Ref: P .ppt (21/04/23) 1

EUROTHERM CONTROLS

2704 2704 Vacuum BlockVacuum Block

Ref: P .ppt (21/04/23) 2

EUROTHERM CONTROLS

Vacuum FeatureVacuum Feature

1 or 3 input gauges Polyfit linearisation Scientific display in mB,Torr,

Pascal Bumpless auto gauge switchover 6 On/Off setpoint outputs High vacuum gauge enable

signal Roughing pump timer Leak detection routine Displays Chamber Vacuum + 2nd

value with user text

Ref: P .ppt (21/04/23) 3

EUROTHERM CONTROLS

Typical ApplicationTypical Application

Hi Vac Gauge

TemperatureControl Loop

Heating

Cooling

Setpoint Programmer

mB

VacuumFunction

Block

Temp SP

ProgramEvents

Run

Hold

Reset

Thermocouple C

Lo Vac Gauge mB

Backing Gauge mB

Program Wait Signal

SP1

SP2

SP6

Vacuum Valves PLC Interlocks

Ref: P .ppt (21/04/23) 4

EUROTHERM CONTROLS

Gauge switch-overGauge switch-over

Switch-over block

Hi Vac Gauge mB

Lo Vac Gauge mB

Chamber Vacuum

Ref: P .ppt (21/04/23) 5

EUROTHERM CONTROLS

Gauge Switch-over Gauge Switch-over

1.0-E08

Increasing vacuum(mB)

1.0+E03

1.0-E06

1.0-E04

1.0-E02

1.0+E00

Pirani measurement range

10vdc2vdc

AIM or Penning measurement range

10vdc

Switch-over region Chamber Vacuum =

50:50

Ref: P .ppt (21/04/23) 6

EUROTHERM CONTROLS

CommunicationsCommunicationsLeak detectLeak detect

Leak detect

Chamber Vacuum

Leak detected

•Leak Detect Time

•Target leak RatePump off

Start Leak Detect

LEAK DET

Ref: P .ppt (21/04/23) 7

EUROTHERM CONTROLS

Profibus-DPProfibus-DPCommunicationsCommunicationsRoughing Pump Time-outRoughing Pump Time-out

Roughing Pump Time-

out

Chamber Vacuum

Time-out

•Time

•Target Vacuum

Pump off

Start

PUMP TOUT

Ref: P .ppt (21/04/23) 8

EUROTHERM CONTROLS

Profibus-DPProfibus-DPCommunicationsCommunicationsHi Vac. Gauge EnableHi Vac. Gauge Enable

Gauge Enable

Backing Vacuum

Gauge On

•Setpoint

Low Vacuum GON

Ref: P .ppt (21/04/23) 9

EUROTHERM CONTROLS

Profibus-DPProfibus-DPCommunicationsCommunicationsError IndicationError Indication

Gauge 1 Status

ERROR

Gauge 3 Status

Gauge 2 Status