size (px) 344 x 292 429 x 357 514 x 422 599 x 487
DESCRIPTION
Citation preview
2. 2 3. () Ar Ar=>Ar+eAr+ (Physical Vapor DepositionPVD) 3 4. (Ar) +() -() 4 5. 1~10-3 torr 10-3 ~10-7 torr 10-7 torr 5 6. 6 7. 7 8. RF8 9. Turbo 9 10. 10 11. - 11 12. - POWER 12 13. - RF2 13 14. - (1)14 15. - RF Cable ()15 16. - 16 17. - 17 18. - 18 19. - 19 20. - 20 21. - 21 22. - 22 23. - 23 24. - 24 25. - 25 26. - 1 26 27. - RF2 27 28. !! 28
Lecture 3: Fundamentals of Sputter Depositionsummerinstitute.mech.northwestern.edu/_links/_courses/Surface... · 2 Outline Sputtering yield ... energy threshold and increases rapidly
Structure and transport in high pressure oxygen sputter ... · Low pressure oxygen annealing at high temperature for high quality sputtered YBa 2 Cu 3 O 7−δ films Appl. Phys. Lett
D.C magnetron sputter TiAlN 특성연구...김명호 ·이도재·이광민·김운섭·김민기 *·박범수†**·양국현** 전남대학교 공과대학 신소재공학부 ＊선경중공업(주),
超短脉冲激光加速质子束的研究ciae.ac.cn/eng/AnnualReport/english2005/6.doc · Web viewThree of the five sputter ion pumps were changed. The sputter ion pump near the
INF5490 RF MEMS · 39 Sputter deponering • Target materiale bombarderes med en strøm av edelgass-ioner (Ar+) – ~ vakuum – Atomer rives løs og setter seg på skiven • Ulike
1. Sputter Film 형성 - contents.kocw.netcontents.kocw.net/KOCW/document/2014/hanyang/soukjunhyung/08.pdf · Glass와 Al의 열팽창 계수 차이 CVD 3층막 증착시 Al Hillock
九州工業大学学術機関リポジトリ · High-Technologies,Tokyo,Japan)usingenergy-dispersiveX-ray microanalyzer (EDX; EMAX Energy, Horiba Ltd., Kyoto, Japan) a er sputter
Total and Differential Sputter Yields of Boron Nitride ...projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC...ON sputtering is a primary life-limiting mechanism in
1. Sputter Film 형성 - elearning.kocw.netelearning.kocw.net/KOCW/document/2014/hanyang/soukjunhyung/08.pdf · Glass와 Al의 열팽창 계수 차이 CVD 3층막 증착시 Al Hillock
AJA MAGNETRON SPUTTER SYSTEM OPERATING MANUAL … Built... · HOMEBUILT RF & DC SPUTTER SYSTEM OPERATING MANUAL Version: ... Homebuilt sputter is a fully automated PLC ... DC generator
New resistive Micromegas electrodes made with sputter deposition
A neutron polariser based on magnetically remanent Fe/Si ... · causes anisotropic magnetic properties (magnetostriction) reason: shape of sputter target and aperture (ca. 100×400mm
Norbert Frühauf Universität Stuttgart · • Spin tools for cleaning, development and wet etching (STEAG) • Inline Sputter machines ZV6000 DC/RF (Leybold) • KAI1 PECVD machine
Lecture 3: Fundamentals of Sputter Depositiontam.northwestern.edu/summerinstitute/_links/_courses/Surface... · 3 P. Sigmund, “Theory of Sputtering I. Sputtering Yield of Amorphous
Información del instructor±o … · Bielas y pistones Se utilizan bielas trapezoidales, con cojinetes tratados con pulverización iónica (Sputter) y montados por el lado de los
Large Area Sputter Deposition for Metal Oxide TFT ...topic.cena.com.cn/img/site2/20130913/3c970e04909b139d213116.pdfSep 13, 2013 · plasma across substrate ÆWidely spread Bombardment
Surface & Coatings Technologydl.iran-mavad.com/sell/trans/en/sputter etching of AISI type 420 stainless steel.pdfapparatus. Plasma-nitriding was applied to the protrusions with various
qa.drivparts.com · Note Nr. 1 “SPUTTER” upper half bearing “SPUTTER” obere Lagerhälfte Semicuscinetto superiore “SPUTTER” Demi-coussinet supérieur “SPUTTER” Medio
A Stress Analysis of Sputter Coating on the LSST Primary-Tertiary Mirror
RF Reactive Magnetron Sputter Deposition of Silicon Sub-Oxides › bitstream › handle › 1874 › 19059 › full.pdf · deposition surface oxidation and silicon particle sticking
draftugentbe.webhosting.bedraftugentbe.webhosting.be/File/RSD/RSD2009_bookofabstracts.pdf · Reactive Sputter Deposltlon . Created Date: 1/13/2010 12:22:19 PM
Fiziğin Uygulamalarına Örneklermaycalistaylari.comu.edu.tr/calistay2011yibo5/sunumlar/... · 2011-02-25 · Var Olan Sistemler •6 Gun lı Rf ve DC Sputter Kaplama Sistemi •XPS,
Sputter manual
