ISO/TC 112 (真空技術の最近の動きnmijclub/shinku/docimgs/kuroiwa...Russian Federation (GOST R), Spain (AENOR), Switzerland (SNV), USA (ANSI) Observer countries (O-member：書類閲覧権・発言権のみ

12005.12.19 真空圧力に係わるJCSS説明会

ISO/TC 112 (真空技術)の最近の動き

東京電子（株）黒岩　雅英

(日本真空工業会規格標準委員会委員長）

日本真空協会/日本真空工業会/産総研真空クラブ

規格標準研究会

2005年12月19日、機械振興会館、東京


本日の内容

１．日本における真空標準の体制

２．ISO　規格化までの流れ

３．ISO/TC112　について

４．既に規格化されたISOについて

５．JISとISOとの整合性

６．ISO/TC112のhistory

７．ISO/TC112　2005　Seoul　meetingの報告


日本における真空標準の体制

VSJ: Vacuum Society of JapanJVIA: Japan Vacuum Industry AssociationJISC: Japanese Industrial Standardization Committee

規格標準合同検討委員会

VSＪ

規格・標準部会規格標準委員会

○○○Trace-

ability

TMP

safty

○○○

Authorize

JISC/ISO

TC112○○○○○○○○○

JVIA

Planning

WG : draft preparing


ISO　規格化までの流れ

予備段階PWI (Preliminary work item）WGで標準化する項目を検討照会段階

DIS (Draft international Standard）・DISの回付・投票

提案段階NP (New work item Proposal）・WGで標準化の適用範囲などを検討承認段階

FDIS (Final DIS）・FDISの登録・投票

作成段階 WGでWD (Working Draft)を作成、検討発行段階校正、印刷

委員会段階　　　　　CD (Committee Draft）・必要に応じてTCにて意見を審議・投票

発行


ISO/TC 112 (Vacuum technology)について

Secretariat: DIN（Deutsches Institut für Normung）Secretary: Mr. Jürgen Eisenreich (Germany)Chair: Dr. Friedrich Justen (Germany) until end 2005Scope: Standardization of vacuum technology both in the field

of apparatus (essential characteristics, dimensions andmaterials), and in the field of definitions and methods ofmeasurement.

Total number of published ISO standards: 13Participating countries (P-member): 11Observer countries (O-member): 15Other ISO committees in liaison: 6

TC 5, TC 10, TC 118, TC 131/SC 2, TC 135, TC 146International organizations in liaison: 4

CERN, EC, IUVSTA, PNEUROP


Member of ISO/TC 112 (Vacuum technology)

Secretariat:Germany (DIN)

Participating countries (P-member：議決投票権あり): 11ヶ国China (SAC), France (AFNOR), Italy (UNI), Japan (JISC), Republic of Korea (KATS), Poland (PKN),Russian Federation (GOST R), Spain (AENOR),

Switzerland (SNV), USA (ANSI)Observer countries (O-member：書類閲覧権・発言権のみ): 15ヶ国

Australia (SAI), Austria (ON), Belgium (IBN), Chile (INN), Cuba (NC), Czech Republic (CSNI), Greece (ELOT), Hungary (MSZT), India (BIS), Islamic Republic of Iran(ISIRI),Serbia and Montenegro (ISSM), Slovakia (SUTN),Tunisia (INORPI), Turkey (TSE), United Kingdom (BSI)



Liaison of ISO/TC 112 (Vacuum technology)

Other ISO committees in liaison: 6TC 5 (Ferrous metal pipes and metallic fittings)TC 10 (Technical product documentation)TC 118 (Compressors, pneumatic tools and pneumatic machines)TC 131/SC 2 (Pumps, motors and integral transmissions)TC 135 (Non-destructive testing)TC 146 (Air quality)

International organizations in liaison: 4CERN: European Organization for Nuclear ResearchEC: European CommissionIUVSTA; International Union for Vacuum Science, Technique

and ApplicationsPNEUROP: European Committee of Manufacturers of

Compressors, Vacuum Pumps and Pneumatic Tools



既に規格化されたISOについてISO 1607-1:1993 Positive-displacement vacuum pumps -- Measurement of performance

characteristics -- Part 1: Measurement of volume rate of flow (pumping speed)

ISO 1607-2:1989 Positive-displacement vacuum pumps -- Measurement of performancecharacteristics -- Part 2: Measurement of ultimate pressure

ISO 1608-1:1993 Vapour vacuum pumps -- Measurement of performance characteristics -- Part 1: Measurement of volume rate of flow (pumping speed)

ISO 1608-2:1989 Vapour vacuum pumps -- Measurement of performance characteristics -- Part 2: Measurement of critical backing pressure

ISO 1609:1986 Vacuum technology -- Flange dimensionsISO 2861-1:1974 Vacuum technology -- Quick-release couplings -- Dimensions --

Part 1: Clamped typeISO 2861-2:1980 Vacuum technology -- Quick release couplings -- Dimensions --

Part 2: Screwed typeISO 3529-1:1981 Vacuum technology -- Vocabulary -- Part 1: General termsISO 3529-2:1981 Vacuum technology -- Vocabulary -- Part 2: Vacuum pumps and

related termsISO 3529-3:1981 Vacuum technology -- Vocabulary -- Part 3: Vacuum gaugesISO 3669:1986 Vacuum technology -- Bakable flanges -- DimensionsISO 5302:2003 Vacuum technology -- Turbomolecular pumps -- Measurement of

performance characteristicsISO 9803:1993 Vacuum technology -- Pipeline fittings -- Mounting dimensions


JISとのISOとの整合性!"# $%&'()*+*,*)-

JIS Z8207:1999 Vacuum technology - Graphical symbols ISO 3753 %

JIS Z8126-1:1999 Vacuum technology - Vocabulary - Part 1 : General terms ISO 3529/1 %

JIS Z8126-2:1999 Vacuum technology - Vocabulary - Part 2 : Vacuum pumps and related terms ISO 3529/2 %

JIS Z8126-3:1999 Vacuum technology - Vocabulary - Part 3 : Vacuum gauges and related terms ISO 3529/3 %

JIS Z8750:1994 Methods of calibration for vacuum gauges ISO/CD 3567 ./0

JIS Z8751:1994Reading methods of the vacuum gauges by means of the head difference inthe hydrostatic pressure

- ./0

JIS Z8752:1989Measuring methods of low pressures by hot cathode and cold cathodeionization gauges

- ./0

JIS Z8753:1989 Measuring methods of low pressures by thermal conductivity gauge - ./0

JIS Z8754:1999 Vacuum technology - Mass-spectrometer-type leak-detector calibration ISO 3530 %

JIS B2290:1998 Vacuum technology - Flange dimensions ISO 1609 %

JIS B2293:2000 Vacuum technology - Pipeline fittings -Mounting dimensions ISO 9803 %

JISB8365:1988 Dimensions of Clamped-type Vacuum Couplings ISO 2861/1 %

JIS B8316-1:1999Positive-displacement vacuum pumps - Measurement of performancecharacteristics - Part 1: Measurement of volume rate of flow (pumping speed)

ISO 1607/1 1

JIS B8316-2:1999Positive-displacement vacuum pumps - Measurement of performancecharacteristics-Part 2 : Measurement of ultimate pressure

ISO 1607/2 1

JIS B8317-1:1999Vapour vacuum pumps-Measurement of performance characteristics - Part 1 :Measurement of volume rate of flow (pumping speed)

ISO 1608/1 %

JIS B8317-2:1999Vapour vacuum pumps - Measurement of performance characteristics - Part2 : Measurement of critical backing pressure

ISO 1608/2 %

JVIS 001 Secondary vacuum standard gauge (VS-1) - ./0

JVIS 003 Vacuum technology - Bakable flanges - Dimensions - Knife- edge type ISO/CD 3669/2 ./0

JVIS 005 Turbo-molecular pump - Measurement of performance characteristics ISO 5302 1

2!"3/24!"

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ISO/TC112 のhistory

Germany, Japan, Korea, Swiss, UK,China, Thailand, USASeoul (Korea)Dec.05

San Francisco (USA)Nov.06

Germany, Japan, Korea, Italy,Lichtenstein, UK, IUVSTA, PneuropVenice (Italy)Jun.04

Germany, Japan, Korea, Italy,Lichtenstein, IUVSTA, ISO CSFrankfurt (Germany)Sep.03

PostponedSeoul (Korea)Sep.99

USA, UK, Germany, Italy, Korea, Japan,IUVSTAChester (UK)Sep.98

USA, Germany, UK, France, Korea,Japan, IUVSTASan Nose (USA)Oct.97

Germany, USA, UK, France, Japan,IUVSTA, ISOFrankfurt (Germany)Mar.96

?Denver (USA)Oct.94

USSR, Germany, USA, China, Japan,CERNMoscow (USSR)Apr.91

ParticipantPlaceYear


ISO/TC112 Frankfurt meeting, 2001においての組織改正

ISO/TC112 Vacuum technologySC1: Vacuum flanges and fittings

WG1: ISO 3669 CF-FlangesWG2: ISO 9803 Pipeline

SC2: Pressure measurements, leak detectors and terminologyWG1: ISO/CD 3567 Gauge calibration

SC3: Vacuum pumps - PerformanceWG1: Turbo-molecular pumpWG2: ISO 1607 Positive displacement pump

ISO/TC112 (Vacuum technology)PT1: Basic Standards on Vacuum Pumps (Leader: K. Bernhardt (Germany))PT2: ISO 3669 CF-Flanges (Leader: H. Künzli (Lichtenstein))PT3: ISO/TS 3567 Vacuum gauges (Leader: K. Jousten (Germany))PT4: 9803 Pipeline (Leader: M. Hirata (Japan))PT5: Valve dimensions (Leader: M. Hirata (Japan))



2005　Seoul meeting までのPTの構成とDraft

PT 1: Basic Standards on Vacuum Pumps (Leader: K. Bernhardt (Germany))ISO/DIS 21360 “Vacuum technology -- Vacuum pumps -- Measurement

of standard performance data”PT 2:ISO 3669 CF-Flanges (Leader: H. Künzli (Lichtenstein))

ISO/WD 3669 “Vacuum technology -- Bakable knife-edge flanges --Dimensions”

PT 3:ISO/TS 3567 Vacuum gauges (Leader: K. Jousten(Germany))ISO/TS 3567 ”Vacuum gauges -- Calibration by direct comparison

with a reference gauge”PT 4:ISO 9803 Pipeline (Leader: M. Hirata (Japan))

ISO/DIS 9803-1”Vacuum technology -- Pipeline fittings mounting dimensions -- Part 1: Non knife-edge flange type”

ISO/DIS 9803-2 ”Vacuum technology -- Pipeline fittings mounting dimensions -- Part 2: Knife edge-flange type”

PT 5:Valve dimensions (Leader: M. Hirata (Japan))ISO/DIS 21358 ”Vacuum technology -- Right-angle valve -- Dimensions

and interfaces for pneumatic actuator”



ISO/TC112 　2005 Seoul　meetingの報告

Dec. 5-6th 2005 at Seoul Reviera Hotel


2005.12.5-6 ISO/TC112 総会

1) 参加者：総勢33名程度2) 参加国：ドイツ、韓国、中国、米国、タイ、スイス、日本、英国（８カ国）3) 次期の委員長と幹事：ドイツが継続4) 現行プロジェクト

PT 1 ISO/DIS 21360 ---> FDIS の段階へPT 2 ISO/WD 3669-2 ---> CD の段階へPT 3 ISO/TS 3567 --->プロジェクト終了PT 4 ISO/DIS 9803-1, -2 ---> FDIS の段階へPT 5 ISO/DIS 21358 ---> FDIS の段階へ

5) NWIP　(New Work Item Proposal)　 6+αのNWIP（ドイツ：1+α、日本：1、韓国：4）が提案

メンバーのマンパワーとセクレタリーへの負荷を考え優先順位を付けて規格化ドイツ：1+1、日本：1、韓国：2のテーマ

6) WG1, WG2, WG3の創設　プロジェクト数が多くなったので、ISO/TC112の体制を変えることにした。　今まではTC112の直下にプロジェクトチームを設けていたが、関連するプロジェクトをまとめるWGを設けることになった。（次頁参照）

WG1（ポンプ関連）：K. Bernhardt (Germany) / 元 PT1 リーダーWG2（真空計関連）：K. Jousten (Germany)) / 元 PT3 リーダーWG3（真空部品関連）：平田（日本） / 元 PT4, 5 リーダー

7) 次期会議2006年11月、サンフランシスコで開催予定（AVS の直前か直後）



ISO/TC112 　Seoul meeting, 2005における組織の変更

ISO/TC112 (Vacuum technology)PT1: Basic Standards on Vacuum Pumps (Leader: K. Bernhardt (Germany))PT2: ISO 3669 CF-Flanges (Leader: H. Künzli (Lichtenstein))PT3: ISO/TS 3567 Vacuum gauges (Leader: K. Jousten (Germany))PT4: 9803 Pipeline (Leader: M. Hirata (Japan))PT5: Valve dimensions (Leader: M. Hirata (Japan))

ISO/TC112 (Vacuum technology) WG1: Vacuum Pumps (Convener: K. Bernhardt (Germany)) WG2: Vacuum Instruments (Convener: K. Jousten (Germany)) WG3: Vacuum Components (Convener: M. Hirata (Japan))

+ NWIP



各WGの今後の検討事項

ISO/TC112/WG1 Vacuum Pumps (Convenier: K. Bernhardt (Germany)) ISO/DIS 21360 NWIP Safety of Turbomolecular pumps (Japan) Revision ISO 1607 “Positive-displacement vacuum pumps; measurement of performance

characteristics” Revision ISO 1608 “Vapour vacuum pumps; measurement of performance

characteristics” Revision ISO 5302 “Vacuum technology - Turbomolecular pumps - Measurement of

performance characteristics”

ISO/TC112/WG2 Vacuum Instruments (Convenier: K. Jousten (Germany)) NWIP Vacuum technology - Vacuum gauges - Evaluation of uncertainties of results of

calibrations by direct comparison with a reference gauge (Gemany) NWIP Measuring procedures of high vacuum by hot cathode ionization gauges (Korea) NWIP Test procedure for quadrupole-type residual gas analyzer (Korea)

ISO/TC112/WG3 Vacuum Components (Convenier: M. Hirata (Japan)) ISO/DIS 9803-1 ISO/DIS 9803-2 ISO/DIS 21358 NWIP Test procedure for vacuum valve (Korea) Revision ISO 2861-1 “Vacuum technology; Quick-release couplings; Dimensions; Part 1 :

Clamped type”



次期 ISO/TC112 会議：　2006年11月、サンフランシスコで開催予定（AVS）

ISO/TC112 における日本の役割はますます重大になっている。　ますますの支援をお願いします。

Documents

ISO/TC 112 (真空技術 の最近の動きnmijclub/shinku/docimgs/kuroiwa...Russian Federation (GOST R), Spain (AENOR), Switzerland (SNV), USA (ANSI) Observer countries (O-member：書類閲覧権・発言権のみ

ISO/TC 112 (真空技術の最近の動きnmijclub/shinku/docimgs/kuroiwa...Russian Federation (GOST R), Spain (AENOR), Switzerland (SNV), USA (ANSI) Observer countries (O-member：書類閲覧権・発言権のみ