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The 21st Century COE Program
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1
2004.4.1
1994
2
The 21st Century COE Program
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Needs Oriented
COE
RA
(2005.5.1)
32004.4.1
4
The 21st Century COE Program
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5
IEEE
REMPIN2
Molecular Beam
Boltzmann
REMPI
Boltzmann
6
The 21st Century COE Program
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MEMS
40%KOH
SPM
Driving signal
Output signal
Sample
Au electrode
Al wire
Tip
Fixed bas
Direction ofcantilever vibration
Tip
Q
72003.6 IEEE
W nm
W 40 nm Rz8
The 21st Century COE Program
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9
Ra=0.12 nm Rrms=0.34 nm
m
200 m
Substrate
Lens
Piezo X
Ball-ended optical fiber
Laser diode
Piezo ZLubricant
PSD: Position sensitive detector
Hx
DLC
Hx
C
2003.6
/
Synchronized Laser Micromanipulation
Yeast cell
Hydrogel
Yeast cell
Hydrogel
10 m
Yeast cell
Hydrogel
Yeast cell
Hydrogel
10 m
Laser Focal Point (1 m )
)(1 tx
)(2 tx
d
10
x
y
2005.4IEEE,
The 21st Century COE Program
― �� ―
AFM
11
N N S S N N S S N NNN NN SS SS NN NN SS SS NN NN
MolecularBeam
12
The 21st Century COE Program
― �� ―
CT MRI
13
H17.5.1
2
Ikuta Lab. Nagoya Univ.
4 m3mm
10 m
14
The 21st Century COE Program
― �� ―
Ikuta Lab. Nagoya Univ. 15
PZT(support)
PZT(X)Table
10-9 Torr
XY 3
Walking Drive
3
3 Walking
33MEMSMEMS
Walking Drive:
16
The 21st Century COE Program
― �� ―
17
18