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Development of a mover havingDevelopment of a mover havingone nanometer precision and one nanometer precision and
4mm moving range4mm moving range
Y. Morita, S. YamashitaICEPP, University of Tokyo
Y. Higashi, M. Masuzawa, R. Sugahara, H. YamaokaKEK
IWAA’06, SLAC, Sep. 28, 2006
ILC (International Linear Collider)ILC (International Linear Collider)
Next generation large linear Next generation large linear acceleratoraccelerator
The beam size at the interaction The beam size at the interaction region is region is
several nmseveral nm
Motivation for the moverMotivation for the mover
The beam size is several nmThe beam size is several nm
require 1nm precision alignment1nm precision alignmentof componentsof components
Purpose of the moverPurpose of the mover
Fine tuning for the position of ILC Fine tuning for the position of ILC componentscomponents
(1nm precision)(1nm precision)
Wide range adjustment (4.5mm)Wide range adjustment (4.5mm)
SpecificationSpecification
Mass: about 350kgMaterial: SUS303The load limit: about 700kg
Piezoelectric moverCam mover
This mover is for fine tuning6 piezoelectric transducersX, Y, V and x, y, v directionsMoving range: 0.4mMoving precision: 1nm
This mover is for wide range adjustment3 motorsX, V and y directionsMoving range: 4.5mmMoving precision: 0.1m
Cam moverCam mover
3 motors Shafts with offsets
motor
X
V
Top table moves in X, V and y directions
Rotation axis
Center of the thick shaft
Connecting arm
1.6mm offset
Piezoelectric moverPiezoelectric mover3 piezoelectric transducers for vertical motion3 piezoelectric transducers for horizontal motion
The table moves X, Y, V and x, y, v directions
The cross section along the line Wsprings
Calculation of the cam Calculation of the cam mover motionmover motion
4.5mm
1=0, 2=32 and 3 are rotated.
1=3=02 is rotated.
2mm
2mm2mm
2mm
x1r·cos1+D2y1r·sin1h2l2
(x2r·cos2D2y2r·sin2h2l2
x2r·cos3Dd2y2r·sin3h2l2
x2x12y2y124·D2
Comparison between Comparison between calculation and calculation and measurementmeasurement
Solid line: calculation result“+”marks: measurement
Pulses to the motors
Slop
e (ra
d)
Pulses to the motors
Slop
e (ra
d)
Slope of the table is compared
1=0, 2=32 and 3 are rotated.
1=3=02 is rotated.
Noise of the capacitive Noise of the capacitive sensorsensor
Sampling rate is 2.54kHzSampling rate is 2.54kHz For 10 secondsFor 10 seconds Standard deviation is Standard deviation is
2.4nm2.4nm
A capacitive sensor is used A capacitive sensor is used to examine the property of to examine the property of
the piezoelectric transducersthe piezoelectric transducers
Capacitive sensor
Piezo motionPiezo motion
Piezoelectrictransducer
Capacitance typedisplacement sensor
Voltage on piezo (V)Move
men
t of
tab
le (m
)
A piezoelectric transducer has a hysteresis
Moving range is about 0.4m
Piezo resolution and response speePiezo resolution and response speedd
12nm
12nm
Resolution 1 or 2nm can be expected
Time (sec) Time (sec)
Move
men
t of
tab
le (m
)
Move
men
t of
tab
le (m
)
Response speed of the piezoelectrictransducer is 56m/sec
Vibration cancellation andVibration cancellation andnatural vibration of the natural vibration of the
movermover
stoppers
Up to 30Hz vibration cancellation system will be developed
Natural vibration of the mover is 45Hz
near
Stoppers are installed to shift the natural vibration frequency
Vibration of the table Vibration of the table (PSD)(PSD)
Vertical directionX direction
X direction Vertical direction
Red: on the tableBlue: on the floor
With stoppers
Without stoppers
30, 50, 60Hz
65Hz
50, 60Hz
over 100Hz
SummarySummary
Moving range 4.5mm + 0.4Moving range 4.5mm + 0.4mm 12nm step was clearly observed12nm step was clearly observed 1 or 2nm resolution can be expected1 or 2nm resolution can be expected Response speed of the piezo is 56Response speed of the piezo is 56m/secm/sec Natural frequency of the mover is 65Hz or hiNatural frequency of the mover is 65Hz or hi
gher with stoppersgher with stoppers
Future prospectFuture prospect
The response speed of the piezoelectric transducer is high (56m/sec)
2. Develop the vibration cancellation system up to about 30Hz (In the region>30Hz, amplitude<1nm) feedback or feedforward Michelson-Morley or Fabry-Perot laser interferometer
1. Measure again with more sensitive and stable sensors
Specification
Range Resolution SpeedRough movers ±1.5 mm 0.1 m > 0.1 mm/secPrecision movers ±0.2 m 1 nm > 0.5 m/sec
Need 5 directions (X, Y, X, Y, Z)
Max. weight of load is 2 tons
Size of table (to install QD0) 600 H
- Two stage mover Rough mover stage --> Cam movers Precision mover stage --> Piezo movers
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