FLIP-CHIP 반도체 패키지용 HEAT SPREADER 개발 및 사업화 · PDF file1.3 제품의 종류 및 ... 면, 먼저 Substrate 상면에 에폭시 수지를 개재하여 반도체

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  • - 1 -

    FLIP-CHIP

    HEAT SPREADER

    : ()

    :

  • - 2 -

    2001 (TBI) FLIP-CHIP

    HEAT SPREADER .

    : 10.

    2002. 11 . 30

    : ( )

    : ()

  • - 3 -

    FLIP-CHIP HEAT SPREADER

    .

    2002. 11. 30

    :

    :

  • - 4 -

    ():2000.11. 7(400)

    (/// ): 1,. 2

    ( ):

    270 (20, 60)

    TEBGAHeat spreader 1 : Amkor, Texax

    Instruments

    Flip-Chip Heat spreader 2 , 2

    : 2 1 2

    ( test)

    (Air Shower Room ) Hand

    Press Press

    () : 115,017

    Heat spreader : 46,521

    /

    : (: 2001-23296)

    : Texas Instruments Qualification

    : ()

  • - 5 -

    I.

    1. Heat spreader

    2. FLIP CHIP BGA Heat spreader

    II.

    1.

    1.1 Heat spreader

    1.2

    1.3

    1.4 Heat spreader

    1.5 Heat spreader

    2.

    2.1

    2.2

    3.

    4.

    4.1

    4.2

    5.

    5.1 Package

    5.2

    6.

    6.1

    6.2

  • - 6 -

    III.

    1.

    2. 3

    2.1 ( : 2002 . 01 ~ 2002 . 11 )

    2.2

    3.

    3.1

    3.2

    IV.

    1.

    2.

    V.

    1. Qualification Report (Texas Instruments)

  • - 7 -

  • - 8 -

    I .

    1. Heat spreader

    /

    Heat spreader , Heat

    spreader BGA package , ,

    , CDBGA(Cavity Down Ball grid Array)

    TEBGA(Thermal Enhanced

    Ball Grid Array) FCBGA(Flip Chip Ball Grid Array)

    CDBGA BGA packaging

    FCBGA .

    2. FLIP CHIP BGA Heat spreader

    FCBGA Heat spreader

    Chipset

    Impedence . FCBGA CPU

    Chipset FCBGA Heat spreader

    .

  • - 9 -

    II.

    1.

    1.1 Heat spreader

    Heat spreader

    ,

    ,

    . Heat spreader

    , Substrate

    . Heat spreader

    , Heat spreader

    . Heat spreader

    ,

    1.2

    Fig 1. Flip chip BGA Heat

    spreader 18MH

    Fig 2. Flip chip BGA Heat

    spreader 18BD(forging)

    Fig 3. Flip chip BGA Heat

    spreader 25BD

    Fig 2. Flip chip BGA Heat

    spreader 40BD(2 piece)

  • - 10 -

    1.3

    /

    18MH 18BD / C1100 FCBGA Degreasing

    Halfcut 25BD / C1100-H FCBGA Barrel-Ni Barrel

    Lid FC 18BD / A5052-H0 FCBGA Black Anodizing A5052

    2-piece 40BD / C1100-1/2H CDBGA Black Oxide

    35CP 35BD / C1220 TEBGA Matt-Ni

    1.4 Heat spreader

    TEBGA Heat spreader

    Substrate (die) die Heat

    spreader , Heat spreader

    die .

    CDBGA Heat spreader

    Die Heat spreader Cavity

    .

  • - 11 -

    FCBGA Heat spreader

    Substrate Solder bumping die Epoxy

    .

  • - 12 -

    1.5 Heat spreader

    Heat spreader CFD Simulation

    Fig 5. Bare model

    Fig 6. Heat spreader model

  • - 13 -

    Heat spreader

    IC IC

    (die)

    EMI shielding

    2.

    2.1

    Fig 7. CPU Fig 8. DSP Chips

    2.2

    FCBGA Heat spreader 25BD

  • - 14 -

    FCBGA Heat spreader 40BD(2 piece)

    FCBGA Heat spreader 18BD(Inner mold type)

    3.

    Heat spreader Progressive pattern design, Stamping

    Plating() .

    Progressive pattern design

    Heat spreader

    Tool .

  • - 15 -

    Stamping

    Progressive pattern

    .

    Plating

    Stamping Molding

    .

  • - 16 -

    4.

    4.1

    4.2

    ( : USD)

    (H) (S)

    (/Kunits) 420 370 320

  • - 17 -

    5.

    5.1 Package

    Texas Instrumens Package test

    : Charateristics Measurement All pass .

  • - 18 -

    5.2

    : ()

    .

  • - 19 -

    6.

    6.1

    Heat spreader

    (2ton )

    .

    Test .

    6.2

    Heat spreader

    , Prototype etching sample Test

    .

    III.

    1.

    2000. 09. :

    2000. 11. : (110111-2105834)

    2000. 11. : ( 215-86-00061)

    2001. 02. : Factory World

    2001. 03. : ATT

    2001. 04. : (2)

    2001. 08. : Wavetech Philippines Inc.

    2001. 12. : (TBI)

    2001. 12. : ()

    2001. 12. : (4)

    2002. 01. : Texas Instrument Heat spreader 1 Qualify (18mm FCBGA)

    2002. 06. : Texas Instrument Heat spreader 1 Qualify (23mm FCBGA)

    2002. 06. : ()

  • - 20 -

    2. 3

    2.1 ( : 2002. 01 ~ 2002 . 11)

    Package Package house 1~2

    .

    2002 10 TIPI

    2.2.

    (1~3)Test

    Package Project

    2003 .

  • - 21 -

    3.

    3.1

    ,

    ,

    .

    3.2

    Heat spreader

    Packaging house ,

    , Audit .

    .

    .

  • - 22 -

    IV.

    1.

    Heat spreader

    , ,

    Heat spreader

    .

    Heat spreader Stamping tool

    , Plating. Stamping .

    2.

    Heat spreader

    .

    V.

    1. Qualification Report (Texas Instruments)

  • - 23 -

    Qualification Report

    ( Texas Instruments )

  • - 24 -

    ASSEMBLY OPERATIONS

  • - 25 -

  • - 26 -

  • - 27 -

  • - 28 -

  • - 29 -

    .

    I . 1. Heat spreader 2. FLIP CHIP BGA Heat spreader

    II. 1. 1.1 Heat spreader 1.2 1.3 1.4 Heat spreader 1.5 Heat spreader

    2. 2.1 2.2

    3. 4. 4.1 4.2

    5. 5.1 Package 5.2

    6. 6.1 6.2

    III. 1. 2. 3 2.1 ( : 2002. 01 ~ 2002 . 11)2.2.

    3. 3.1 3.2

    IV. 1. 2.

    V. 1. Qualification Report (Texas Instruments)