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UNIVERSAL CONCEPT FOR FABRICATING ARBITRARY SHAPED IPMC TRANSDUCERS AND ITS APPLICATION ON DEVELOPING ACCURATELY CONTROLLED SURGICAL DEVICES Reporter: sang-chung yang( ) Advisor: Prof. C.H. Liu MEMS2007 Page:32 Gou-Hua Feng and Ri-Hong Chen Department of Mechanical Engineering, National Chung Cheng University

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Sang-chung MSCL Introduction Working principle Fabrication Testing Results Conclusions Outline

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Sang-chung MSCL Introduction Ref: JiannJiann-Liang Chen MD, PhD Ref: Gou-Hua Feng 10cm 0.5~1cm

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Sang-chung MSCL tttt Nafion IPMC Ref: Yung Yuen CO Ref: Gou-Hua Feng Introduction IPMC:Ionic polymer metal composites

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Sang-chung MSCL Working principle Working principle of an IPMC transducer: (Left) No voltage is applied. (Right) Voltage isapplied to cause IPMC bending. Ref: Byungkyu Kim et al,2003 R:reaction force E:young s modulus I:inertia max:maximum deplacement at tip L:length of IPMC V=0 V=5

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Sang-chung MSCL Fabrication IPMC fabrication method 1 IPMC fabrication method 1 Process flow diagrams for fabricatingIPMC transducers with MEMS parallel processing spirit.

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Sang-chung MSCL IPMC fabrication method 2 IPMC fabrication method 2 Fabrication process flow diagram for the production of IPMC transducers Its different compare to method1. Ref: Gou-Hua Feng et al, 2007 Fabrication 2.Apply Wax 1.Substrate 3.Deposit parylene-c 4.Remove wax 5.Pattern PR 6.Spray Nafion 7.Remove parylene 8.Deposit Pt 9.Immersion into NaOH 10.After 3 hours

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Sang-chung MSCL Fabrication Photograph of negative photoresist JSR-made micromold array on bulk-micromachined SiN diaphragms. Photograph of diluted Nafion solution sprayed to fill up the micromolds

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Sang-chung MSCL (Top) Individual devices of IPMC transducers with platinum electrodes simultaneously formed on top and bottom surfaces. (Bottom right) Cross- sectional view of the device with a clear edge that no short-circuits occur. (Bottom left) A newly developed device with varied thickness Fabrication

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Sang-chung MSCL Testing Experimental setup for measuring displacement of actuated IPMC transducers. Experimental setup for measuring force output of the device with a high-resolution (0.01 mN) electronic balance.

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Sang-chung MSCL Relationship between the displacement and frequency. Results

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Sang-chung MSCL Results Results of instantaneous maximum output force vs. applied voltage for 0.5, 1, and 1.5 Hz.

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Sang-chung MSCL Demonstration of the IPMC transducer gripping a flexible tube (Left: Front view; Bottom right: side view). Results

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Sang-chung MSCL IPMC ? IPMC IPMC Conclusions

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Sang-chung MSCL Introduction Ref: Ref: Byungkyu Kim et al,2003