Apr. , 2008 Prepared by Mirae Corporation

Apr. , 2008Prepared by Mirae Corporation

I.

II.

III.

IV.

V.

I. 1. . , . Life-cycle .

(Ingot)(Ingot) Wafer (CMP) & Mask (Photo Resist Coating) (Exposure) (Development) (Etching) (Ion Implantation) (CVD:Chemical Vapor Deposition) & (Metallization) 1. I.

I. 2. ( ), (), , , 82% , 18% . ()

PhotoTrack(Coater & Developer), Stepper, AlignerEtchEtcher, Asher Wet Station, Wafer Scrubber, DryerFurnace, Anealing M/C, RTP Ion Implanter CVD(LPCVD, APCVD, PECVD, MOCVD) PVD(Sputter, Evaporator), Epitaxial , CMP ()DicingDicerBondingDie Bonder, Wire Bonder, TAB BonderPackagingMolding, Triming/Forming, Banking, Soldering, MarkingWafer Prober, Tester(Logic Tester, Memory Tester), Test Handler, Burn-In , ,

I. /

() () 2.8%Axcelis(37 %), Varian(31 %), Applied Materials (25 %) 11.2%Applied Materials(52%), Novellus (24%), Tokyo electron (10%) 3.8%Applied Materials(70%), Ulvac (10%), Novellus (7 %) 2.3%Applied Materials(60%), Ebarra(23%) Novellus (8%) (track) 3.7%Tokyo electron (83%), Dainippon Screen (8%), ASML (4%) 12.0%ASML (54%), Nikon (27%), Canon (18%) . 12.0%Dainppon printing (22%), DuPont Photomasks(20 %), 3.6%Dainppon printing, SEZ, SCP, FSI, Mattson technology, Semitool 3.6%Lam Research (28 %), Tokyo electron (27 %), Applied Materials (27%) 9.8%KLA Tencor (48 %), Hitachi (11 %), Applied Materials (11 %) 5.2%Brooks Automation (30 %), Asyst technology (21 %) 8.2%Advantest , Teradyne, Agilent, MIRAE 9.8%ASM international (12 %), KNS (12 %), Tokyo Seimetsu, (10 %), ESEC (8 %)

3. 1) , 5,000 2005 18%

2) , . I.

WSTS (07.5)II. 1. (07.5 ) ( : )

2. 07 [Gartner]II. : WSTS(2006 )1. 3/4 : 2005 (2004 23.9% 2005 7.9% 2006 5.7% 2007 1~8 2.2%) 2. DRAM NAND , , DRAM NAND .

Chart2

0.578

0.343

0.047

0.012

0.019

, 1.90%

Sheet1

20062007

()

()

()

()

DRAM

()

Flash(NAND)

()

23.6%76.4%DRAMFLASHSRAMROM & EPROM

57.80%34.30%4.70%1.20%1.90%

LogicMicroAnolog

31.80%28.50%19.50%8.80%8.60%2.80%

Sheet1

0

0

0

0

0

&A

Page &P

Sheet2

Sheet3

Chart3

0.318

0.285

0.195

0.088

0.086

0.028

, 8.6%

, 8.8%

Sheet1

20062007

()

()

()

()

DRAM

()

Flash(NAND)

()

23.6%76.4%DRAMFLASHSRAMROM & EPROM

57.80%34.30%4.70%1.20%1.90%

LogicMicroAnolog

31.80%28.50%19.50%8.80%8.60%2.80%

Sheet1

0

0

0

0

0

0

&A

Page &P

Sheet2

Sheet3

3. 2007 : 1) 07 2.9% .2) 10 Toshiba/ 20% 3) TexasInstruments, infineon Technologies .07 [Gartner]II.

Chart12

329180.12230437

208500.07720138

125040.0469783

114830.04211984

99280.0379854

98120.03610533

96220.0368007

80050.037900

58330.0225874

58090.0215680

1435230.531142500

2007

2007

2006

Sheet1

1

Mx100Mx100PMx200Mx200PMx400Mx400PMx800Mx800P

38,838,94838,550,77143,156,06242,758,30067,653,39667,622,822128,229,660127,557,626

35,000,00035,000,00038,000,00038,000,00061,000,00061,000,000115,000,000115,000,000

PC BASE 33,072,87432,647,73337,287,92436,755,51960,192,33560,056,187119,710,445118,965,431

()59,500,00059,500,00069,000,00069,000,000115,000,000115,000,000203,000,000203,000,000

36,072,87435,647,73340,287,92439,755,51963,192,33563,056,187119,710,445118,965,431

2

( : )

2006()2007200820092010(`07.5)

`06.10`07.5`06.10`07.5`06.10`07.5

247,716267,883253,606300,271279,243314,789293,769313,152

()8.98.62.312.110.24.75.26.6

189,243205,872193,853232,439215,175245,938226,906241,799

()5.78.42.412.911.05.85.56.6

58,47362,01159,75367,83264,06868,55266,86371,353

()20.58.92.29.47.21.14.46.7

33,78734,75535,32736,90636,01935,16937,34439,252

()32.010.04.66.22.04.73.75.1

(Nand)11,51913,95512,14917,33015,47819,89017,02619,324

()8.716.25.524.227.814.810.013.5

1) 07 5

2006()2007(`07.5)2008(`07.5)2009(`07.5)2010(`07.5)

247,716253,606279,243293,769313,152

189,243193,853215,175226,906241,799

58,47359,75364,06866,86371,353

DRAM33,78735,32736,01937,34439,252

NAND11,51912,14915,47817,02619,324

2

247716189243584733378711519

253606193853597533532712149

279243215175640683601915478

293769226906668633734417026

313152241799713533925219324

DRAM

NAND

Sheet2

200720062007 2007 2006 2006

11Intel32,91812.20%30,43711.60%8.20%

2220,8507.70%20,1387.70%3.50%

36Toshiba12,5044.60%9,7833.70%27.80%

43Texas Instruments11,4834.20%11,9844.60%-4.20%

55STMicro9,9283.70%9,8543.80%0.80%

64Infineon9,8123.60%10,5334.00%-6.80%

779,6223.60%8,0073.00%20.20%

88Renesas Technology8,0053.00%7,9003.00%1.30%

911NXP Semiconductors5,8332.20%5,8742.20%-0.70%

1012NEC Electronics5,8092.10%5,6802.20%2.30%

143,52353.10%142,50054.20%0.70%

270,287262,6902.90%

2006200720082009201020112012

Semiconductor Capital Spending56,31359,08651,29755,72163,24858,24662,653

Capital Equipment41,95044,80540,34844,28449,02744,84449,509

Wafer Fab Equipment32,61035,56031,91934,96939,40336,04439,418

Packaging and Assembly Equipment5,2185,2024,7005,1985,4204,9345,609

Automated Test Equipment4,1224,0433,7304,1174,2043,8664,482

Other Spending14,36314,28110,94911,43714,22113,40313,145

Growh (%)19.30%4.90%-13.20%8.60%13.50%-7.90%7.60%

Growh (%)22.90%6.80%-9.90%9.80%10.70%-8.50%10.40%

Growh (%)25.70%9.00%-10.20%9.60%12.70%-8.50%9.40%

Growh (%)18.20%-0.30%-9.70%10.60%4.30%-9.00%13.70%

Growh (%)9.30%-1.90%-7.80%10.40%2.10%-8.00%15.90%

Growh (%)10.00%-0.60%-23.30%4.50%24.30%-5.80%-1.90%

Sheet2

000

000

000

000

000

000

000

000

000

000

000

&A

Page &P

2007

2007

2006

3

0000

0000

0000

0000

0000

0000

0000

Wafer Fab Equipment

Packaging and Assembly Equipment

Automated Test Equipment

4

DRAM Capex( )

()

20022003200420052006(%)

DRAM Capex6.05.49.012.216.628.9

DRAM 6.27.518.117.835.354.8

DRAM Capex6.89.014.511.425.338.9

DRAM 27.933.142.138.537.47.6

DRAM Capex2.61.48.712.817.460.5

DRAM 2.64.713.312.415.756.8

+DRAM Capex8.717.631.220.423.027.4

DRAM 28.136.148.647.475.928.2

: DRAM Capex JP Morgan('07.2Q). DRAM iSuppli('07.3Q)

5

(: , %)

200520062007

463,146805,9371,116,530

67,614 (14.6)66,320 (8.2)178,719 (16.0)

93,456 (20.2)47,343 (5.9)74,481 (6.7)

19,234 (4.2)32,577 (4.0)26,349 (2.4)

141,040 (30.5)471,768 (58.5)435,670 (39.0)

95,869 (20.7)112,141 (13.9)286,182 (25.6)

45,933 (9.8)75,788 (9.5)115,129 (10.3)

5,603,0006,474,0107,762,726

2,086,021 (37.2)2,622,371 (40.5)3,102,287 (40.0)

2,131,448 (38.0)2,145,991 (33.1)2,567,620 (33.1)

1,293,459 (23.1)1,583,910 (24.5)1,843,008 (23.7)

10,249 (0.2)17,137 (0.3)24,575 (0.3)

13,316 (0.2)23,056 (0.4)19,151 (0.2)

68,507 (1.3)81,545 (1.2)206,065 (2.7)

:

NEC

DRAM

SMC

DRAM

()

ST Micro

()

IM Flash

DRAM

()

DRAM

NAND

4. - PC . - II.

2007 ~ 20102011 ~ 2020 DRAM NAND Flash, MCP40nm 32GDRAM PRAM , MCP25nm 128G Fabless Mobile, DTV CIS, LDI, CAP, DMBFabless Automotive, Bio, RobotCIS, LDI, Biochip, Power IC

5. - 08 , - DRAM 2007 448 9.9% 403 .- 07 DRAM , NAND , - . NAND . [Gartner]II. 41,950 44,805 40,348 44,284 49,027 44,844 49,509 : : Gartner : 07.11

Chart14

3261052184122

3556052024043

3191947003730

3496951984117

3940354204204

3604449343866

3941856094482

Wafer Fab Equipment



Sheet1

1

Mx100Mx100PMx200Mx200PMx400Mx400PMx800Mx800P

38,838,94838,550,77143,156,06242,758,30067,653,39667,622,822128,229,660127,557,626

35,000,00035,000,00038,000,00038,000,00061,000,00061,000,000115,000,000115,000,000

PC BASE 33,072,87432,647,73337,287,92436,755,51960,192,33560,056,187119,710,445118,965,431

()59,500,00059,500,00069,000,00069,000,000115,000,000115,000,000203,000,000203,000,000

36,072,87435,647,73340,287,92439,755,51963,192,33563,056,187119,710,445118,965,431

2

( : )

2006()2007200820092010(`07.5)

`06.10`07.5`06.10`07.5`06.10`07.5

247,716267,883253,606300,271279,243314,789293,769313,152

()8.98.62.312.110.24.75.26.6

189,243205,872193,853232,439215,175245,938226,906241,799

()5.78.42.412.911.05.85.56.6

58,47362,01159,75367,83264,06868,55266,86371,353

()20.58.92.29.47.21.14.46.7

33,78734,75535,32736,90636,01935,16937,34439,252

()32.010.04.66.22.04.73.75.1

(Nand)11,51913,95512,14917,33015,47819,89017,02619,324

()8.716.25.524.227.814.810.013.5

1) 07 5

2006()2007(`07.5)2008(`07.5)2009(`07.5)2010(`07.5)

247,716253,606279,243293,769313,152

189,243193,853215,175226,906241,799

58,47359,75364,06866,86371,353

DRAM33,78735,32736,01937,34439,252

NAND11,51912,14915,47817,02619,324

2

247716189243584733378711519

253606193853597533532712149

279243215175640683601915478

293769226906668633734417026

313152241799713533925219324

DRAM

NAND

Sheet2

200720062007 2007 2006 2006

11Intel32,91812.20%30,43711.60%8.20%

2220,8507.70%20,1387.70%3.50%

36Toshiba12,5044.60%9,7833.70%27.80%

43Texas Instruments11,4834.20%11,9844.60%-4.20%

55STMicro9,9283.70%9,8543.80%0.80%

64Infineon9,8123.60%10,5334.00%-6.80%

779,6223.60%8,0073.00%20.20%

88Renesas Technology8,0053.00%7,9003.00%1.30%

911NXP Semiconductors5,8332.20%5,8742.20%-0.70%

1012NEC Electronics5,8092.10%5,6802.20%2.30%

143,52353.10%142,50054.20%0.70%

270,287262,6902.90%

2006200720082009201020112012

Semiconductor Capital Spending56,31359,08651,29755,72163,24858,24662,653

Wafer Fab Equipment32,61035,56031,91934,96939,40336,04439,418

Packaging and Assembly Equipment5,2185,2024,7005,1985,4204,9345,609

Automated Test Equipment4,1224,0433,7304,1174,2043,8664,482

Capital Equipment41,95044,80540,34844,28449,02744,84449,509

Other Spending14,36314,28110,94911,43714,22113,40313,145

Growh (%)19.30%4.90%-13.20%8.60%13.50%-7.90%7.60%

Growh (%)22.90%6.80%-9.90%9.80%10.70%-8.50%10.40%

Growh (%)25.70%9.00%-10.20%9.60%12.70%-8.50%9.40%

Growh (%)18.20%-0.30%-9.70%10.60%4.30%-9.00%13.70%

Growh (%)9.30%-1.90%-7.80%10.40%2.10%-8.00%15.90%

Growh (%)10.00%-0.60%-23.30%4.50%24.30%-5.80%-1.90%

Sheet2

000

000

000

000

000

000

000

000

000

000

000

&A

Page &P

2007

2007

2006

3

000

000

000

000

000

000

000

Wafer Fab Equipment



4

DRAM Capex( )

()

20022003200420052006(%)

DRAM Capex6.05.49.012.216.628.9

DRAM 6.27.518.117.835.354.8

DRAM Capex6.89.014.511.425.338.9

DRAM 27.933.142.138.537.47.6

DRAM Capex2.61.48.712.817.460.5

DRAM 2.64.713.312.415.756.8

+DRAM Capex8.717.631.220.423.027.4

DRAM 28.136.148.647.475.928.2

: DRAM Capex JP Morgan('07.2Q). DRAM iSuppli('07.3Q)

5

(: , %)

200520062007

463,146805,9371,116,530

67,614 (14.6)66,320 (8.2)178,719 (16.0)

93,456 (20.2)47,343 (5.9)74,481 (6.7)

19,234 (4.2)32,577 (4.0)26,349 (2.4)

141,040 (30.5)471,768 (58.5)435,670 (39.0)

95,869 (20.7)112,141 (13.9)286,182 (25.6)

45,933 (9.8)75,788 (9.5)115,129 (10.3)

5,603,0006,474,0107,762,726

2,086,021 (37.2)2,622,371 (40.5)3,102,287 (40.0)

2,131,448 (38.0)2,145,991 (33.1)2,567,620 (33.1)

1,293,459 (23.1)1,583,910 (24.5)1,843,008 (23.7)

10,249 (0.2)17,137 (0.3)24,575 (0.3)

13,316 (0.2)23,056 (0.4)19,151 (0.2)

68,507 (1.3)81,545 (1.2)206,065 (2.7)

:

NEC

DRAM

SMC

DRAM

()

ST Micro

()

IM Flash

DRAM

()

DRAM

NAND

6. [Gartner] , DRAM , / II.

: Gartner DataQuest (2006.Q3) 7. 1) 2007 2.3% 598 . - D 85% 7.4% 324 - 32% 152 . 2010 DRAM 12% , Nand Flash 84% 2) : 07 404~9 1.1% . 2010 485 18% [ ]II.

III. 1. 80% , . Fab , , , . .

1) 2006 05(69) 17% 81 05(12, 17.7%) 06 (15, 18.5%) .( : )( : KISA, , 2006.7)

200420052006(E) 6,4971,2176,8571,2158,1391,506-18.8%-17.7%-18.5%

2) 2007 38.5% 11 2000 IT / . : : (39.0%) (25.6%) (16.0%) (6.7%) (SAS,300mm, 50) : 2001(153) 2002(114) 2004(455) 2006(806) 2007(1,117) : 2002 2007 57.8% IMF III.

(:, %)* :

200520062007463,146 805,937 1,116,530 67,614 15%66,320 8%178,719 16%93,456 20%47,343 6%74,481 7%19,234 4%32,577 4%26,349 2%141,040 30%471,768 59%435,670 39%95,869 21%112,141 14%286,182 26%45,933 10%75,788 9%115,129 10%5,603,000 6,474,010 7,762,726 2,086,021 37%2,622,371 41%3,102,287 40%2,131,448 38%2,145,991 33%2,567,620 33%1,293,459 23%1,583,910 24%1,843,008 24%10,249 0%17,137 0%24,575 1%13,316 0%23,056 0%19,151 1%68,507 1%81,545 1%206,065 1%

2. : , , . Stepper, Track, Furnace, Memory Tester CVD, Ion Implanter, Sputter, Tester(N-M) 1) 1M 4M DRAM 1989 10 (1988~1992) : - Infrastructure ( ) -

2) 1997~1999 - 1997(30) 1998(14) 1999(20) 3 64 ( 22) - I.M.F, (big deal) computer 2000 - 300mm LCD - 2000 400 01(24) 02(19) 04(50) 05(60) III.

3) 3 Fab , 1996 38 (Stepper, CVD, Etcher, Tester ) Fab

4) (2G DRAM 60mm) : ()/ Memory : : Memory , LCD 5) / 2004 50 78% . III.

3. III.

(IDM)- - - - Intel, , Micron, TI, STMicro, Qimonda, Infineon, Freescale, Elpida, Renesas, NEC Elec (Fabless)- - , - , Broadcom, Qualcomm, Marvell, Xilinx, Altera, NVIDIA, ATI, , ()- - , TSMC, UMC, SMIC, Chartered Semi, IBM Micro, - , . - , ASE Test, Amkor, Siliconware Prescision, STATS-ChipPAC IP (Chipless)- R&D - IDM Fabless IP - Architecture IP, Chip Physical IP, System IP, IP ARM, Rambus, Artisan, TTCom, Ceva,- - Applide Materials, TEL, ASML, Advantest, Nikon,

4. III.

PHOTO Track (Coater, Developer)ETCH EtcherENG, Asher Asher/ Wet Station, Wafer Scrubber, Dryer, , Furnace, Anealing M/C Ion Implanter CVD (LPCVD, APCVD, PECVD, MOCVD), PVD (Sputter Evaporator), Expitaxial ENG, ,, DICING DicerBONDING Die Bonder, Wire Bonder, TAB Bonder, PACKING Molding, Trimming/Forming, Banking, Soldering, Marking, Packaging test,, , STS Wafer Prober, Tester, Test Handler, Burn-In System, , , , , , , , , / ENG, ENG, ENG, EMC

[ ]M520M740M620M770M820M920III.

Memory Test Handler / Tester Memory Module Test HandlerPC Memory Ram Module / Tester Logic Test Handler (Logic) / Tester USB Test Handler USB Memory Card / Tester COT Test HandlerReel Type Tape / Tester Burn-In Sorter Burn-In Chamber Hot Test Burn-In Board

Test Handler / Test Handler , Test Handler .III. More Than 2,000 Handlers Installed2005 ~

Chart9

189120

108

5730

043

Domestic

Overseas

9899000102030405060705~079899000102030405060705~079899000102030405060705~07

Memory HandlerM420000000025109381721720M42000000001077311181180M4200000000153275454


Memory HandlerM440A000000002810100M440A0000000000000M440A00000000281010



Logic HandlerM6200000000312660M6200000000102330M620000000021033

Logic HandlerM640E0000000002220M640E0000000000000M640E000000000222

Module HandlerM7200000000016521210M7200000000016420200M720000000000111



Burn-In SorterM8200000000010515150M8200000000000000M820000000001051515

MC10000000002000200MC10000000002000200MC1000000000000000

Logic HandlerMR1300515713800003900MR1300515713700003800MR1300000001000010


















Memory HandlerMR5400343738322000011600MR5400283338322000010600MR54006400000000100

Memory HandlerMR5500033532987322730228300MR55000211338381320010720MR55000124-114919253012128




Module HandlerMR7000S4000000000400MR7000S4000000000400MR7000S000000000000

Module HandlerMR71006000000000600MR71000000000000000MR7100600000000060








Burn-In SorterMR92000040000000400MR92000010000000100MR9200003000000030




000000000000000000000000000000000

000000000000000000000000000000000

60100138563614798166167124109245746829057258860949864704256141848-1115938726960388201

TOTAL

Memory Handler693470223

Logic Handler15914910

Module Handler1678285

Burn-In Sorter71170

220

1,092704388

TOTALDomesticOverseas

Memory Handler309189120

Logic Handler18108

Module Handler875730

Burn-In Sorter43043

000

457256201

More Than 2,000 Handlers Installed

140

160

17

59

Logic Handler

MemoryHandler

Module Handler

Burn-In Sorter

213

Domestic

Overseas

1. 2004 ~ 2007

989900010203040506079899000102030405060798990001020304050607

04MC100022$600,000,000M42000000002510938172M4200000000107731118M42000000001532754

04MR131011$42,342,800M430000000001414M430000000001414M43000000000000

04MR270022$260,000,000M440A000000002810M440A00000000000M440A000000002810

04MR270011$160,000,000M5000000000001313M5000000000001313M50000000000000

04MR5500131932$8,194,621,580M5200000000002424M52000000000000M5200000000002424

04MR5700606$1,314,000,000M62000000003126M62000000001023M62000000002103

04MR580018018$4,096,000,000M640E00000000022M640E00000000000M640E00000000022

04MR5800202$458,000,000M7200000000016521M7200000000016420M72000000000011

04MR7500099$2,971,996,200M74000000000011M74000000000000M74000000000011

04MR755013013$1,651,000,000M77000000000022M77000000000000M77000000000022

04MR7550202$241,500,000M8200000000010515M82000000000000M8200000000010515

04MR757011$223,940,000MC100000000020002MC100000000020002MC100000000000000

04MR922088$2,748,446,654MR13005157138000039MR13005157137000038MR130000000100001

04MR930011$320,073,000MR131000010010215MR131000010010002MR131000000000213

04MAIN60389823,281,920,234MR140010000000001MR140010000000001MR140000000000000

049,200,419,254MR150000230000005MR150000230000005MR150000000000000

0432,482,339,488MR151000011000002MR151000011000002MR151000000000000

MR170010000000001MR170000000000000MR170010000000001

MR25000204100000025MR25000204100000025MR250000000000000

05M420101525$8,709,761,407MR251000081000009MR251000081000009MR251000000000000

05M620123$508,233,000MR252000010000001MR252000010000001MR252000000000000

05MC10000000.0MR2700000003361013MR2700000003361013MR270000000000000

05MR13100000.0MR300004000000004MR300004000000004MR300000000000000

05MR2700303$480,000,000MR328000400000004MR328000400000004MR328000000000000

05MR2700303$465,680,000MR330022200000006MR330022200000006MR330000000000000

05MR550022527$6,300,801,152MR350020000000002MR350020000000002MR350000000000000

05MR5700101$163,500,000MR36000013100000014MR36000013100000014MR360000000000000

05MR580036137$8,400,697,200MR3630468000000018MR3630468000000018MR363000000000000

05MR5800101$163,500,000MR366000001000001MR366000001000001MR366000000000000

05MR7500077$2,175,005,250MR366100001000001MR366100001000001MR366100000000000

05MR7500011$318,986,250MR54003437383220000116MR54002833383220000106MR5400640000000010

05MR755037037$3,831,000,000MR5500033532987322730228MR550002113383813200107MR55000124-1149192530121

05MR7550000.0MR562000006000006MR562000006000006MR562000000000000

05MR7570033$587,818,290MR57000000038610045MR57000000038610045MR570000000000000

05MR922001616$4,310,978,273MR580000000020387065MR580000000020374061MR580000000001304

05MR9220011$245,134,080MR7000S40000000004MR7000S40000000004MR7000S00000000000

05MR930011$292,726,000MR710060000000006MR710000000000000MR710060000000006

05MAIN947216636,953,820,902MR720011000000002MR720000000000000MR720011000000002

05013,428,838,615MR721000010000001MR721000010000001MR721000000000000

0516650,382,659,517MR730001210000000022MR730000000000000MR730001210000000022

MR75000011042986141MR750000002000002MR75000011022986139

MR755000000015370052MR755000000015370052MR755000000000000

06M4207630106$30,066,421,312MR7570000000132612MR757000000000000MR7570000000132612

06M420123$894,134,000MR762000030000003MR762000030000003MR762000000000000

06M440A22$552,063,600MR920000400000004MR920000100000001MR920000300000003

06M620011$156,205,500MR9210000083000011MR921000000000000MR9210000083000011

06M72016016$1,144,800,000MR92200000048175135MR922000000000000MR92200000048175135

06M82001010$2,632,036,249MR930000000011316MR930000000000000MR930000000011316

06MR1310022$111,286,0000000000000000000000000000

06MR2700101$155,790,0000000000000000000000000

06MR5500022$466,967,70060100138563614798166167124109246829057258860949864704141848-1115938726960388

06MR5500011$221,925,330

06MR5800336$1,238,278,750

06MR5800101$180,000,000

06MR750055$1,424,442,250

06MR750011$280,750,250

06MR757022$362,363,364

06MR922044$1,039,755,464

06MR922011$277,741,744

06MR930033$767,819,200

06MAIN986916741,972,780,713

06016,218,342,639

0616758,191,123,352

07M42031738$9,999,341,200

07M43014014$3,388,200,000

07M440A088$2,205,700,200

07M50013013$5,462,000,000

07M52002424$11,314,639,900

07M620202$280,000,000

07M640E022$258,839,789

07M720415$381,024,750

07M740011$259,071,169

07M770022$354,248,518

07M820011$308,624,400

07M82044$1,012,366,950

07MR131011$60,183,500

07MR750011$252,525,724

07MR757066$1,022,800,320

07MR922011$213,836,644

07MR930011$252,497,600

07MAIN6460124$37,025,900,664

070$17,341,065,214

07124$54,366,965,878

0

0

2. 1998 ~ 2003

1998199920002001200220032004

MR130050515015707101303718011

MR131000000000101000000000

MR1400101000000000000000000

MR150000000202303000000000

MR151000000000101101000000

MR170011000000000000000000

MR25000020020404101000000000

MR251000000000808101000000

MR252000000000101000000000

MR270000000000000000303202

MR300000404000000000000000

MR328000000404000000000000

MR3300202202202000000000000

MR3500202000000000000000000

MR36000000013013101000000000

MR3630404606808000000000000

MR366000000000000101000000

MR366100000000000101000000

MR5400286343343738038303202202000

MR55000021311243533-132819384987131932

MR562000000000000606000202

MR57000000000000000038038606

MR58000000000000000000020020

MR7000S404000000000000000000

MR710066000000000000000000

MR720011011000000000000000

MR721000000000101000000000

MR7300000121201010000000000000

MR75000000001111000224022099

MR75500000000000000000015015

MR757000000000000000000112

MR762000000000303000000000

MR920000000134000000000000

MR921000000000000088033000

MR922000000000000000044088

MR9300000000000000000011

4614608218100904813857-1562511368859147593998

_

ITEM_NAMESPEC

MC1000CCM TOP MAIN ASS'Y2600,000,00000$2$600,000,000

MR1310 MAINMAIN142,342,80000$1$42,342,800

MR2700MR27002260,000,00000$2$260,000,000

MR2700 RETROFITMAIN1160,000,000$1$160,000,000

MR5500 MAIN(-30)MAIN(-30)133,045,000,000195,149,621,580$32$8,194,621,580

MR5700 MEMORY HANDLERMAIN61,314,000,00000$6$1,314,000,000

MR5800 MEMORY HANDLERMAIN184,096,000,00000$18$4,096,000,000

MR5800 RETROFITMAIN2458,000,00000$2$458,000,000

MR7500MR75000092,971,996,200$9$2,971,996,200

MR7550 RETROFITMAIN2241,500,00000$2$241,500,000

MR7550 TOP MAIN ASS'YMR7550 TOP MAIN ASS'Y131,651,000,00000$13$1,651,000,000

MR7570USB HANDLER-COMET1223,940,000$1$223,940,000

MR9220 MAIN 12RACKMR9220 MAIN 12RACK0082,748,446,654$8$2,748,446,654

MR9300 MAINMR93001320,073,000$1$320,073,000

6011,867,842,8003811,414,077,4349823,281,920,234

4,766,910,9404,433,508,3149,200,419,254

16,634,753,74015,847,585,74832,482,339,488

12/31/06

CODEITEM_NAMESPEC

810164-000000MR1310 MAINMAIN002111,286,000$2$111,286,000

810168-000000MR2700MR27001155,790,00000$1$155,790,000

810159-000000MR5500 MAIN(-30)MAIN(-30)002466,967,700$2$466,967,700

810159-300001MR5500 RETROFITMAIN001221,925,330$1$221,925,330

810184-000000MR5800 MEMORY HANDLERMAIN3566,000,0003672,278,750$6$1,238,278,750

810184-300000MR5800 RETROFITMAIN1180,000,00000$1$180,000,000

810190-000000M420 MEMORY HANDLERMAIN7620,478,000,000309,588,421,312$106$30,066,421,312

810190-300001M420 HYNIX RETROFITM420 HYNIX RETROFIT1256,000,0002638,134,000$3$894,134,000

810200-000000M440A MEMORY HANDLERMAIN002552,063,600$2$552,063,600

810192-000000M620LOGIC HANDLER001156,205,500$1$156,205,500

810196-000000M720 MAIN ASSYM720 MAIN ASSY161,144,800,00000$16$1,144,800,000

810188-000001MR7570USB HANDLER-COMET002362,363,364$2$362,363,364

810161-000000MR7500MR75000051,424,442,250$5$1,424,442,250

810161-300001MR7500 RETROFIT RART LISTMR7500 RETROFIT RART LIST001280,750,250$1$280,750,250

810193-000000M820 MAINM820 MAIN00102,632,036,249$10$2,632,036,249

810139-000005MR9220 MAIN 12RACKMR9220 MAIN 12RACK0041,039,755,464$4$1,039,755,464

810139-300002MR9220 RETROFITMAIN001277,741,744$1$277,741,744

819300-000001MR9300 MAINMR9300003767,819,200$3$767,819,200

MAIN9822,780,590,0006919,192,190,71316741,972,780,713

8,206,312,2498,012,030,390016,218,342,639

HANDLER 9830,986,902,2496927,204,221,10316758,191,123,352

12/31/05

CODEITEM_NAMESPEC

ATE860001-000000MC1000CCM TOP MAIN ASS'Y00000.00.0

810164-000000MR1310 MAINMAIN00000.00.0

810168-000000MR2700MR27003480,000,00000$3$480,000,000

810168-300001MR2700 RETROFITMAIN3465,680,00000$3$465,680,000

810159-000000MR5500 MAIN(-30)MAIN(-30)2460,000,000255,840,801,152$27$6,300,801,152

810167-000002MR5700 MEMORY HANDLERMAIN1163,500,00000$1$163,500,000

810184-000000MR5800 MEMORY HANDLERMAIN368,189,000,0001211,697,200$37$8,400,697,200

810184-300000MR5800 RETROFITMAIN1163,500,00000$1$163,500,000

810190-000000M420 MEMORY HANDLERMAIN103,160,000,000155,549,761,407$25$8,709,761,407

810192-000000M620LOGIC HANDLER1165,000,0002343,233,000$3$508,233,000

810182-000000MR7550 TOP MAIN ASS'YMR7550 TOP MAIN ASS'Y373,831,000,00000$37$3,831,000,000

810182-300001MR7550 RETROFITMAIN00000.00.0

810188-000001MR7570USB HANDLER-COMET003587,818,290$3$587,818,290

810161-000000MR7500MR75000072,175,005,250$7$2,175,005,250

810161-300001MR7500 RETROFIT RART LISTMR7500 RETROFIT RART LIST001318,986,250$1$318,986,250

810139-000005MR9220 MAIN 12RACKMR9220 MAIN 12RACK00164,310,978,273$16$4,310,978,273

810139-300002MR9220 RETROFITMAIN001245,134,080$1$245,134,080

819300-000001MR9300 MAINMR9300001292,726,000$1$292,726,000

AETMAIN9417,077,680,0007219,876,140,90216636,953,820,902

7,048,102,7326,380,735,883013,428,838,615

HANDLER 9424,125,782,7327226,256,876,78516650,382,659,517

CODEITEM_NAMESPEC

ATE810164-000000MR1310 MAINMAIN0.00.0$1$60,183,500$1$60,183,500

810190-000000M420 MEMORY HANDLERMAIN$31$8,090,000,000$7$1,909,341,200$38$9,999,341,200

810203-000000M430 MEMORY HANDLERMAIN$14$3,388,200,0000.00.0$14$3,388,200,000

810197-000001M500 MEMORY HANDLERMAIN$13$5,462,000,0000.00.0$13$5,462,000,000

810195-000000M520 MEMORY HANDLERMAIN0.00.0$24$11,314,639,900$24$11,314,639,900

810200-000000M440A MEMORY HANDLERMAIN0.00.0$8$2,205,700,200$8$2,205,700,200

810192-000000M620LOGIC HANDLER$2$280,000,0000.00.0$2$280,000,000

810222-000000M640E MEMORY HANDLERMAIN ASSY0.00.0$2$258,839,789$2$258,839,789

810196-000000M720 MAIN ASSYM720 MAIN ASSY$4$273,000,000$1$108,024,750$5$381,024,750

810201-000000M740M7400.00.0$1$259,071,169$1$259,071,169

810211-000000M770PCB USB HANDLER0.00.0$2$354,248,518$2$354,248,518

810188-000001MR7570USB HANDLER-COMET0.00.0$6$1,022,800,320$6$1,022,800,320

810161-000000MR7500MR75000.00.0$1$252,525,724$1$252,525,724

810193-000000M820 MAINM820 MAIN0.00.0$4$1,012,366,950$4$1,012,366,950

810193-000000RM820(SanDisk)M820 RETROFIT0.00.0$1$308,624,400$1$308,624,400

810139-000005MR9220 MAIN 12RACKMR9220 MAIN 12RACK0.00.0$1$213,836,644$1$213,836,644

819300-000001MR9300 MAINMR93000.00.0$1$252,497,600$1$252,497,600

ATEMAIN$64$17,493,200,000$60$19,532,700,664$124$37,025,900,664

$7,022,253,831$10,318,811,3830.0$17,341,065,214

HANDLER $64$24,515,453,831$60$29,851,512,047$124$54,366,965,878

ATE

MR1300MR1310MR1400MR1500MR1510MR1700MR2500MR2510MR2520MR2700MR3000MR3280MR3300MR3500MR3600MR3630MR3660MR3661MR5400MR5500MR5620MR5700MR5800MR7000SMR7100MR7200MR7210MR7300MR7500MR7550MR7570MR7620MR9200MR9210MR9220MR9300

1998ATE5122428446

ATEIBMITALIA44

P.D.T()11

PERFECTDYNA628

SUZHOU11

1998 501001000000220400340000461000000000060

1999ATE203353

15419

268

22

ATEEEMS0268

CHIPMOSTECH22

MICRONSEMIC11

P.D.T()-1(1)

SIEMENSMICR33

SMARTMODULE11

WALSINADVAN22

WHITEOAKSEM22

1999 1500000200004020060037300000101200000000100

2000ATE493851

22

2248

22

11

11

819

STS232815

11

ATEEEMS235

KYE1818

ASETEST22

G-LINK11

INFINERICH224

INFINEON1910

MICRONSEMIC22

SMARTMODULE55

WORLDWIDE11

2000 70020040000420138003835000000010110004000138

2001ATE11

8226339

11

3137

-2(2)

STS1113

22

11

11

44

ATEMICRONSEMIC-1(1)

2001 110310181000001000332000000100003000056

2002ATE22

86216

22

11

STS11114

ATEEEMS33

SanDisk11

ITMAL22

ITPO235

2002 30001001000000001129600000004000080036

2003ATE0

22

1616

77

33

223860

ATEEEMS11

KYE66

SanDisk4242

FAIRCHILDCEBU11

ITMAL2114

ITPO235

2003 80000000030000000028703800000020000340147

2004ATE11

212216

44

2133

6141535

ATEEEMS22

MAI11

SanDisk161118

SPIL22

FAIRCHILDCEBU11

ITDD112

ITMAL224

ITPO415

ITSZ213

STMicro(Italy)11

2004 10000000020000000003226200000091520008198

401152125915446214181111619884420462122261523411121635

1998199920002001200220032004

MR130050515015707101303718011

MR131000000000101000000000

MR1400101000000000000000000

MR150000000202303000000000

MR151000000000101101000000

MR170011000000000000000000

MR25000020020404101000000000

MR251000000000808101000000

MR252000000000101000000000

MR270000000000000000303202

MR300000404000000000000000

MR328000000404000000000000

MR3300202202202000000000000

MR3500202000000000000000000

MR36000000013013101000000000

MR3630404606808000000000000

MR366000000000000101000000

MR366100000000000101000000

MR5400286343343738038303202202000

MR55000021311243533-132819384987131932

MR562000000000000606000202

MR57000000000000000038038606

MR58000000000000000000020020

MR7000S404000000000000000000

MR710066000000000000000000

MR720011011000000000000000

MR721000000000101000000000

MR7300000121201010000000000000

MR75000000001111000224022099

MR75500000000000000000015015

MR757000000000000000000112

MR762000000000303000000000

MR920000000134000000000000

MR921000000000000088033000

MR922000000000000000044088

MR930000000000000000000011

461460821810013857-1562511368859147593998

MBD005DAFB7.xls

Chart1

95130

6763

152

8080

1544

Overseas

Domestic

Sheet1

MR5500M420/M440M620M720/740M820/9300

Overseas9567158015

Domestic1306328044

Sheet1

6763

152

8080

1544

Overseas

Domestic

Sheet2

Sheet3

IV. 1. , ,

(CVD), (BGA) (KrF) 4GD X

2.

, 200(8) 300(12) . (Al) , . (Cu) .

2(SOI:Silicon On Insulator) , (Polished, ) SOI .

IV.

3. 1) 300mm (12) Wafer

200mm 300mm wafer 0.18 256MD 200 450 wafer 2.25 .

300 (CVD), (Asher), . (CMP) , 300 300 . IV.

2) , , 30% .

(Damascene) , CMP () , Barrier CMP .

, DRAM .(CMP) IV.

3) SOI (Silicon On Insulator) Wafer

Wafer Polished wafer Epi() wafer .

SOI 1GD .

SOI . Epi WaferSOI WaferIV.

4) Stepper , , . (Stepper) , . . STEPPERIV.

4. Packaging . PC BGA(Ball Grid Array) . IV.

5.

Tester Test Handler Parallelism 2001(32para) 2006(640para) 20 parallelism .

o Memory Tester Tester Advantest 2004 (SRAM, DRAM, SDRAM, RDRAM ) , Flash Memory Test High Parallelism Tester

Advantest T5588Verigy v5500Nextest MagnumIV.

o Test Handler 2004 Tester Para , Handler , Para .IV.

3g Linear Motor XY-Robot - : 3g - : 2 m/sec - linear scale Machine Calibration

CAE - , , - Dynamic Simulation 1) - XY-Gantry Pick & Place - XY gantry , Actuator , CAE(Computer Aided Engineering) , /// , Position Alignment , , Vacuum Control , Machine Calibration , . Chip . XY Gantry 1. Pick & Place - IV.

High Accuracy and Repeatability Compact & Robust Mechanism Design Optimal Actuator Design Numerical AnalysisMagnetic Field AnalysisStructural Analysis

CAE Based Motor DesignHeat Transfer Analysis Excellent Heat Removal Capability2) Actuator Actuator Actuator Rotary servo motor, Linear motor, Stepping motor, hydraulic & Pneumatic Actuator . , linear motor . torque Linear motor CAE . IV.

Structure analysis using Finite Element Method under the static, dynamic and thermal load condition3) CAE TechnologyX, Y FrameIV.

Base FrameIV.

Twin Servo Control Linear motor High load Single servo TWIN SERVOXY-Gantry Load 4) // IV.

Twin servo control VelocityCurrentIV.

1 atmBlow1 atmBlow

[REAL TIME VACUUM SENSING CONTROL]

Problem of predefined fixed time delay. Difficult to avoid pressure over shoot. Lead to misplacement & missing component. Critical for small size component. Sensitive for fine pitch mounting. Mirae Solution Real time monitoring of the tip pressure. Adjust vacuum solenoid timing on the fly. Prevent over and under Blow / Suction.5) Vacuum Control Pick & Place Vacuum sensing .IV.

Test Chamber Design By CAE Air Flows Inside Test Chamber via ICEPAK V2.1(Solver-Fluent UNS4.2) Temperature Distribution of Test Chamber via ICEPAK V2.1(Solver-Fluent UNS4.2) IV.

Nozzle Center Chip Offset(x,y, theta) Vision placing offset . , Vision Position Alignment . Independent illumination control Add bottom illuminationApplied to : Mx SeriesUneven illumination: Vulnerable to image noiseUniform illuminationreliable recognition3.Vision IV.

V. 1. . 2. 300 , , , .

3. .

4. , / .

5. , .

*****************************

Documents

Apr. , 2008 Prepared by Mirae Corporation