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Phng php Tng hp mng mng
- Phn x magnetron
Cc Phng Php Tng hp v Phn tch Vt liu
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Cc Phng Php Tng hp v Phn tch Vt liu
L k thut ch to mng mng da trn nguyn l truyn ng
nng bng cch dng cc ion kh him c tng tc di in
trng bn ph b mt vt liu t bia vt liu, truyn ng nng
cho cc nguyn t ny bay v pha v lng ng trn .
Phn x (Sputtering):
One Chun b vt liu phn x ( Bia Target )
Two Chun b vt liu ph mng ( - Substrate ).
Three To mi trng chn khng.
Four Phn x.
Cc giai on c bn
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Cc Phng Php Tng hp v Phn tch Vt liu
Gm (dn in/ in mi)
Chun b Vt liu phn x
Kim loi/ Hp kim
Bia
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Cc Phng Php Tng hp v Phn tch Vt liu
Chun b Vt liu ph mng
Mt s loi vt liu dng lm
ph mng
Lam thy tinh (glass)
Wafer Silic (Si)
Inox
S, gch men
Polymer
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Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
Chun b Vt liu ph mng
Quy trnh x l trc khi ph mng
X l th
-Dng kim: NaOH, nc ra sunplay, -Dng axit: HF, HCL, -Dng sng siu m (my siu m) ra. - Ra li bng nc sch (nc ct) - Sy kh Lm sch cht hu c b mt .
X l tinh
Lm sch b mt bng phng in trong chn khng trc khi cho ph mng.
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Cc Phng Php Tng hp v Phn tch Vt liu
To mi trng chn khng
H thng bm dng to mi trng chn khng
Bm s cp
- Ht kh hay hi t th tch cn ht,
bt u t p sut kh quyn.
- Cc loi bm s cp: Bm quay du,
Bm Booster (Roots),
To chn khng ban u cho bm th
cp hot ng.
Bm th cp
-Lm vic ch vi iu kin khi trong
th tch t c chn khng ban u
(p sut khi ng ~ 10-2 torr).
- Cc loi bm th cp: Bm phn t
(Turbo), Bm khuch tn,
To chn khng cho qu trnh phn x
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Cc Phng Php Tng hp v Phn tch Vt liu
n v p sut (n v o chn khng)
pascal
(Pa)
bar
(bar)
atmtphe
k thut
(at)
atmtphe
(atm)
torr
(Torr)
pao (p sut) trn mt ins
vung
(psi)
1 Pa 1
N/m2 105 1.0197105 9.8692106 7.5006103 145,04106
1 bar 100000 106 dyn/cm2 1,0197 0,98692 750,06 14,504
1 at 98.066,5 0,980665 1 kgf/cm2 0,96784 735,56 14,223
1 atm 101.325 1,01325 1,0332 1 atm 760 14,696
1 torr 133,322 1,3332103 1,3595103 1,3158103 1 Torr;
1 mmHg 19,337103
1 psi 6.894.76 68,948103 70,307103 68,046103 51,715 1 lbf/in2
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Cc Phng Php Tng hp v Phn tch Vt liu
Bm chan khong
Vung lam viec cua cac bm chan khong
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Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
p sut bung < 510-6 torr
p sut nn 510-5 torr p sut phn x 310-3 torr Kh phn x N2/Ar ; N2O/Ar ph Thy tinh; Corning 7059 Khong cch bia- 5 cm Cng sut phn x RF 100W
Nhit Thi gian phn x
250oC 15 pht
Bng 1. Cc thng s to mng ZnO:N
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Cc Phng Php Tng hp v Phn tch Vt liu
Pha rn
(Bia-Target)
Pha hi Pha hi
Pha rn (Mng - Film)
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Cc Phng Php Tng hp v Phn tch Vt liu
Qu trnh phn x
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Cc Phng Php Tng hp v Phn tch Vt liu
Nguyn l: l qu trnh truyn ng nng.
Vt liu ngun c to thnh dng cc tm bia v c t
ti in cc (thng l catot), trong bung c ht chn
khng cao v np kh him vi p sut thp (c 102 MBar).
Di tc dng ca in trng, cc nguyn t kh him b ion
ha, tng tc v chuyn ng v pha bia vi tc ln v bn
ph b mt bia, truyn ng nng cho cc nguyn t vt liu ti
b mt bia.
Cc nguyn t c truyn ng nng s bay v pha v
lng ng trn . Cc nguyn t ny c gi l cc nguyn t
b phn x.
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S phn x phn ng ca TiN
S phn x Magnetron
Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
Nht plasma trn b mt cathode hay bia
phn x
Da vo s kt hp ca in trng v t trng
Cng t trng c iu chnh (500 2000G) sao cho cc in t b tc ng mnh cn cc ion th khng.
Cc in t thc hin cc chuyn ng cycloid trong in trng v t trng vung gc h s ion ha rt cao.
Phng in magnetron c th duy tr p sut rt thp (< 10-2 Pa) v mt dng in cao hn rt nhiu so vi phng in khng c t trng.
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Cc Phng Php Tng hp v Phn tch Vt liu
H magnetron cn bng H magnetron khng cn bng
B (hng v)
T trng khp kn
Cc e chu tc dng ca t trng ngang
e ch yu chuyn ng gn bia
t b e va p
t b t nng
Thch hp to mng cho cc loi khng chu c T0 cao: nha, giy,
T trng khng khp kn
Cc e t chu tc dng ca t trng ngang
e theo in trng n vi v ln
b nhiu e va p mnh
b t nng
Thch hp to cc mng yu cu T0 cao
in trng
S
N N
S
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Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
Hnh 1. M t h phn x magnetron phng
DC
P = 1- 10 mtorr
N = 1012 1015 cm-3
ne = 10
10 1012 cm-3
Te = 2 5 eV
T trng gi cc in t trong vng
plasma c dng ng hm hnh tr
trn b mt bia to ra s n mn
khng u ca bia phn x.
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Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
Phng in DC da trn s sinh ra in t th cp cathode, do in th ln ca bia l cn thit duy tr plasma v pht x in t tng gn tuyn tnh vi vn tc ion bn ph
(a)
(b)
Hnh 2. S phn b th trong phn x
magnetron cn bng ch DC v RF
Bia
Bia
Plasma RF c duy tr bi s ion ha ca in t dao ng trong th tch plasma. Cc in t c th theo kp tn s RF 13.56 MHz trong khi ion th khng do qun tnh ln.
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Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
Hnh 3. Th phn x cathode trong
magnetron DC v RF theo cng sut phng
in i vi bia ZnO p sut 0.8 Pa
-Trong phng in RF th bia phn x
thp hn.
- Tuy nhin, s by cc in t trn b mt bia li khng tt nh
trong ch DC.
- Mt plasma trn cao hn so vi trng hp DC.
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Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
- Phn x DC
cho vn tc ph cao
hn t 1.5 n 2 ln so
vi RF cng cng sut.
- i vi DC vn tc ph
bt u tng t cng sut
bng khng.
- Trong khi RF ta c
th quan st thy cng
sut ngng khong trn
10W, do th phng in
thp khng
phn x. Hnh 4. Vn tc lng ng trong
magnetron DC v RF theo cng sut
phng in
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Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
Vn tc ph
c xc nh bi
nng lng ion
bia v nng lng
ca nguyn t Ar
phn x trong ch
DC cao hn
so vi RF.
Hnh 5. S ph thuc ca vn tc ph
theo nng lng ion bn ph
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Cc Phng Php Tng hp v Phn tch Vt liu
Phng php Phn x magnetron
Hnh 2.8 S ph thuc ca cng sut nhit
trn trong phn x DC v RF bia ZnO
vo: a). p sut lm vic
b). Cng sut phng in
Cng sut nhit trn tng t l theo cng sut phng in.
Trong trng hp RF gn nh c lp vi p sut, th trong trng hp DC cng sut nhit gim mnh khi tng p sut.
Nhit sinh ra trn trong qu trnh phn x ch RF s cao hn so vi DC.
Ngun nhit cung cp cho trong phn x RF ch yu t cc ht trong plasma, ch khng phi duy nht t cc ht phn x t bia.
(RF) ng gp nhit ln gy bi cc ht t plasma sau khi vt qua rng rt nh ca v m khng va chm nn c lp vi p sut.
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Cc Phng Php Tng hp v Phn tch Vt liu
(DC) ng gp nhit ln ch yu gy bi cc ion Ar c gia tc trong vng st th cathode, b phn x v trung ha, sau i v pha .
Cc ht trung ha chu cc va chm vi phn t kh v b nhit ha trong qung ng t bia n nn cng sut nhit trn ph thuc vo p sut.
u im ca phng php phn x magnetron
Nhit thp, c th xung n nhit phng
bm dnh tt ca mng trn
Vn tc ph cao, c th t 12 m/pht
ng nht cao v dy, mt khi lng mng cao, gn vi mt
khi
D dng iu khin v tnh lp li cao trong qu trnh ch to mng
Cc hp kim v hp cht ca cc vt liu vi p sut hi rt khc
nhau c th d dng phn x
Bng phn x phn ng trong hn hp kh, nhiu hp cht c th
c ph t vt liu n cht
Phng php c chi ph khng cao
C kh nng ph mng trn din tch rng, c th t 3m x 6m
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Cc Phng Php Tng hp v Phn tch Vt liu
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