SMALL VACUUM PUMPS - 真空ポンプ・排気装置・ …ulvac-kiko.com/en/catalog/pdf/pumps_catalog_en.pdfHigh Vacuum Type DAU-20 10 DTU-20 10 Anti-corrosive Type DTC-22 11 DTC-41

No. VP-1004

Creating the possibilities of vacuum pump technology

www.ulvac-kiko.com/en

SMALLVACUUMPUMPSC ATA L O G

2 | SMALL VACUUM PUMPS CATALOG

民生事業で培った確かな信頼性による

技術力

アルバックグループの総合力による

サービス体制

小型真空ポンプの専門メーカーとして

豊富な品揃えときめ細かな対応による

顧客満足

TOTAL SUPPORT

As a Manufacturer Specializing in

Small Size Vacuum Pumps

EXPERTISEdeveloped by firm reliability achieved through working in the consumer business.

CUSTOMERSATISFACTION

through our wide variety of products and reliable support.

by ULVAC GROUP

We ULVAC KIKO provide vacuum pumping s o l u t i o n s f o r v a r i o u s i n d u s t r i e s a n d applications. We manufacture, sel l and provide customer support of small vacuum pumps with high-performance, high-reliability and high-quality. We are one of the member of world' leading vacuum technology group, "ULVAC GROUP"

Head Office & Factory (Miyazaki Japan)

ULVAC KIKO Serves a Wide Variety of Industries

Temperature

Units conversion table

°C °F 0 32 10 50 20 68 30 86 40 104 50 122 60 140 70 158 80 176 90 194100 212

Pressure unitsPa mbar Torr1 10-2 7.5 × 10-3

100 1 0.75133 1.33 1

1.33 × 104 133 1004.0 × 104 400 300

1.013 × 105 1.013 × 103 760

Pumping speed units

Dimensionsmm Inches Inches

3.1750 1/8 0.12506.3500 1/4 0.25009.5250 3/8 0.3750

12.70000 1/2 0.5000019.0500 3/4 0.750025.4000 1/1 1.0000

L/min m3/h cfmL/min = L × min-1 1.0 0.06 0.035m3/h = m3 × h-1 16.67 1.0 0.589

cfm = cubic feet/min 28.32 1.699 1.0

Diaphragm TypeDAP-6D ···································6DAP-12S ·································6DA-30D ··································7DA-60S ···································7DAT-50D ·································7DAT-100S ································7DA-20D ··································8DA-40S ···································8DA-41D ··································8DA-81S ···································8DA-60D ··································9DA-120S ·································9DA-121D ································9DA-241S ·································9

High Vacuum TypeDAU-20 ·································10DTU-20 ··································10 Anti-corrosive Type

DTC-22 ··································11DTC-41 ··································11DTC-60 ··································11 Rocking Piston Type

DOP-40D ·······························12DOP-80S ································12DOP-80SP ······························12DOP-300SA ···························13DOP-420SA ···························13 Scroll Type

DIS-90 ···································14DIS-251 ·································14DIS-501 ·································14DISL-101 ································15DISL-502 ································15

Standard Type GLD-040 ································16GLD-136A ······························16GLD-136C ······························16GLD-201A ······························17GLD-201B ······························17GLD-280A ······························17GLD-280B ······························17GHD-031 ·······························18 Mechanical Booster Pump

MBS-051 ································18 Anti-corrosive Type

GCD-051X ·····························19GCD-136X ·····························19GCD-201X ·····························19

Hight Speed Vacuum coaterVPC-1100 ······························20 Vacuum coater "DEPOX"

VFR-200M/ERH ······················21VWR-400M/ERH ····················21VTR-350M/ERH ······················21VTS-350M/ERH ······················21 Sputtering System

RFS-200 ·································22"SCOTT-C3" VTR-150M/SRF ···23 Attachment of Oil Rotary Vacuum Pump Optional parts ·············24Fore-line Trap ·······················25Vacuum Pump Suction and Exhaust Filter ·····················25Vacuum Pump Oil ················26Oil-mist Trap ························26In-line Trap ·························26Adapter for Trap ··················26Oil-mist Separator ················26Clamp ·································27Centerring ···························27Blank Flange ························27Nozzle ································27Nipple·································27Elbow ··································27Tee······································27Cross···································27Reducer ·······························27KF Flange ····························27VCR Adapters ······················28Gauge port ·························28Leak port ·····························28Flexible tube ························28Rubber Vacuum Hose ···········28Suction and Exhaust Pipes for Oil Rotary Vacuum Pumps ······29

Dry pump ····························30Oil pump ·····························33System ································35

Dry Vacuum Pumps

System

Optional Parts

Outline Drawing

Direct Drive Oil-Sealed Rotary Vacuum Pumps

3

C O N T E N T S


Pump Selecting Process

100

80

60

40

20

120

140

0 1×104 2 3 4 5 6 7 7.6Pa

50Hz

(L/m

in)

DA-121D

DA-60D

DA-30D

DA-20D

DAT-50D

We want to decrease pressure from atmospheric pressure (100kPa) to 10kPa in 50 liter of tank within 5 minutes.Which pump is suitable?

From calculation, more than 23 L/min pumping speed is required, select faster pumping speed more than DA-30D pump.Please allow safe rate with considering pipe conductance and leak.

S =

23 L /min (at 10000Pa)

t 5V 50

P2 10000P1 100000

× 2.303 log

S

t =

t0 = t1 + t2 + t3 + ……SV

P2

P1× 2.303 log

Tank Volume( L )

First pressure( Pa )

Ultimate pressure( Pa )

Pumping time( min )

Pumping speed( L/min )

1. Calculation of Pumping time and Pumping speed.

Below calculation and Pumping speed curves are available for selecting suitable pump

100

80

60

40

20

120

140

0 1 2 3 4 5 6 7 8 9 10×10kPa

50Hz

Pressure L/min

(L/min)

Pum

ping

Spe

ed

DA-121D

�90kPa S1=124L/min

S =

t1= 80124

2.303 log

× 2.303Log

10132490000

=0.08

90kPa × 80kPa S2=123L/min t2= 80123

2.303 log 9000080000

=0.08

80kPa × 70kPa S3=122L/min t3= 80122

2.303 log 8000070000

=0.09

70kPa × 60kPa S4=120L/min t4= 80120

2.303 log 7000060000

=0.10

60kPa × 50kPa S5=116L/min t5= 80116

2.303 log 6000050000

=0.13

50kPa × 40kPa S6=111L/min t6= 80111

2.303 log 5000040000

=0.16

40kPa × 30kPa S7=108L/min t7= 80108

2.303 log 4000030000

=0.21

30kPa × 20kPa S8=96L/min t8= 8096

2.303 log 3000020000

=0.34

20kPa × 13kPa

t0 = t1 + t2 ~ + t9 = 1.59min

S9=86L/min t9= 8086

2.303 log 2000013000

=0.40

vt

P1 First pressureP2 Ultimate pressure

Atmospheric pressure

How long does it take to decrease pressure from atmospheric pressure (100kPa) to 13kPa in 80 liter of tank?DA-121D is used at this case.

example 1

example 2

5

Movement Principles for Each Type of Vacuum Pumps

• Diaphragm Type Dry Vacuum Pumps • Rocking Piston Type Dry Vacuum Pumps

Piston

Exhaustport

Suctionport

Rotary axiscenter

suction port

exhaust valve

suction portexhaust valve

exhaustsuction compression 1 compression 2

• Oil-Sealed Rotary Pumps

Exhaust process of 2 stage Oil-Sealed Rotary Pumps

Suction Valve completely opens.Exhaust valve keep closed.

Suction Valve keeps closed as pressed. Exhaust valve completely open as pressed.

Last process of suction(Bottom dead center)

Last process of exhaust(Top dead center)

Diaphragm

Diaphragm RetainerExhaust ValveSuction Valve

Suction Valve completely opens.Exhaust valve keep closed.

Suction Valve keeps closed as pressed. Exhaust valve completely open as pressed.

Last process of suction(Bottom dead center)

Last process of exhaust(Top dead center)

Diaphragm

Diaphragm RetainerExhaust ValveSuction Valve

• Scroll Type Dry Vacuum Pumps

gas Suction portCompression space Orbiting Scroll

Fixed scroll

(a) Suction completion

Exhaust port

Suction processExhaust process

Pressure process

(b)

(c)(d)

Indicates the actual pumping speed in a tmospher i c p ressu re . Some o the r companies show the number of nominal pumping speed. In that case you can compare the speed by increasing our rate 20 %.

When the pump achieves this ultimate pressure the pumping speed becomes 0.

Indicates the motor rating.

Basic machine weight including the power cord.

Indicates the standard inlet, outlet diameter. For request on different sizes, please contact us.

Use the pump within this atmospheric temperature range.

Corresponding voltage and Certificate

Type of Pump

CE marked

TUV marked

CSA marked

cTUVus markedActual pumping speedThe numbers show the actual pumping speed at 50 Hz. T h e n u m b e r w i l l increase 20% with 60 Hz.

(compliance to U.S. and Canadian National Standards)※ cTUVus is equivalent to UL/CSA standard.

A Guide to Our Catalog


Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing

※ Further details can be refered to our website. Outside drawing appears in Page 30.

Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy. DAP series is the smallest diaphragm pump from our product ranges and offers pumping speed at 6L and 12 L/min at 50Hz.

Specifications

Features Applications


Diaphragm Type Dry Vacuum Pumps

DAP Series

DAP-6D DAP-12S

DAP-6D DAP-12S

Model DAP-6D DAP-12S

Unit 50Hz 60Hz 50Hz 60Hz

Actual pumping speed L/min 6 7 12 14

Ultimate pressure Pa 6.65 × 103 24.0 × 103

Motor Single phase, 100V, 10W, 4P, Capacitor run Single phase , 100V, 10W, 4P, Capacitor run

Full load current A 0.5 0.5

Weight kg 1.9 1.9

Inlet, outlet pipe diameter mm (Rc 1/8) (Rc 1/8)

Ambient temperature ℃ 0 – 40 0 – 40

Overall dimensions mm 93(W) × 163(L) × 100.6(H) 93(W) × 163(L) × 100.6(H)

30

20

40

10

0 1 2 3 4 5 6 7 8 9 10

50Hz(L/min)

DAP-12S

DAP-6D

(×10kPa)Pressure

Pum

ping

Spe

ed

• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.• Sterilizer.

Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked

DAP-6D

Single phase, 100V Standard — — —Single phase, 115V — — — —Single phase, 200V — — —

Single phase, 220—240V — — —

DAP-12S



Pumping speed curves

DAP-12S




Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy. DAP series is the smallest diaphragm pump from our product ranges and offers pumping speed at 6L and 12 L/min at 50Hz.

Specifications




DAP Series

DAP-6D DAP-12S

DAP-6D DAP-12S

Model DAP-6D DAP-12S




Motor Single phase, 100V, 10W, 4P, Capacitor run Single phase , 100V, 10W, 4P, Capacitor run


Weight kg 1.9 1.9

Inlet, outlet pipe diameter mm (Rc 1/8) (Rc 1/8)


Overall dimensions mm 93(W) × 163(L) × 100.6(H) 93(W) × 163(L) × 100.6(H)

30

20

40

10

0 1 2 3 4 5 6 7 8 9 10

50Hz(L/min)

DAP-12S

DAP-6D

(×10kPa)Pressure

Pum

ping

Spe

ed

• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.• Sterilizer.


DAP-6D



DAP-12S




7


Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.


Pumping speed curves Corresponding voltage and Certificate


DA/DAT Series DA-30D DA-60S DAT-50D DAT-100S


DA-30D DA-60S DAT-50D DAT-100S

80

100

120

140

60

40

20

0 1 2 3 4 5 6 7 8 9 10

50Hz

DAT-50D

Pressure

Pum

ping

Spe

ed DA-60S

DA-30D

DAT-100S

(L/min)

(×10kPa)

Model DA-30D DA-60S DAT-50D DAT-100S

Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz

Actual pumping speed L/min 30 36 60 72 50 55 100 110

Ultimate pressure Pa 6.7 × 103 21.3 × 103 3.3 × 103 13.3 × 103

Motor Single phase, 100V, 200W, 4P, Split phase starting

Single phase, 100V, 200W, 4P, Split phase starting



Full load current A 5.6 5.0 5.6 5.0 5.6 5.0 5.6 5.0

Weight kg 11.0 11.0 11.0 11.0

Inlet, outlet pipe diameter mm O.D. dia.9 × I.D. dia.5

(Rc 1/4)O.D. dia.9 × I.D. dia.5

(Rc 1/4)O.D. dia.12 × I.D. dia.8.5

(Rc 1/4)O.D. dia.12 × I.D. dia.8.5

(Rc 1/4)

Ambient temperature ℃ 7 – 40 7 – 40 7 – 40 7 – 40

Overall dimensions mm 212(W) × 278(L) × 224.5(H) 212(W) × 278(L) × 224.5(H) 150(W) × 232(L) × 305(H) 150(W) × 232(L) × 305(H)

• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.• Semiconductor industry.• Injection molding machine

Specifications


DA-30D

Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —

DA-60S


DAT-50D


Three phase, 200—220V

DAT-100S


Three phase, 200—220V



0 1 2 3 4 5 6 7 8 9 10

50Hz

DA-20D

Pressure

Pum

ping

Spe

ed DA-40S

DA-41D

100

40

60

80

20

DA-81S

(L/min)

(×10kPa)

DA-20D DA-40S DA-41D DA-81S

Model DA-20D DA-40S DA-41D DA-81S



Ultimate pressure Pa 5.33 × 103 19.9 × 103 3.3 × 103 13.3 × 103

Motor Single phase,100V, 60W, 4P,Capacitor run

Single phase, 100V, 60W, 4P, Capacitor run



Full load current A 1.6 1.6 2.5 2.7 2.5 2.7

Weight kg 7.2 7.2 10.3 10.3

Inlet, outlet pipe diameter mm O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.12 × I.D. dia.8 (G1/4) O.D. dia.12 × I.D. dia.8 (G1/4)


Overall dimensions mm 118(W) × 240(L) × 178(H) 128(W) × 240(L) × 178(H) 157(W) × 336.5(L) × 217(H) 181(W) × 336.5(L) × 217(H)

Specifications

Pumping speed curves Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked

DA-20D

Single phase, 100V Standard —Single phase, 115V —Single phase, 200V — — —Single phase, 220V —

DA-40S

Single phase, 100V Standard —Single phase, 115V —Single phase, 200V — — —Single phase, 220V —

DA-41D


DA-81S





DA Series DA-20D DA-40S DA-41D DA-81S

• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.

※ Further details can be refered to our website. Outside drawing appears in Page 30—31.

9


40

80

120

160

200

240

0 1 2 3 4 5 6 97 8 10

50Hz

DA-120S

Pressure

Pum

ping

Spe

ed

DA-121D

DA-241S

DA-60D

(L/min)

(×10kPa)

DA-60D DA-120S DA-121D DA-241S

Model DA-60D DA-120S DA-121D DA-241S



Ultimate pressure Pa 3.32 × 103※ 13.3 × 103※ 3.3 × 103 16.0 × 103

Motor Single phase, 100V, 200W, 4P, Capacitor run





Weight kg 19.0 19.0 26.0 26.0

Inlet, outlet pipe diameter mm O.D. dia.14 × I.D. dia.9 (G3/8) O.D. dia.14 × I.D. dia.9 (G3/8) O.D. dia.16 × I.D. dia.12 (G1/2) O.D. dia.16 × I.D. dia.12 (G1/2)


Overall dimensions mm 156(W) × 358(L) × 238(H) 162(W) × 358(L) × 238(H) 193.5(W) × 411(L) × 285(H) 207(W) × 411(L) × 285(H)

※ With built-in Unloader valve.


Specifications

Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked

DA-60D


DA-120S


DA-121D

Single phase, 100V StandardSingle phase, 115VSingle phase, 200V

Single phase, 220—230V

DA-241S

Single phase, 100V StandardSingle phase, 115VSingle phase, 200V

Single phase, 220—230V




DA Series DA-60D DA-120S DA-121D DA-241S

• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.• Semiconductor industry.




DTU-20DAU-20

50

40

30

20

10

0 1 2 3 4 5 6 7 8 9 10

50Hz

Pressure

Pum

ping

Spe

ed

(L/min)

(×10kPa)

Model DAU-20 DTU-20



Ultimate pressure Pa 200 200

Motor Single phase, 100V, 80W, 4P, Capacitor run Single phase, 100V, 80W, 4P, Capacitor run


Weight kg 7.5 7.5

Inlet, outlet pipe diameter mm O.D. dia.10 × I.D. dia.6 (Rc 1/8) O.D. dia.10 × I.D. dia.6 (Rc 1/8)


Overall dimensions mm 161(W) × 327(L) × 217(H) 161(W) × 327(L) × 217(H)

Specifications


DAU-20

Single phase, 100V StandardSingle phase, 115VSingle phase, 200VSingle phase, 22 0VSingle phase, 230V

DTU-20

Single phase, 100V StandardSingle phase, 115VSingle phase, 200VSingle phase, 22 0VSingle phase, 230V

• High vacuum type diaphragm pump. • Low vibration. • High corrosion resistant. (DTU-20)



DAU/DTU Series DAU-20 DTU-20

• Backing pump for TMP.• Analytical equipment.• Biochemical analysis.

• Gas charging.• Vacuum drying systems.• Evaporators etc.


DAU-20 DTU-20

11


20

40

60

80

100

DTC-60

100 1 2 3 4 5 6 7 8 9

Pressure

Pum

ping

Spe

ed

50Hz

DTC-41

DTC-22

(L/min)

(×10kPa)

Model DTC-22 DTC-41 DTC-60

Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz

Actual pumping speed L/min 20 24 40 46 60 70

Ultimate pressure Pa 1.0 × 103 1.0 × 103 1.0 × 103




Full load current A 1.3 2.2 2.3 3.6 3.7

Weight kg 7.1 10.3 18.0

Inlet, outlet pipe diameter mm O.D. dia.10 × I.D. dia.6 (G1/4) O.D. dia.10 × I.D. dia.6 (G1/4) O.D. dia.14 × I.D. dia.9 (G3/8)

Ambient temperature ℃ 0 – 40 0 – 40 0 – 40

Overall dimensions mm 142(W) × 288.5(L) × 202(H) 155(W) × 336.5(L) × 217(H) 158(W) × 340(L) × 242(H)

DTC-22 DTC-41 DTC-60


Specifications


DTC-22

Single phase, 100V Standard — — —Single phase, 115VSingle phase, 200V — — —Single phase, 22 0VSingle phase, 230V

DTC-41

Single phase, 100V Standard — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 22 0V — — —

Single phase, 230V (50Hz) — —

DTC-60

Single phase, 100V Standard — — —Single phase, 115V (50Hz) — — —

Single phase, 200V — — —Single phase, 22 0V — — —

• All contacted parts of the gas are made of PTFE and FPM.• Suitable for pumping out corrosive gas or organic solvent.• High vacuum down to 1000Pa.• Compact.



DTC Series DTC-22 DTC-41 DTC-60

• Rotary evaporator.• Evaporating system.• Vacuum Concentrator.• Vacuum filtration.• Exhaust of gas-transfer tube.

• Vacuum drying systems.• Laser-gas circulation.• Centrifuge.• Medical/Pharmaceutical equip-

ments.• Analysis/scientific equipments.




90

80

70

60

50

40

30

20

10

0 1 102 23 3 4 54 5 6 7 8 9 10

DOP-80S DOP-80SP

DOP-40D

50Hz

Pressure

Pum

ping

Spe

ed

(L/min)

(×10kPa) (×10-1MPa)

Model DOP-40D DOP-80S DOP-80SP

Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz


Ultimate pressure Pa 1.2 × 103 5.33 × 103 Only for pressure

Maximum pressure MPa – – 0.5





Weight kg 7.0 7.0 9.0

Inlet, outlet pipe diameter mm O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4)

Ambient temperature ℃ 7 – 40 7 – 40 7 – 40

Overall dimensions mm 160(W) × 270(L) × 179(H) 160(W) × 270(L) × 179(H) 167.5(W) × 288(L) × 181(H)

DOP-40D DOP-80S DOP-80SP

Specifications


DOP-40D

Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 22 0V — — —

DOP-80S

Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 22 0V — — —

DOP-80SP

Single phase, 100V Standard — — —Single phase, 115V — — — —Single phase, 200V — — —Single phase, 22 0V — — —

Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Pressurized type is available for DOP-80S which can be used as a small compressor. (DOP-80SP)


Rocking Piston Type Dry Vacuum Pumps

DOP Series DOP-40D DOP-80S DOP-80SP

(Vacuum)• Vacuum chuck, vacuum tweezers.• Absorption and transfer of automat-

ic machines.• Vacuum packing printing machines.• Tip mounter.• Medical equipments.• Oxygen generator.


(Pressure)• Pressure source for automatic

machines.• Air pressure unit.• Printing machine.• Otorhinolaryngology, dental unit.• Air pressure meter.

13


0 1 2 3 4 5 6 7 8 9 10

50Hz

DOP-300SA

Pressure

Pum

ping

Spe

ed

500

350

400

450

300

250

200

150

100

50

DOP-420SA

(L/min)

(×10kPa)

Model DOP-300SA DOP-420SA




Motor Three phase, 200V, 400W, 4P Three phase, 200V, 550W, 4P

Full load current A 2.5 2.3 3.5 3.1

Weight kg 20.0 33.0

Inlet, outlet pipe diameter mm O.D. dia.16 × I.D. dia.12 (Rc 1/2) O.D. dia.26 × I.D. dia.20 (Rc 3/4)



DOP-300SA DOP-420SA


Specifications


DOP-300SA Three phase, 200V Standard — —DOP-300SB Three phase, 200–220VDOP-420SA Three phase, 200V Standard —

Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Bigger volume of pumping speed with increased number of pump heads.


Rocking Piston Type Dry Vacuum Pumps

DOP Series DOP-300SA DOP-420SA

• Vacuum chuck, vacuum tweezers.• Semiconductor industry. (Handler,

Mounter)• FPD industry. (Bonder)

• Printing machine.• Injection molding.• Adsorption and transfer.




(L/min)

(Pa)

1

10

100

1000

1 102 103 104 105

Pressure10

50Hz

Pum

ping

Spe

ed

DIS-501

DIS-251

DIS-90

Model DIS-90 DIS-251 DIS-501Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz

Nominal pumping speed L/min 90 108 250 300 500 600Ultimate pressure Pa 5.0 1.6 1.0

MotorSingle phase Single phase, 100/115/200/230V,

150W, 4P, Capacitor start & runSingle phase, 100/115/200/230V, 400W, 4P, Capacitor start & run

Single phase, 100/115/200/230V, 600W, 4P, Capacitor start & run

Three phase – Three phase, 200/208/230/380/400/415/460V, 400W, 4P

Three phase, 200/208/230/380/400/415/460V, 600W, 4P

Full load current

Single phaseA

2.6/1.3/1.6 (100/200/230V)

2.1/2.2/1.1/1.1 (100/115/200/230V)

4.8/2.6/2.4(100/200/230V)

4.8/4.3/2.8/2.4(100/115/200/230V)

8.5/4.3/3.9(100/200/230V)

10.0/8.6/4.8/4.0(100/115/200/230V)

Three phase – – 1.6/0.9/0.9/1.0(200/380/400/415V)

1.9/1.9/1.8/1.0(200/208/230/460V)

2.7/1.57/1.57/1.63(200/380/400/415V)

2.8/2.6/2.5/1.47(200/208/230/460V)

WeightSingle phase

kg14.0 25.0 44.0

Three phase – 23.0 38.0Inlet, outlet pipe diameter Inlet pipe KF-25 Outlet pipe KF-16 Inlet pipe KF-25 Outlet pipe KF-16 Inlet pipe KF-40 Outlet pipe KF-25Ambient temperature ℃ 5 – 40 5 – 40 5 – 40Water vapor handling g/day ≤ 5 (AF open) ≤ 25 (AF open) ≤ 25 (AF open) Overall dimensions

Single phase mm 214(W) × 308(L) × 225(H) 252(W) × 400(L) × 336(H) 290(W) × 443(L) × 397(H)Three phase – 252(W) × 370(L) × 336(H) 292(W) × 372(L) × 397(H)

DIS-90 DIS-251 DIS-501

AF = Air flush

Specifications


• Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls. • Operation from atmospheric pressure is possible.• High ultimate pressure level is attainable• Low vibration and low noise. • Maintenance cycle can be controlled by hour meter.


Scroll Type Dry Vacuum Pumps

DIS Series DIS-90 DIS-251 DIS-501Double wrap

• Analytical equipment.• Gas recovery system.• Coating equipment.• Back pump for TMP.• Helium leak detector.• Manufacturing process for semiconductor.



Model Voltage Applicable Volt CE Marked CSA Marked

DIS-90Single phase, 100V Standard

Single phase, 115V (60Hz) StandardSingle phase, 200—230V Standard

DIS-251

Single phase, 100V StandardSingle phase, 115V (60Hz) StandardSingle phase, 200—230V Standard

Three phase, 200V StandardThree phase, 208V (60Hz) StandardThree phase, 230V (60Hz) StandardThree phase, 380V (50Hz) StandardThree phase, 400V (50Hz) StandardThree phase, 415V (50Hz) StandardThree phase, 460V (60Hz) Standard

DIS-501

Single phase, 100V StandardSingle phase, 115V (60Hz) StandardSingle phase, 200—230V Standard


15


10

1

100

1000

DISL-101

DISL-502

50Hz

103 1051041021011Pressure

Pumping Speed

(L/min)

(Pa)

Model DISL-101 DISL-502


Nominal pumping speed L/min 100 120 430 520

Ultimate pressure Pa 20.0 30.0

Motor Single phase, 100/115/200/230V, 300W, 2P,Capacitor start & run

Three phase, 200/380/400/415V, 900W, 2P

Three phase, 200/208/230/460V, 1100W, 2P

Full load current A 3.2/1.6/2.0 (100/200/230V)

3.7/3.4/1.8/1.7 (100/115/200/230V)

3.6/1.9/1.9/1.8 (200/380/400/415V)

4.2/4.1/3.9/1.95 (200/208/230/460V)

Weight kg 15.0 36.0Inlet, outlet pipediameter Inlet pipe KF-25 Outlet pipe KF-16 KF-25


Water vapor handling g/day ≤ 100 (AF open) ≤ 250 (AF open)


DISL-101 DISL-502

AF = Air flush


Specifications

Single wrap type scroll which consists of each 1 orbiting and fixed scroll. Tough type scroll pump than DIS series against incoming particles and suitable for industrial use.


Scroll Type Dry Vacuum Pumps

DISL Series Single wrap DISL-101 DISL-502

• Pick and transfer system.• Cleaning and drying.• Degassing / deforming.• Packaging.



Model Voltage Applicable Volt CE Marked CSA Marked

DISL-101Single phase, 100V Standard

Single phase, 115V (60Hz) StandardSingle phase, 200—230V Standard

DISL-502




1000

100

10

110210110-110-2 103 104 1051

50Hz

Gas ballast valve open

GLD-040

GLD-136AGLD-136C

Pressure

Pum

ping

Spe

ed

(L/min)

(Pa)

Model GLD-040 GLD-136A GLD-136CUnit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz


Ultimate pressure※ Pa G.V. Closed : 0.67G.V. Open : 6.7

G.V. Closed : 0.67G.V. Open : 6.7


MotorSingle phase, 200W, 4P,

Multiple-range motorCapacitor start & run, 100 – 120V/200 – 240V

Three phase, 400W, 4P, Multiple-range motor

200 – 240V/380 – 460V

Single phase, 400W, 4P, Multiple-range motor

Capacitor start & run, 100 – 120V/200 – 240V

Full load current A

4.20 (100V), 4.40 (110V)4.60 (115V), 5.05 (120V)2.10 (200V), 2.20 (220V)2.30 (230V), 2.60 (240V)

3.60 (100V), 3.40 (110V)3.40 (115V), 3.60 (120V)1.80 (200V), 1.70 (220V)1.70 (230V), 1.80 (240V)

2.10 (200V), 2.20 (220V)2.30 (230V), 2.50 (240V)1.30 (380V), 1.30 (400V)1.40 (415V)

2.00 (200V), 1.90 (220V)1.90 (230V), 2.00 (240V)1.10 (380V), 1.10 (400V)1.15 (440V), 1.20 (460V)

6.8 (100 – 120V)3.5 (200 – 240V)

5.8 (100 – 120V)2.9 (200 – 240V)

Oil capacity mL 550 – 800 1,000 1,000Recommended oil R-2 SMR-100 SMR-100Weight kg 16.0 23.0 27.0Inlet port diameter mm KF-25 KF-25 KF-25Ambient temperature ℃ 7 – 40 7 – 40 7 – 40Overall dimensions mm 150(W) × 427(L) × 228.5(H) 170(W) × 485.5(L) × 240(H) 170(W) × 487.5(L) × 249.5(H)

GLD-040 GLD-136A GLD-136C

※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)

Specifications


GLD series features high performance, low vibration and noise and several functions such as gas ballast valve, oil-back-flow prevention mechanism, and large sized oil level gauge. This series equips multi-voltage motor and correspondent to international standard.


Oil-Sealed Rotary Vacuum Pumps

GLD Series GLD-040 GLD-136A GLD-136C

• Chemical, science experiment, Analyzer and Laser system.• Backing pumps for the electronic microscope.• Semiconductor equipments, sputtering equipment, vacuum

evaporation equipment. • Vacuum dryer, freeze dryer.




GLD-040 Single phase, 100—120V Standard —Single phase, 200—240V Standard —

GLD-136A Three phase, 200—240V Standard —Three phase, 380—460V Standard —

GLD-136C Single phase, 100—120V Standard —Single phase, 200—240V Standard —

17


1000

100

10

110210110-110-2 103 104 1051

50Hz


GLD-201AGLD-201B

GLD-280A

Pressure

Pum

ping

Spe

ed

(L/min)

(Pa)

GLD-280B


GLD-201A GLD-201B GLD-280BGLD-280A

Model GLD-201A GLD-201B GLD-280A GLD-280BUnit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz


Ultimate pressure ※ Pa G.V. Closed : 0.67G.V. Open : 6.7




MotorThree phase, 550W, 4P,

Multiple-range motor200 – 240V/380 – 460V

Single phase, 550W, 4P, Multiple-range motor

Capacitor start & run, 100 – 120V/200 – 240V

Three phase, 750W, 4P,Multiple-range motor

200 – 240V/380 – 460V

Single phase, 750/900W, 4P,Multiple-range motor

Capacitor start & run, 115V/200 – 240V

Full load current A

3.00 (200V), 3.10 (220V)3.30 (230V), 3.60 (240V)1.80 (380V), 1.90 (400V)2.00 (415V)

2.70 (200V), 2.70 (220V)2.70 (230V), 2.80 (240V)1.50 (380V), 1.60 (400V)1.70 (440V), 1.70 (460V)

8.2 (100-120V)4.1 (200-240V)

7.9 (100-120V)3.9 (200-240V)

3.60 (200V), 3.70 (220V)4.00 (230V), 4.20 (240V)2.10 (380V), 2.30 (400V)2.40 (415V)

3.30 (200V), 3.20 (220V)3.20 (230V), 3.20 (240V)1.90 (380V), 1.90 (400V)1.90 (440V), 2.00 (460V)

11.4 (115V), 5.90 (200V)5.80 (220V), 5.70 (230V)6.80 (240V)

12.3 (115V), 6.40 (200V)6.30 (220V), 6.20 (230V)5.70 (240V)

Oil capacity mL 1,100 1,100 700 – 1,100 700 – 1,100Recommended oil SMR-100 SMR-100 R-7 R-7Weight kg 26.0 29.0 34.0 42.0Inlet port diameter mm KF-25 KF-25 KF-25 KF-25Ambient temperature ℃ 7 – 40 7 – 40 7 – 40 7 – 40Overall dimensions mm 170(W) × 513.5(L) × 240(H) 170(W) × 515.5(L) × 249.5(H) 181(W) × 536(L) × 269(H) 182(W) × 585(L) × 271(H)

This picture is GLD-280A


Specifications

GLD series features high performance, low vibration and noise and several functions such as gas ballast valve, oil-back-flow prevention mechanism, and large sized oil level gauge. This series equips multi-voltage motor and correspondent to international standard.



GLD Series GLD-201A GLD-201B GLD-280A GLD-280B

• Chemical science experiment, Analyzer and Laser system.• Vacuum pumping system.• Back pump for SEM.• Semiconductor equipments, sputtering equipment, vacuum

evaporation equipment. • Vacuum dryer, freeze dryer.





GLD-201B Single phase, 100—120V Standard —Single phase, 200—240V Standard —


GLD-280B Single phase, 115V Standard —Single phase, 200—240V Standard —



1000

100

10

110210110-1 103 104 1051

50Hz

GHD-031

Pressure

Pum

ping

Spe

ed

(L/min)

(Pa)

70

60

50

40

30

20

10

0

280

240

200

160

120

80

40

01 × 10-2 1 × 10-1 1 × 100 1 × 101 1 × 102 1 × 103 1 × 104 1 × 105

(m3/h) (W)

(Pa)

Power consumption

Pumping Speed

Pum

ping

Spe

ed

Pow

er c

onsu

mpt

ion

Inlet Pressure

Oil-Sealed RotaryVacuum Pumps

(200L/min)

Model GHD-031Unit 50Hz 60Hz

Actual pumping speed L/min 30 36Ultimate pressure※ Pa 0.67Motor Single phase, 100 – 120V, 100W, 2P, Capacitor runFull load current A 2.0 (100 – 120V) 1.8 (100 – 120V)Oil capacity mL 370Recommended oil R-2Weight kg 9.3Inlet port diameter mm KF-16Ambient temperature ℃ 7 – 40Overall dimensions mm 120(W) × 288.5(L) × 163(H)

Model Unit MBS-051Actual pumping speed※1 m3/h 50Ultimate pressure※2 Pa 4.0 × 10-2

Motor DC Brushless motor, 200WPower supply Single phase, 100 – 120V / 200 – 240V (50/60Hz)Motor speed r/min 3500

Current A 1.1 (100V)/0.7 (200V) (At ultimate pressure)4.33 (100V)/2.54 (200V) (At maximum load)

Power consumption W 50 (At ultimate pressure)250 (At maximum load)

Oil capacity mL 50Recommended oil SMR-200Weight kg 11.0Inlet pipe diameter JIS VG-40Outlet pipe diameter JIS VF-40Backing pump Oil rotary vacuum pump 130 – 200L/minAmbient temperature ℃ 0 – 40Overall dimensions mm 167(W) × 410(L) × 130(H)

GHD-031 MBS-051

Specifications Specifications

Pumping speed curve

Pumping speed curve


GHD-031Single phase, 100—120V Standard —Single phase, 200—240V —

• Wide range voltage motor and correspond to CE, cTUVus. • Magnet coupling for no oil leakage from shaft seal and realized

longer lifetime.• Integrated check valve below the inlet port for backflow

prevention.

• Lower power consumption.• No oil leakage by adoption of magnet coupling.• Compact size and light weight. • Pumping can be started from atmospheric pressure.

Features Features

Applications Applications

Oil-Sealed Rotary Vacuum Pumps Mechanical Booster Pump

GHD Series MBS SeriesGHD-031 MBS-051

• Helium leak detector.• Analytical equipment. (GC/MS, ICP/MS, LC/MS)• Laboratory experiment.

• Ideal main pump to support pumping speed of backing pump.



※ : Significantly increases pumping speed in a pressure range where pumping speed of backing pump often drops.

※ 1 : Pumping speed varies depends on pumping speed of backing pump.※ 2 : Measured by ionization vacuum gauge.

19


1000

100

10

110210110-110-2 103 104 1051

50Hz


GCD-201X

GCD-136X

GCD-051X

Pressure

Pum

ping

Spe

ed

(L/min)

(Pa)

GCD-051X GCD-136X GCD-201X

Model GCD-051X GCD-136X GCD-201XUnit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz


Ultimate pressure※ Pa G.V. Closed : 0.67G.V. Open : 6.7



Motor Single phase, 100V, 200W, 4PSplit phase starting

Single phase, 100V, 400W, 4PCapacitor start & run Three phase, 200V, 750W, 4P

Full load current A 5.6 4.8 7.7 6.1 3.6 3.3 Oil capacity mL 500 – 800 1,000 1,100Recommended oil SO-M SO-M SO-MWeight kg 14.1 25.4 26.6Inlet port diameter mm KF-25 KF-25 KF-25Ambient temperature ℃ 7 – 40 7 – 40 7 – 40Overall dimensions mm 165.5(W) × 419(L) × 222.7(H) 170(W) × 493(L) × 241.1(H) 170(W) × 509.5(L) × 241.1(H)※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)


Specifications


GCD-051X

Single phase, 100V Standard — — —Single phase, 200V — — —Single phase, 22 0V — — —Single phase, 23 0V — — —

GCD-136X

Single phase, 100V Standard — — —Single phase, 200V — — —Single phase, 22 0V — — —Three phase, 20 0V — — —

GCD-201XSingle phase, 100V — — —Single phase, 22 0V — — —Three phase, 20 0V Standard — — —

GCD Series, direct drive, oil rotary vacuum pump is corrosion resistant for toxic and corrosive gases which is ideal for chemical, pharmaceutical applications. Surface of gas contacted parts are coated with hard plating. Three different sizes are available from 50L to 200L/min



GCD Series GCD-051X GCD-136X GCD-201X

• Semiconductor industry.• Chemical industry.• Post chemical-treatment drying.• Pharmaceutical industry.

※ Further details can be refered to our website. Outside drawing appears in Page 34—35.



Model VPC-1100Ultimate pressure 1.3 × 10-4 Pa (with LN2)

Evacuation time 10min to 10-4Pa from atmospheric pressure (with LN2)

Belljar size dia.390mm × 350mm(H)

Evaporation electrode structure 3 points switch (source length : 100mm)

Evaporation power supply 0 – 10V 150A (Max)

Vacuum systemOil diffusion pump (Water cooling) 1100L/secOil rotary vacuum pump 200L/min × 2Liquid Nitrogen trap

Control system Manual control

Vacuum gauge Pirani vacuum gauge “GP-1G”

Power required Three phase 200V 5.0 kVASingle phase 100V 1.0 kVA

Water requirement 1.5L/min (Water temperature : 20 – 25 degrees C,Water pressure : 200 kPa)

Weight 313kg

Overall dimensions (W) × (D) × (H) 1235mm × 850mm × 2155mm

Accessories Three phase 200V Cable 4mSingle phase 100V Cable 4m

1 Plate 7 Shutter2 Filter 8 Electrode COM3 Service port (L) 9 Electrode 14 Service port (S) 10 Electrode 25 Gauge port.1 11 Electrode 36 Hermetic seal port.3 pcs. 12 Prop

8

4

3

4

dia.120

4

11

12

4109

4

7

3

6

6

6

4 5

4

80

25 25

260

160

dia.120

Standard Specifications

Feedthrough collar

Optional Parts

※ Optional parts in the picture are not equipped.

※ Optional Parts • Ionization vacuum gauge • Deposition controller • System rack

※ Optional Parts • Side panel

※ Optional Parts • Conflat flange UFC070 Adapter

VPC-1100

1. Effective system with high pumping down performance. • 10-4Pa from atmospheric pressure in 10 minutes. • Cooling water can be stopped after 15 minutes from the system is shut

down.2. Scalable functions with various options. • Multi-layer deposition and co-deposition are available with additional

evaporation power supply.3. Compact and easy mobilibity.4. EB Deposition is available as optional.


High Speed Vacuum Coater

VPC Series VPC-1100

• Basic R&D for Electronic material, Semiconductor, solar cell.

• R&D of thin film for layer and organic EL.


Special components Evaporation Electrode SEREM “PSE-150C” Deposition Controller “CRTM-6000G” “CRTM-9000G” Film thickness sensor “CRTS-4” Ionization vacuum gauge “GI-M2” Electron beam evaporation source “EGK-3M”

Special parts Deposition shield plate Electrode partition Water cooling metal bell-jar UFC070 flange Oil mist trap (“OMI-200” “OMT-200A”) Sample holder Side/back panel Additional shutter Evaporation source/power supply for EB Flow switch, Substrate heating device Gas introduction port for service port System rack, Carbon electrode

Electrode structure options

Evaporation electrode 1 point + 2 points switch 2 points + 2 points switch 2 points + 3 points switch

21


Model VFR-200M / ERH VWR-400M / ERH VTR-350M / ERH VTS-350M / ERH

Ultimate pressure 8.0 × 10-4Pa (6.0 × 10-4Pa LN2)

4.0 × 10-4Pa (3.0 × 10-4Pa LN2)

4.0 × 10-4Pa (2.0 × 10-4Pa LN2)

※14.0 × 10-4Pa

(2.0 × 10-4Pa LN2)※1

Evacuation time 4.0 × 10-3Pa/15min(3.0 × 10-3Pa/15min LN2)

4.0 × 10-3Pa/10min(3.0 × 10-3Pa/10min LN2)

4.0 × 10-3Pa/10min(3.0 × 10-3Pa/10min LN2)

※14.0 × 10-3Pa/10min

(3.0 × 10-3Pa/10min LN2)※1

Belljar size dia.300mm × 300mm(H) dia.300mm × 300mm(H) dia.300mm × 300mm(H) dia.300mm × 300mm(H)Evaporation electrode structure (source length) 1 point (100mm) 1 point (100mm) 1 point (100mm) 1 point (100mm)

Evaporation power supply 0 – 10V 150A (Max) 0 – 10V 150A (Max) 0 – 10V 150A (Max) 0 – 10V 150A (Max)

Main pump Oil diffusion pump (Air cooling) 200L/sec

Oil diffusion pump (Water cooling) 400L/sec

Turbo molecular pump 345L/sec

Turbo molecular pump 345L/sec

Backing pump Oil rotary pump 100L/min Oil rotary pump 200L/min Oil rotary pump 200L/min Scroll pump 250L/minIn-line trap OMI-100 OMI-200 OMI-200 −Pirani vacuum gauge GP-1G GP-1G GP-1G GP-1GIonization vacuum gauge GI-M2 GI-M2 GI-M2 GI-M2Weight 145kg 148kg 165kg 160kgOverall dimensions (W) × (D) × (H)

(Body) 730mm × 603mm × 1161mm 730mm × 709mm × 1161mm 730mm × 584mm × 1161mm 730mm × 584mm × 1161mm(Power supply) 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm

Power required(Body) Single phase 100V 1.4kVA Single phase 100V 1.6kVA Single phase 100V 1.4kVA Single phase 100V 0.9kVA(Power supply) Single phase 200V 1.5kVA Single phase 200V 1.5kVA Single phase 200V 1.5kVA Single phase 200V 1.5kVA

※1 : LN2trap is optional.

Optional Parts Feedthrough collar

Specifications

VFR-200M / ERH VWR-400M / ERH VTR-350M / ERH VTS-350M / ERH

1. Deposition system for metal and organic material.2. Variable combination is available for pumping unit.3. High scalable functions.4. Enhanced safeness and reliability.5. Multi-layer deposition and co-deposition(Max: 4 layers) are available

with additional evaporation power supply and electrode.6. Easy viewable through glass bell jar and easy maintenance.


Vacuum Coater

DEPOX SeriesVFR-200M/ERH VWR-400M/ERH VTR-350M/ERH VTS-350M/ERH

• Basic R&D for Electronic material, Semiconductor, solar cell.

• R&D of thin film for layer and organic EL.


Electrode structureoptions

2 points switch 2 points simultaneously 3 points switch 3 points simultaneously

1 point + 2 points switch 2 points switch + 2 points switch 2 points switch + 1 point + 1 point

Feed through collar 20 ports (Side 16, Bottom 4) (300 x 100H)

Vacuum chamber

Bell jar holder Bell jar cover

Metal Bell jar

Accessories for inner vacuum chamber

Sample holder Adhesion shield plate Electrode partition Gauge port set Hermetic port set Sealing flange set

UFC070 Adapter KF-25 Adapter Gas introduction port Carbon electrode set Substrate heating device

350 degrees CSystem exterior

Elevating device Side panel, Back panel Deposition controller

Control panel Side panel for control panel Back panel for control panel

Pumping system

Automatic leak valve for Oir rotary vacuum pump (VFR-200M/ERH, VWR-400M/ERH)

dia. 90

dia. 90

80

1

1

6

6

6

5

5

3

1

7

1

4

21 Service port2 Gauge port

3 Hermetic seal port

4 Shutter5 Electrode

6Spare port for electrode

7 Prop



241

1

2

3

4

5

67

7

8

81011

9

dia.

64

RFS-200

Model RFS-200Standard target dia.80 1 – 5t

Vacuum chamber 200mm(W) × 250mm(D) × 150mm(H)SUS-304 Front door

Substrate electrode dia.80mm Cu attached heating system

Cathode dia.80mm Cu Water cooling

Shutter dia.95mm × 1 Manual

RF power supply 200W 13.56MHz

Power supply for substrate heating Digital controller Max 350 degrees C

Vacuum system Oil diffusion pump (Water cooling) 150L/secOil rotary vacuum pump G-101D 100L/min

Overall dimensions (W) × (D) × (H) 800mm × 725mm × 1635mm

Weight 200kg

Power required Single phase 100V 1.3kVA

Power required for RF Single phase 100V 0.5kVA

Water requirement 5 L/min (Water temperature : 25 degrees C, Water pressure : 200-300 kPa)

Ultimate pressure 6.6 × 10−4Pa

Evacuation time 5min to 10-3Pa

Sputtering pressure 10−1Pa (at Ar)

Specifications

Performance


1. Compact and easy mobilibity.2. High speed pumping is attainable with TMP.3. Introduction gas can be controlled continuously with flow control valve.4. Suitable for pre-sputtering.5. Automatic matching control is available.6. High accurate thin film.


High frequency Sputtering System

RFS Series RFS-200

• Basic R&D for basic material, high melting material, insulating material and semiconductor material.


Liquid Nitrogen trap

Ionization vacuum gauge

Magnetron

In line trap (OMI-100)

Turbo molecular pump

DC power supply

Introduction gas (2,3 lines)

Automatic leak valve for oil rotary pump

1 System rack 5 Viewport 9 Shutter2 Sample holder 6 Substrate electrode 10 Backing plate3 Front door 7 Gauge port 11 Target electrode4 Target 8 Service port

23


SCOTT-C3

Specifications Model VTR-150M/SRFSubstrate size dia.2 inch (dia.50.8mm) × t 1mm, 1unit

Cathode 2 inch, 3 ways

Effective area of sputtering dia.25 mm

RF power supply Max 300W (Variable from 40 – 300W)

Sputtering speed SiO2, More than 30nm/min at deposition

Film thickness distribution SiO2, within ±10% at dia.25mm

Ultimate pressure 6.6 × 10-4 Pa

Evacuation time Within 5 min to 6.6 × 10-3 Pa from atmospheric pressure

Substrate heating temperature Max 350 degrees C (Without substrate water cooling function)

Substrate turning range 3 positions, index turn (Approx 300 degree turn) by manual operation

Substrate electrode distance 50mm – 90mm (Variable : Half fixed)

Overall dimensions (W) × (D) × (H) 1150mm × 750.5mm × 1070mm

Weight 400kg

Power required Single phase 100V (50/60Hz) 3.0 kVA

Water requirement 2L/min (Water temperature : Less than 25 degrees C, Water pressure : 200kPa)


1. Parallel-plate type RF magnetron discharge method.2. Turbo molecular pump is used for main pumping.3. Multiple deposition is available by dia.2 inch , 3 cathodes.4. All gauges are installed in the rack.5. Sputtering speed 30nm/min (SiO2) is available by magnetron sputtering.6. Easy handling for substrate exchange and maintenance from top cover

open style.7. Reactive sputtering is available as optional.


High frequency magnetron Sputtering System

SCOTT Series VTR-150M/SRF

• Basic R&D for basic material, high melting material, insulating material and semiconductor material.


Etching function (cleaning)

Substrate heating 600 degrees C (Water cooling chamber)

Mass flow controller

In line trap (OMI-100)

4 inch, 1 way

DC power supply

Introduction gas (2,3 lines)

Automatic leak valve for oil rotary pump

1 Trigger electrode 5 Sealing flange 9 Vent valve2 Electrode partition 6 Viewport 10 Gauge port3 Cathode 7 Shutter handle4 Gas introduction 8 Shutter

1

2

3

4 5

5

6 7

89

10

103

3

dia.64

o



GLD-136C+OMT-200A

StandardExhaust Cap

OMT-200A

GLD-136C+OMT-200A+OFI-200V

StandardExhaust Cap

OMT-200A OFI-200V

GCD-136X+OMC-200

OMC-200

GLD-136C+OMI-200+KF-25 Exhaust pipe

StandardExhaust Cap

OMI-200Cap

Hose port Exhaust pipe

KF-25Exhaust pipe

O-ring

OMI-200

GLD-136C+Selectable Suction pipe

50 mm sq adapter

dia.12 dia.15

Standard Suction pipe

+

Hose port Suction pipe

KF-25Suction pipe

O-ring

Unnecessary case of Centering

Clamp

KF Flange

KF-25Suction pipewith attached o-ring

Suction and Exhaust Trap GLD-136C+Selectable Suction pipe

Standard Suction pipe

Hose port Suction pipe

dia.27

Suction and Exhaust Pipe

KF Flange Attachment Process Standard Composition

Centerring

KF Flange

KF Flange

ClampAfterAttachment

Attachment of Oil Rotary Vacuum Pump Optional parts

25


Accessories for Oil Rotary Vacuum Pumps

Fore-line Trap (Inlet filter)

Vacuum Pump Suction and Exhaust Filter

KF-25 clamp needed for installation. ※ : Filters are non-replaceable due to closed type.

: Pumping speed of applicable models is at 50Hz.

AC

C

B

OFI-200OFI-050

SGT-100SGT-200

1916

dia. 89.1

Exhaustport

Suction port

H

Units: mm.

Models Filter system Applicable models

Pressure range

Ambient temperature Ambient humidity Suction port Exhaust port Height

SGT-100Out · In · Pass 500L/min

or less 0.1MPa 7 – 40℃ 85%(non condensing)

KF-25 KF-25 154mm

SGT-200 KF-40 KF-40 234mm

Models Applications Applicable models A B C

※OFI-050C Prevent counter flow of oil diffusion 50L/min or less 74 114 KF-25

※OFI-200C Prevent counter flow of oil diffusion 200L/min or less 102 150 KF-25

※OFI-050V Prevent particles or liquid into vacuum pumps 50L/min or less 74 114 KF-25

※OFI-200V Prevent particles or liquid into vacuum pumps 200L/min or less 102 150 KF-25

Optional Parts

This filter can trap acidic gas, oil mist effectively by using ion-exchanged resin fiber. Filter can be placed both vacuum and exhaust side and filter can be replaceable.



SO-M 1L

SO-M 4L

R-7R-2

SMR-100 SO-M R-2/R-7

Models Can size

ULVOIL R-2Synthetic oil

1L can4L can20L can

ULVOIL R-7Synthetic oil

2.2L can8L can20L can

Vacuum Pump Oil

Models Can size

SMR-100Mineral oil

1 L (2 × 500ml cans)4L can18L can

Models Can size

SO-MSynthetic oil

1L can4L can18L can

OMT-050A

OMT-100A OMT-200A

Models Applicable models A B C

OMT-050A GLD-040, GHD-031 G3/4 dia.65 93

OMT-100A – G1 dia.113 135

OMT-200A GLD-136A, GLD-136CGLD-201A, GLD-201B

G1 dia.113 135

Units: mm. Oil-mist Trap

: Filter replaceable

B

A

C

Oil-mist Separator (Anti-corrosive type)

OMC-200OMC-050

Units: mm.

Drain port(PT1/8)

E

BA

A

C D

Models Applicable models A B C D E

OMC-050 GCD-051X (Anti-corrosive) KF-25 dia.66 116 148 dia.74

OMC-200 GCD-136X, GCD-201X (Anti-corrosive) KF-25 dia.90 140.5 173 dia.99

: Chemical type (KF-25 clamp needed for installation)

Adapter for Trap This Adapter is required to adjust screw diameter from G3/4 to G1.

Type of Adapter Applicable models Adaptive oil-mist traps

G 3/4 male × G1 female GLD-040, GHD-031OMI-100

OMT-100A

In-line Trap (Piping connection type oil-mist trap)

OMI-100 OMI-200

Units: mm.

Models Applicable models A B C D E

OMI-100 ※ GLD-040, GHD-031 G1 dia.94 166 177 G1

OMI-200 ※ GLD-136A, GLD-136CGLD-201A, GLD-201B

G1 dia.116 166 178 G1

B

A

C

E

D

: Filter replaceable ※ : In-line type : Adapter for trap is necessary.

Optional Parts

27


Clamp (Material : Aluminium)

Blank Flange (Material : SUS304)

Nipple (Material : SUS304)

Tee (Material : SUS304)

Reducer (Material : SUS304)

Centerring (Material : SUS304)

Nozzle (Material : SUS304)

Elbow (Material : SUS304)

Cross (Material : SUS304)

KF Flange (Material : SUS304)

Standard SCK-1016 SCK-1025 SCK-1040

Flange size KF-16 KF-25 KF-40

A 45 55 70

B 61 72 90

C 16 16 16

dia.D 22 32 47



dia.A 30 40 55

dia.B 17.2 26.2 41.2

C 6 6 6



dia.A 30 40 55

dia.B 20 27.2 42.7

dia.C 16 24 39

D 40 50 65

Standard SCK-9025 SCK-9040

Flange size KF-16/25 KF-25/40

dia.A 30 40

dia.B 40 55

dia.C 20 27.2

dia.D 16 24


Flange size KF-25 KF-25

dia.A 40 40

B 6 6

C 35 35

dia.D 12 18



dia.A 30 40

dia.B 20 27.2

dia.C 16 24

D 40 50



dia.A 30 40 55

dia.B 17.2 26.2 41.2

Connectedpipe

dia.20t = 2

20A10S

32A10S

dia.C 16 24 39

dia.D 20 27.2 42,7

E 10 20 20



dia.A 30 40 55

dia.B 20 27.2 42.7

dia.C 16 24 39

D 40 50 65

dia.D

A C

B dia. Bdia. A

DC



dia.A 17 26 41

dia.B 16 24 39

C 3.9 3.9 3.9

D 8 8 8

D

dia.A

dia. A

dia. C

dia.B

dia. B

C

dia.A

dia.D

C

B

dia.

A

dia.

B

dia.

C

D

Standard SCK-5016 SCK-5025 SCK-5040Flange size KF-16 KF-25 KF-40

dia.A 30 40 55dia.B 20 27.2 42.7dia.C 16 24 39

D 60 100 100 dia.A

dia.Bdia.C

D

D

dia.

A

dia.

Bdi

a. C

D

D

dia.A

dia. Bdia. C

D

D

dia.B

dia.A

dia. C

dia. D

D

40

dia.Adia.B

dia.

Adi

a. B

dia.Cdia.D

dia.

Cdi

a. D

E

Type a Type b

E

Accessories for Oil Rotary Vacuum PumpsOptional Partsunits : mm.



VCR Adapters (Material : Joint = SUS316, Flange = SUS304)

Gauge port (Material : SUS304)

Flexible tube (Material : SUS316)

Leak port (Material : SUS304)

Female

Standard SCA-1614-F SCA-1638-F SCA-1612-F SCA-2514-F SCA-2538-F SCA-2512-F

Flange size KF-16 KF-16 KF-16 KF-25 KF-25 KF-25

Tube diameter 1/4 inch 3/8 inch 1/2 inch 1/4 inch 3/8 inch 1/2 inch

A 35.8 42.1 40.6 35.8 40.6 40.6

dia.B 3 7.1 10.2 4.6 7.1 10.2

Male

Standard SCA-1614-M SCA-1638-M SCA-1612-M SCA-2514-M SCA-2538-M SCA-2512-M

Flange size KF-16 KF-16 KF-16 KF-25 KF-25 KF-25

Tube diameter 1/4 inch 3/8 inch 1/2 inch 1/4 inch 3/8 inch 1/2 inch

A 35.8 42.1 40.6 35.8 40.6 40.6

dia.B 3 7.1 10.2 4.6 7.1 10.2

Standard SCO-3016 SCO-3025


A 65 66.5

Standard SCO-1025 SCO-1040Flange size KF-25 KF-40

Pipe diameter dia.15 dia.15A 74 58

dia.B 25 25

Standard SCO-2025 SCO-2040Flange size KF-25 KF-40

Pipe diameter dia.18 dia.18A 74 58

dia.B 28 28

dia.

B

A

dia.

B

AFemale Male

dia.

B

AA

Standard Flange size (mm) STK-016-250 KF-16/250STK-016-500 KF-16/500STK-016-1000 KF-16/1000STK-025-250 KF-25/250STK-025-500 KF-25/500STK-025-1000 KF-25/1000STK-040-250 KF-40/250STK-040-500 KF-40/500STK-040-1000 KF-40/1000

Rubber Vacuum Hose

Size (I.D. × O.D.) Adaptable hose port6 × 18 dia.8

7.5 × 20 dia.99 × 24 dia.11, dia.1212 × 30 dia.1515 × 36 dia.16, dia.1818 × 42 dia.20, dia.2225 × 50 dia.27

Optional Parts Accessories for Oil Rotary Vacuum Pumpsunits : mm.

29


12

34

5

6

78

9

10

1112

13 14

15

Suction Pipe

: Standard type : Replaceable (no Adapters necessary) + 40 mm sq : Replaceable (40 mm sq Adapter required) + 50 mm sq : Replaceable (50 mm sq Adapter required)

Type Products Material GHD-031GLD-040

GCD-051X

GLD-136AGLD-136CGLD-201AGLD-201BGCD-136XGCD-201X

GLD-280AGLD-280B

Photo number

Hose port type

Hose port suction pipe (dia.8 × M20) BS + plate + 40 mm sq + 50 mm sq 1

Hose port suction pipe (dia.12 × M20) BS + plate + 40 mm sq + 50 mm sq 2

Hose port suction pipe (dia.15 × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 3



Hose port suction pipe (dia.27 × 40 mm sq) ZDC + plate

Hose port suction pipe (dia.27 × 50 mm sq) ZDC + plate 6

Hose port suction pipe (dia.30 × 50 mm sq) ZDC + plate 7

ForGHD-031 only

Hose port suction pipe for GHD-031 (dia.12) BS + plate

Hose port suction pipe for GHD-031 (dia.18) BS + plate

Suction pipe for GHD-031 (KF-16) BS + plate

KF-25 type

KF-25 suction pipe (KF-25 × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 8

KF-25 suction pipe (KF-25 × 40 mm sq) PPS 9

KF-25 suction pipe (KF-25 × 50 mm sq) PPS 10

1/4 screw type

A-type suction pipe (R1/4-L20 Male × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 13

B-type suction pipe (R1/4 Female × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 15

C-type suction pipe (R1/4-L10 Male × M20) BS + plate + 40 mm sq + 50 mm sq + 50 mm sq 14

Adapter40 mm sq Adapter (M20 Female) ZDC 11

50 mm sq Adapter (M20 Female) ZDC 12

: Equipped with vacuum pump : Replaceable (no Adapters necessary) ※ Remarks: Different anti-corrosive quality as standard exhaust pipes.

Exhaust Pipe

Suction Pipe Exhaust Pipe

Type Products Material GLD-040 GHD-031

GLD-136AGLD-136CGLD-201AGLD-201BGLD-280AGLD-280B

GCD-051XGCD-136XGCD-201X

Photo number

Hose porttype

Hose port exhaust pipe (dia.12 × G3/4) BS + plate

Hose port exhaust pipe (dia.15 × G3/4) BS + plate 16

Hose port exhaust pipe (dia.18 × G3/4) BS + plate 17

Hose port exhaust pipe (dia.27 × G1) BS + plate ※

KF flangetype

KF-25 exhaust pipes (KF-25 × G3/4) PPS

KF-25 exhaust pipes (KF-25 × G1) PPS

KF-16 (G3/4) BS + plate

Exhaustpipe

Exhaust pipes Assy (G3/4) PA

Exhaust pipes Assy (G1) PA ※

Suction and Exhaust Pipes for Oil Rotary Vacuum Pumps

Optional Parts

1617



Dry pump

Dry pump

Dry pump

Dry pump

Dry pump

Dry pump

Dry pump

Dry pump

DAP-12S (see p.6)

DA-60S (see p.7)

DAT-100S (see p.7)

DA-40S (see p.8)

IN

OUT

91

(163)

4-M4 Tap4-M3 Tap 67±1

80±1

155

4-Rubber legs

(94)

55.5

4524

(22) (4)

M4 Screw (EARTH)

67

CCW M4 TapM3 Tap49

57

96.1

(100

.6)

489

.6

DAP-6D (see p.6)

DA-30D (see p.7)

DAT-50D (see p.7)

DA-20D (see p.8)

91

(163)

4-M4 Tap4-M3 Tap 67±1

80±1

155

(94)

4-Rubber legs

96.1

(100

.6)

4524

(22)

55.5

(4)

CCW

89.6

M4 TapM3 Tap49

57

M4 Screw (EARTH)67

4

INOUT

(30)

27.5

(200

)91

12

Rubber legs 4-M420060160

95

278

E

(165

)

224.

5

160136

16722.5

212INOUT

(30)

(200

)

27.5IN

91

12

20060160

95

278

E

22.5

(165

)

224.

5

160136

212

Rubber legs 4-M4

dia.132

OUTIN

Lead wire Circle shaped terminals R1.25-5

305

Rubber legs

4-M5 Depth 10

10 232130

173.8

144

54

150120

dia.132

305

Rubber legs

4-M5 Depth 1010

232130

173.8

OUT

IN

144

54

150120

Lead wire Circle shaped terminals R1.25-5

66.5

(70)

(165

)

10870

(112)

186

84IN 68

236(240)

(11)

(178

)

Rubber legs 4-M4

70

84

108

(165

) (70)

(112)

66.5

(178

)

(11)

(240)236186

IN OUT

Rubber legs 4-M4

Outline Drawing

31


Dry pump

Dry pump

Dry pump

Dry pump

Dry pump

Dry pump

Dry pump

Dry pump

DA-81S (see p.8)

DA-120S (see p.9)

DA-241S (see p.9)

DTU-20 (see p.10)

DA-41D (see p.8)

DA-60D (see p.9)

DA-121D(see p.9)

DAU-20 (see p.10)

10.5

4-M4 Tap

217

320

230

(16.5)161 157

192

90133

INOUT

10.5

4-M4 Tap

217

320

79.5

230

(16.5) 181IN OUT

192

90133

(6)

90

225

(81)

(96)

(92)

140110

340347

300

201.

5(9

)

(5)

132 108

229

(238

)

INOUT

90

(81) (81)INOUT

(92)

(96)

225

140110

132 108

(6)(5)

(9)

201.

522

923

8

300

347340

360

285

272

13

402

354 120144180

270

411

221 INOUT 193.5

360

285

272

13

402

354

95411

207

270

IN OUT

120144180

1377(84)

1013103

Gas ballast valve

(217

)

(97)(327)

14849.5OUT

IN

(72)

(72)

(25)

13

1013

103

77(84)

Gas ballast valve

(25)

(97)OUT

IN

(217

)

(72)

(72)

148

(327)

49.5

All size unit is mm



Dry pump

Dry pump

Dry pump Dry pump

Dry pump

Dry pump

Dry pump

Dry pump DOP-300SA (see p.13)

DOP-80S (see p.12) DOP-80SP (see p.12)

DOP-420SA (see p.13)

DOP-40D (see p.12)DTC-60 (see p.11)

DTC-41 (see p.11)DTC-22 (see p.11)

70118 10

.6 4-M4 Tap186

142 272

133

(16.5)

202

175.

1INOUT

10.5

4-M4 Tap

217

161 133

320

230

(16.5)

192

90133

155

INOUT

(242

)

228

(14)

(224

)

185

340INOUT

280300330

110150

4-M4

158

Earth screw

(246)(27) (27)

(25.5) (25.5)

(270)

1324-M5 Tap

219

15 15192

179

1.5

66.5

89

162.

5

7

16

104

94

INOUT

(246)(27) (27)

(25.5) (25.5)

(270)

132

219

15 15192

179

1.5

66.5

89

162.

5

7

16

104

94

Earth screw

4-M5 Tap

INOUT

(25.5)(25.5)(288)

237 1694

(27) (27)

(264)210

181

1.5

66.5

15

(3.5)

Earth screw

164.

585

32 132

7

10489

4-M5 Tap

15

INOUT

Cable diameter dia.6-12mm

108

100

(231

)

19

(315)

(160)(155)

136.85 136.85120

IN

OUT

(443)

180.5 180.5 82

113.5 113.5

M6 195

253

1810

710

8

310

102.

5

48.5269

149.5119.5

523

168IN

OUT

Outline Drawing

33


Oil pump

Oil pump

Dry pump

Dry pumpDry pump

Dry pump

Dry pump DIS-90 (see p.14)

GLD-136A (see p.16)

GLD-040 (see p.16)DISL-502 (see p.15)

DISL-101 (see p.15)DIS-501 [Three phase] (see p.14)

DIS-251 [Single phase] (see p.14)

(10)

(76)

(37)

85

90180

154

225

140112

30812391

OUT Air flush port (Rc1/8) 4-dia. 7

IN400

73.5

38

OUT4-dia. 11Air flush port(Rc1/8)

252

180136

336

96

170

52

122

23.5

101

97121 130

IN

OUTIN

Air flush port (Rc1/8)292

46

372

99

42

397

373

29 36

288

372

310

42

177

215

(50)14020210 358

120

90138

110

IN

OUT

Air flush

4-dia. 9

2-dia. 8.5

252

491

144

(477)IN

OUT

14

21

317

(76)220

280

140

231

Air flush

228.

578.5

39

Drain plug

Gas ballast valve

Oil level gaugeSuction pipe

15020 110 20

1374

1018

35 18

Rubber legs

Oil inlet plug

Exhaust pipe

145

427

36.5

81

207

17 206 17

70

23.5356446

MINMAX

IO

MIN

MAX

Rubber legs

Oil inlet plug

Suction pipe

Drain plug

Oil level gauge

Gas ballast valve

Exhaust pipe212.5

485.5

(240

)39

3337

20 130 20

148

88.5

dia. 6

0

170

1886

72 2020 260

29 4883181

9056

9

35

Oil pump

487.5

214.5

4939

249.

588

861814

8dia

. 60

2020 130170

3337

9

4829359056

83181

202602072

MIN

MAX

Exhaust pipe

Suction pipe

Drain plug Rubber legs

Oil inlet plugOil level gauge

Gas ballast valve

GLD-136C (see p.16)

All size unit is mm



Oil pump

Oil pump

Oil pump

Oil pump

Oil pump

214.5

515.5

2026020

Rubber legs

100

209 83

4829359084

Oil inlet plug

9

Exhaust pipe

Suction pipe

249.

549

888

861814

39dia

. 60

2013020170

Drain plug

3337

Oil level gaugeGas ballast valve

Oil inlet plug

269

3686

43.5 31.5

32

Oil level gauge

Suction pipe

Gas ballast valve

124

2923

2020 130

181175

228225 833375 110

20 14Exhaust pipe

120536

116

Rubber legs

3002020 260

174134

182

124

271

8629

25

295335585

Gas ballast valve

Oil level gauge

Suction port

2×2-dia.10

43.5

225

31.5

32 36

75 11083 277

332014

175419

29

Exhaust pipe

Rubber legs76

36.570 145

46643523.518

Oil inlet plug

17240

17206

Filtration joint(R3/8)

Gas ballast valve

35

Suction pipe

222.

774

3910

15.5

18

78.5

13

15020 110 20

Drain plugFiltration joint(R3/8)

Oil level gauge

165.5

18.2

MAX

MIN

493

202

20 130 20170

18.2

868

14dia

. 60

88.5

241.

1

72Rubber legs

2020 260(27)

Filtration joint (R3/8)Filtration joint (R3/8)

83

4829Exhaust pipe

Suction pipe

Drain plug

Oil inlet plug

Oil level gauge

Gas ballast valve

3337

181

9056 35

40.439

GLD-280A (see p.17)

GCD-051X (see p.19)

GLD-201B (see p.17)

GLD-280B (see p.17)

GCD-136X (see p.19)

Outline Drawing

Oil pump Oil pumpGHD-031 (see p.18) MBS-051 (see p.18)

3638

Oil level gauge Suction pipe23.5

23.5 23

Exhaust pipeOil inlet plug

Drain plug

163

133

1858

13

12010764

132.5 1740135 106

2913.563.523

288.5

7.571.559.5 120 1515

Rubber legs dia. 4-8

165 13.5

130

Inlet flange

Outlet flangeDrain plug

Oil inlet plug

123.610.5386

Oil level gauge

167

6565

130

dia.105

83.5 83.5

dia.105

Oil pump

Exhaust pipe

Suction pipe(2

40)

39

Drain plug

8618

170

dia.6

088

.58

14

2013020

37 33

Oil level gaugeGas ballast valve

513.5

212.54835

8329

26020 20

Oil inlet plug

Rubber legs

9 100

9084209

MAX

MIN

GLD-201A (see p.17)

35


System

System

System

Oil pump

RFS-200 (see p.22)

VTS-350M/ERH (see p.21)

"SCOTT-C3" VTR-150M/SRF (see p.23)

509.520 130 20

170100

Rubber legs2020 260(27)

Filtration joint(R3/8)Filtration joint(R3/8)

Drain plug

190.5

18.2

868

40.4

14dia

. 60

88.5

39

241.

183

4829Exhaust pipe

Oil inlet plugSuction pipeGas ballast valveOil level gauge

3337 84 3590209

(64)

1161

760

520730

1625

.5(1

635)

800 630(55) (40)

722

1070

1102

581

704

521

System VWR-400M/ERH (see p.21)

MIN

MAX

(89)(100)

1161

760

520730

System VTR-350M/ERH (see p.21)

MIN

MAX

(64)

1161

760

520730

System

Pa

(83)730 520

760

1161

VFR-200M/ERH (see p.21)

GCD-201X (see p.19) System

750 (40)

921

2155

149

377

(90) 1145

VPC-1100 (see p.20)

All size unit is mm

• The dimensions and specifications of the products listed in this catalog are subject to change without prior notice for improvement of their performance.

10122000ADP PRINTED WITH

SOY INK TM

SMA

LL VAC

UU

M PU

MPS C

ATALO

G

U.S.A.

U.S.A. U.K.KOREA

JAPAN

BEIJING

RUSSIA

SHANGHAI

HONG KONG

THAILANDMALAYSIA

SINGAPORE

GERMANY

INDIA

TAIWAN

SHENYANG

12 13 14 23

7

18

15

16 17

19

6 22

21

20

26

25

3

4

24

5

8 9 10 11

1 2

Global Network

ULVAC KIKO, Inc.1 Sales Division (Overseas Division)

1-10-4 Kitashinyokohama, Kohoku-ku, Yokohama City, Kanagawa 223-0059, JapanTEL (81) 45-533-0206 FAX (81) 45-533-0204

ULVAC Group Global Network JAPAN

2 ULVAC Inc. Head Office S M2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan TEL: (81) 467-89-2033 FAX: (81) 467-82-9114 U.S.A.

3 ULVAC Technologies, Inc. Headquarters S M401 Griffin Brook Drive Methuen, MA 01844, U.S.A.TEL: (1) 978-686-7550 FAX: (1) 978-689-63004 ULVAC Technologies, Inc. California Sales & Service Center S M

4005 Clipper Court, Fremont, CA 94538, U.S.A.TEL: (1) 510-226-0151 FAX: (1) 510-226-0167 GERMANY

5 ULVAC G.m.b.H. S MParkring 11, 85748 Garching(Munich), GermanyTEL: (49) 89-960909-0 FAX: (49) 89-960909-96 CHINA

6 ULVAC (SHANGHAI) TRADING CO., LTD. S M No.1000 Qixin Rd, Shanghai, 201100, China TEL: (86) 21-6127-6618 FAX: (86) 21-614568217 HONG KONG ULVAC CO., LTD. S M

Flat L, 9/F., Summit Building, 30 Man Yue Street, Hunghom, Kowloon, Hong KongTEL: (852) 2523-5940 FAX: (852) 3003-6256 TAIWAN

8 ULVAC TAIWAN Inc. S8F., No.5, Keji Rd., Hsinchu Science Park, Hsinchu City, 30078, Taiwan, R.O.C.TEL: (886) 3-579-5688 FAX: (886) 3-579-76889 ULVAC TAIWAN Inc. Tainan Sales Division S

3F, No.27, Nanke 2nd Rd., Tainan Science Park, Sinshih Township, Tainan Country 74147, Taiwan, R.O.C.TEL: (886) 6-505-3860 FAX: (886) 6-505-368010 ULTRA CLEAN PRECISION TECHNOLOGIES CORP. Taoyuan CIP Feb. MNo.19-2, Lane 54, Sec. 1, Minsheng N. Rd., Gueishan Township, Taoyuan Country 33391, Taiwan, R.O.C.TEL: (886) 3-358-5481 FAX: (886) 3-358-528611 ULTRA CLEAN PRECISION TECHNOLOGIES CORP. Southern Taiwan Science Park Feb. MNo.27, Sec. 1, Huandong Rd., Southem Taiwan Science Park, Sinshih Township, Tainan Country 74146, Taiwan, R.O.C.TEL: (886) 6-505-8888 FAX: (886) 6-505-8866 KOREA12 ULVAC KOREA, Ltd. Head Office S 837-4, Hansan‐Ri, Chungbuk-Myeon, Pyongtaek, Kyonggi-Do, Korea 451-830TEL: (82) 31-683-2922 FAX: (82) 31-683-903313 ULVAC KOREA, Ltd. Seoul Branch S 1338-23, 5F Cliford B/D, Seocho-Dong, Seocho-Ku, Seoul, KoreaTEL: (82) 2-3473-2920 FAX: (82) 2-3473-088514 ULVAC KOREA, Ltd. Gumi Customer Service Center MJiwon-5Dong, 4F 401, 92-9 Imsoo-Dong, Gumi-City, Kyoung -Buk, KoreaTEL: (82)54-471-3567~ 8 FAX: (82)54-471-3569

SINGAPORE15 ULVAC SINGAPORE PTE LTD S M30 Loyang Way, #7-10, JTC Building, Singapore 508769TEL: (65) 6542-2700 FAX: (65) 6542-2755 MALAYSIA16 ULVAC MALAYSIA SDN. BHD. KL FACTORY S MNo.8 Jalan Gitar 33/3, Elite Industrial Eatate, Off Jalan Bukit Kemuning 40350 Shan Alam, Seangor Darul Ehsan, MalaysiaTEL: (60) 3-5121 4700 FAX: (60) 3-5122 375517 ULVAC MALAYSIA SDN. BHD. Penang Branch S MUnit 2, Lower Level 5, Hotel Equatorial Penang, No.1, Jalan Bukit Jambul, 11900 Penang, MalaysiaTEL: (60) 4-643-4700 FAX: (60) 4-644-3755 THAILAND18 ULVAC (THAILAND) LTD. S M140/29 Moo 12 T. Rachathewa, A. Bangplee Samutprakarn 10540 ThailandTEL: (66) 2-3124447 FAX: (66) 2-3124474 INDIA19 ULVAC, Inc. India Branch S301, Tara Tycoon 12-13-97, Tarnaka Secunderabad-500 017, IndiaTEL: (91) 40-27007006 FAX: (91) 40-27007005

Distributor CHINA20 SKY Technology Development Co., Ltd. CAS SNo.1, Xinyuan Street, Hunnan Industrial Zone, Shenyang, 110168, ChinaTEL: (86) 24-23826865 FAX: (86) 24-2382680021 KYKM Beijing Zhongkekemei Vacuum Technology Co., Ltd. S MNo.266 Cheng Fu Road, Zhongguancun, Haidian District, Beijing, 100080, ChinaTEL: (86) 10-62528994 FAX: (86) 10-6254884222 SHANGHAI WANLAI INDUSTRY LTD. SSuite 601, Mansion Abbrebiation, No.888 YiShan Road, Shanghai, 200233, ChinaTEL: (86) 21-64320612 FAX: (86) 21-64320072 KOREA23 POONGIL COMMERCIAL CO., LTD S M4F Woori Bldg, 129-4, Namyoung-Dong, Youngsan-Gu, Seoul, KoreaTEL: (82) 2-765-1477 FAX: (82) 2-744-5507 U.S.A.24 Kurt J. Lesker Company S MPO Box 10, 1925 Route 51, Clairton, PA 15025, U.S.A.TEL: (1) 412-387-9200 FAX: (1) 412-384-2745 Sales (US): 1-800-245-1656 U.K.25 Kurt J. Lesker Company Ltd. S M15/16 Burgess Road, Hastings, East Sussex TN35 4NR, EnglandTEL: (44) 1424-458100 FAX: (44) 1424-458103 RUSSIA26 Alwest-vacuum Ltd. S MElektrodnaya yl., 11, Moscow, RussiaTEL: (7) 495-309-27-38 FAX: (7) 495-309-20-52

S = SalesM = Maintenance

Documents

SMALL VACUUM PUMPS - 真空ポンプ・排気装置・ …ulvac-kiko.com/en/catalog/pdf/pumps_catalog_en.pdfHigh Vacuum Type DAU-20 10 DTU-20 10 Anti-corrosive Type DTC-22 11 DTC-41