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GE Measurement & Control
Högupplöst Röntgen-tomografi för materialforskning, felsökning och metrologi (mätteknik)
William Gren Sales Manager
GE Inspection Technologies
2 / GE /
• 130+ years
• > 300,000 employees
• 2011 $147B Rev
• 160 countries
• 4 Business Segments:
• Energy • Healthcare • Capital • Technology Enterprises
2009 GE: A company with global reach
3 / GE /
•Oil & Gas
• Power & Water
• Energy Management
Capital
Technology Enterprises
Energy
Healthcare
GE: Main business segments
Measurement & Control
• Inspection Technologies
• Bently Nevada
• Control Solutions
• Flow & Process Technologies
• Measuring & Sensing
• Wayne
• Radiography (CR/DR, X-Ray, CT)
• Ultrasonic
• Eddy current
• Remote Visual
• Software
4 / GE /
X-ray Sources
3D Metrology
• Portable and mobile X-ray systems
• Stationary systems
• Micro- and nanofocus tubes and generators
• Reproducible 3D coordinate measurement with X-ray CT
• Fully automated CT data acquisition and volume processing
3D CT
Digital Radiography Film & Equipment
• 3D industrial failure analysis with CT
• 3D CT systems for materi-als research, bio- and geosciences
• Computed Radiography
• Reusable Phosphor plates
• Digital Detector Arrays
• Image processing and storage software
• Complete range of Agfa X-ray films
• State-of-the-art processing equipment
• Film Scanning
2010 2D Systems
• Stationary manual and automated digital X-ray inspection systems
• Fully automated defect recognition software
Electronics Inspection
• 2D micro- and nano- focus X-ray
• Software for high resolu-tion electronics inspection
• CAD-based programming
X-ray Diffraction
• Quantitative and qualitative phase analysis, structure and tension measurement
• Single crystal materials orientation analysis
The Radiography Product Range
5 / GE /
Product line phoenix|x-ray
• A leading manufacturer of high-resolution 2D X-ray inspection and 3D computed tomography systems for non-destructive testing and 3D metrology
• Founded 1999 in Wunstorf / Germany
• 2007 acquired by GE Sensing & Inspection Technologies
• More than 1800 installations
• Development and production in Germany
6 / GE /
Högupplöst datortomografi
• Oförstörande defektanalys för kvalitetssäkring och produktions-kontroll i 3D
Exakt kvantitativ analys av position, storlek och frekvens av defekter
Multi-positionella 2D tvärsnittsplan eller 3D-volym
• Brett utbud av nanoCT® för materialvetenskapliga applikationer
180 kV hög effekt nanofocus röntgenteknik
• phoenix v|tome|x s / m / L • phoenix nanotom s / m
7 / GE /
3D Metrologi med CT
• CT = precision jämförbar med koordinatmätmaskiner (CMM)
– “Reverse Engineering”
– Nominell / verklig jämförelse
– Dimensionell mätning (t.ex. invändig väggtjocklek, avstånd, hål, fasningar, vinklar osv)
– Automatiserad processning av CT, rekonstruktion, analys och generering av inspektionsrapport inom en timme
8 / GE /
X-ray Electronics Inspection
• Leading edge 180 kV micro- and nanofocus X-ray tube technology
• Live imaging with GE´s unique DXR digital detector technology
• Efficient CAD programming with minimized setup time
• Easy and fully automated X-ray inspection of PCB assemblies
• Live 3D CAD data and inspection result overlay in the X-ray live image
• Extremely high defect coverage with high magnification and repeatability
• phoenix inspector • phoenix x|aminer • phoenix microme|x • phoenix nanome|x
GE Measurement & Control CT basics
10 / GE /
The X-ray shadow microscope
11 / GE /
X-ray tubes Directional - Transmission
Transmission Target Directional Target
higher magnification higher power
12 / GE /
X-ray tubes Microfocus vs. nanofocus®
13 / GE /
Resolution
2 µm bars
2 µm bars
Ø 2.5 µm
Focal Spot size influence:
Ø 1.5 µm Ø 0.8 µm
0.6 µm bars
14 / GE /
Principle of computed tomography Acquisition: cone beam
of 2D projections under step-by-step rotation steps< 1°
15 / GE /
Principle of computed tomography Acquisition: fan beam
of line projections under step-by-step Rotation and shift steps< 1°
16 / GE /
Three contributions from apparatus: • voxel size V=P/M • focal spot size F • mechanics
The focal spot size F is the ultimate limit of resolution.
Principle of Operation: CT resolution
M=FDD/FOD
17 / GE /
microCT
Image resolution: nanoCT: < 1 µm microCT: ~ 4 µm
nanoCT®
20 µm
microfocus CT Vs.
nanofocus CT
20 µm
500 nm voxel size in both scans.
18 / GE /
DXR250RT-E
• active area 20 cm x 20 cm (8“ x 8“)
• 1 MP (1024 x 1024 pixel)
• good resolution (200 µm pitch)
• up to 30 fps (full resolution!)
• temperature stabilised
• CsI scintillator, high DQE (85%)
• according to new USASTM E2597-07 standard
• v|tome|x s,m: 2 x detector shift (2000 pixel detector width)
High-resolution flatpanel detector
19 / GE /
Detectors
Digital flat panel detector
Scintillator på GE: s detektorer är tillverkad av Cesiumiodide (CsI) som växer i nål-liknande struktur på ”amorphous silicon plate” (array). Dessa ”nålar” styr ljuset och minskar spridningen.
Scintillator
a-Si Array
Optical Reflector
glass substrate
graphite cover
epoxy seal
GE Measurement & Control CT system overview
21 / GE /
X-ray CT systems phoenix|x-ray product line
nanotom s
nanome|x CT
v|tome|x L 450
v|tome|x L 300
v|tome|x s
nanotom m
v|tome|x m 300
22 / GE /
• 180 kV / 15 W high power
nanofocus tube
• voxel size down to 0.5 µm
• flat panel with 2300 x 2300 px,
50 µm pixel size
• three-fold detector shift
• max. sample size 120 x 150 mm
• sample weight up to 2kg
phoenix nanotom s
Ultra-high resolution nanoCT system
23 / GE /
• 180 kV / 15 W high power
nanofocus tube
• voxel size down to 0.3 µm
• DXR flat panel with 3000 x 2400 pixel,
100 µm pixel size
• 1.5-fold detector shift
• max. sample size 250 x 240 mm
• sample weight up to 3 kg
phoenix nanotom m
Ultra-high resolution nanoCT system
24 / GE /
phoenix v|tome|x s 240 Compact X-ray system for high resolution CT and 2D inspection
• 240 kV / 320 W microfocus tube
• opt. additional 180 kV nanofocus tube
• 5-axis manipulation system
• DXR250RT flat panel, 1024 x 1024 pixel,
200 µm pixel size, up to 30 fps
• two-fold detector shift
• max. sample size: 300 mm x 400 mm
• max. 3D scan size: 260 mm x 400 mm
• 10 kg max. sample weight
25 / GE /
phoenix v|tome|x m 300 Most compact 300 kV microfocus CT system
• 300 kV / 500 W microfocus tube
• opt. additional 180 kV nanofocus tube
• granite-based setup
• 5 (6)-axis manipulation system
• DXR250RT flat panel, 1 MP, 200 µm,30 fps
• two-fold detector shift
• max. sample size: 600 mm x 600 mm
• max. 3D scan size: 300 mm x 500 mm
• 50 kg max. sample weight
26 / GE /
phoenix v|tome|x L 300
300 kV CT system with walk-in cabinet
• 300 kV / 500 W microfocus tube
• opt. additional 180 kV nanofocus tube
• granite-based setup
• 6 (8)-axis manipulation system
• DXR250 flat panel, 4 MP, 200 µm px
• two-fold detector shift
• max. 3D scan size: 500 mm x 600 mm
• 75 kg max. sample weight
• optional LDA or MLD
27 / GE /
Additional features
• Collision protection (X-ray tubes, detector)
• Air conditioning, lighting
• Active anti-vibration system
• Automatic sliding door
• Video monitoring
28 / GE /
phoenix v|tome|x L 450
very large scale versatile CT system
• 300 kV / 500 W microfocus tube
• opt. additional 450 kV minifocus tube
• granite-based setup
• 6 (8)-axis manipulation system
• DXR250 flat panel, 4 MP, 200 µm px
• three-fold detector shift
• max. 3D scan size: 800 mm x 1000 mm
• 100 kg max. sample weight
• optional LDA or MLD
29 / GE /
30 / GE /
31 / GE /
Two X-ray tubes!
#1: Microfocus X-ray tube • Unipolar, open design • Up to 300 kV • Up to 500 W • Focal spot size 3 – 200 µm • Min. FOD < 5 mm
#2: Minifocus X-ray tube • Bipolar, closed design • Up to 450 kV • Up to 1500 W • Focus 1: 1 mm @ 1500 W • Focus 2: 0.4 mm @ 700 W (other minifocus X-ray tubes available)
GE Measurement & Control CT for material science & failure analysis
33 / GE /
• 2D: Endast den genomsnittliga tätheten är synlig
• 2D: Hålrum skulle vara synliga
Glas fibre reinforced material 2D X-ray image
Bild fehlt
noch
34 / GE /
• Orientering och fördelning av 10 µm tunna fibrer
• Ansamlingar av fyllnadsmaterial
Bild fehlt
noch
Glass fibres with particles nanoCT®
35 / GE /
Latex foam nanoCT - 3D view Molybdenum target Courtesy of Hutchinson R&D Centre, Chalette/F
• Different internal material phases are visible
• The exterior tube shows fine porosities
36 / GE /
• Diameter, orientation of fibres can be analysed, fiber diameter: 7-14 µm
• Orientation of the stitch yarn can be analysed
Stiched CFRP CT Volume data 3 µm voxelsize RW TH Aachen Institut für Textiltechnik
37 / GE /
• Carbon fibres and pores in polymer matrix • Diameter of single fibres ca. 1-5 µm • Texture of fibres clearly visible
Carbon fibre in polymer matrix 3D Visualisation
0.5 µm voxelsize nanoCT with Molybdenum target
0.5 mm
38 / GE /
• Carbon fibres and pores in polymer matrix • Diameter of single fibres ca. 1-5 µm • Texture of fibres clearly visible
Carbon fibre in polymer matrix Animated Volume data Molybdenum target nanoCT
39 / GE /
Hoverfly 35 kV Molybdenum target
• 3 µm voxelsize • even eye facet structures are clearly visible
40 / GE /
Slice through the 3D volume of a shell limestone with microfossils (Ø 0.7 mm) Courtesy of
O. Rozenbaum,
ISTO France
Vx = 1.2 µm
1 mm
• Zoom into a tomographic slice to measure the wall thickness (~3µm) of a small ammonite
41 / GE /
Virtual flight through the 3D volume of a shell limestone with microfossils (Ø 1.8 mm)
Courtesy of
O. Rozenbaum,
ISTO France
Vx = 1.25 µm
• Movie: Flying around the sample, slicing and fading out
42 / GE /
• 3D: wetting conditions and void positions are visible, lead phases are visible
• Solder joints with 400 µm diameter
BGA/CSP solder joints 3D movie
43 / GE /
• Detektering av brister, såsom krympning, sprickor, inneslutningar
Aluminum casting 2D X-ray image
44 / GE /
• Klassificering av hålrumsstorleken med färger
Aluminum casting CT volume
GE Measurement & Control 3D metrology with CT
46 / GE /
Metrology Process flow 1. CT Volume data
2. Surface
3. CAD Data
4. Alignment
5. Comparison / Measurements
47 / GE /
Metrology Process flow 1. CT Volume data
2. Surface
3. CAD Data
4. Alignment
5. Comparison / Measurements
48 / GE /
Metrology Process flow 1. CT Volume data
2. Surface
3. CAD Data
4. Alignment
5. Comparison / Measurements
49 / GE /
Metrology Process flow 1. CT Volume data
2. Surface
3. CAD Data
4. Alignment
5. Comparison / Measurements
50 / GE /
Process flow 1. CT Volume data
2. Surface
3. CAD Data
4. Alignment
5. Comparison, Measurements
Metrology
-300µm below CAD
+300µm above CAD
51 / GE /
GE Measurement & Control Snabb portalbaserad ”at-line” och ”in-line” CT
53 / GE /
GE speed|scan: portalbaserade CT för snabb 3D inspektion
54 / GE /
GE speed|scan atlineCT Overview Inspection volume: 400mm width x 300mm height x 800mm length, up to 50kg sample weight
Scan and inspection times: 5-10mm/s -> 10-90s for typical castings
Detail detectability: 300µm -> min. detectable defect size: >0.5 mm
Penetration length: up to 300mm Al -> allows inspection of large light metal castings
GE 3D automatic defect analysis and -classification
Designed for operation in harsh environments (foundries)
Belt conveying system
55 / GE /
Comparison to conventional CT technology
comparison of spatial resolution
High Resolution CT:
(1) Cylinder head scan with
voids, several hours
(2) 450kVp, cone beam CT
with digt . Flat panel in
Multiline Mode (8 Rows)
(3) Orig. 150µm voxel size
(12GB) here 4x Binning
V|tome|x image data binned to 600µm
Prototype Scan:
(1) “Standard” inline Scans:
helical, < 100 seconds
(2) 140kVp, 25mA
(3) 0,6mm voxel size
Prototype with 600µm voxel size
56 / GE /
GE 3D Automatic Defect Detection
Result on a die casting, 5 s defect detection time
57 / GE /
Hardware
Software
Application
System comparison overview speed|scan atlineCT
High-speed gantry-based CT in industrialised cabinet
GE 3D Defected Recognition System for NDT for assisted defect Recognition & part classification, 3D Metrology Software
Semi-automated NDT and metrology for statistical production process control for immediate response and feedback
High-speed gantry-based CT in industrialized cabinet designed for inline, 24/7, unmanned operation
Completely automated NDT and metrology for up to 100% production process control
speed|scan inlineCT
GE 3D fully automated defect recognition System for NDT, 3D Metrology Software
58 / GE /
Outlook: GE speed|scan inlineCT setup
X-ray cabinet
Roller conveyor
with lift
Inspection part
Roller conveyor
customer
X-ray sliding gates
Belt conveyor
Dust protection cover
Gantry
Shock absorber
3D-ADR Image Processing
Automatic workflow for unmanned operation
60 / GE /