Middendorf Brasilien 2011

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© Fraunhofer IZM

Dr.-Ing. Andreas Middendorf

Environmental and Resource Aspects ofMicrosystems



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[email protected]

Fraunhofer Research60 years Fraunhofer Gesellschaft 1949-

200961 research institutes with over 40 locations

15.000 employees

1.4 billion Euro turnover annually

Applied research in 7 strategic technology areas:

Life sciences, new materials, production technologies,surface technologies, photonics, ICT, microelectronics

Funding by:

Industry contracts (50%)

Public projects (30%) Basic funding (20%)

World-wide operations



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Fraunhofer IZMInstitute for Reliability and

MicrointegrationFounded in 1993 (in collaboration with the Research

Center for Microperipheric Technologies of TUB)

320 employees (186 full time, 134 PhD, trainees)

23 Million Euro turnover (2010)

Applied research in the field of:

Microelectronics packaging technology

Hetero systems integration

Reliability testing and simulation

800 m² clean room, specialized labs

Industry grade equipment, 200/300mm wafer processes



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[email protected]

Main Requirements for Electronic Systems

Form FactorReliability

Functionality

Cost

ApplicationTrends

Material, Energy,Processing, Auxiliaries



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Design

Reliabilityand Test

Wiring

Smart Sensor Development and Integration Technologies

FunctionalStructures

MiniaturizedComponents

Thinned ICs Sensors Embedded A&P

Wave guides

Advanced

SystemAssembly

System on BoardSystem in Package

Package on PackageSystem on Chip

Technology

Interconnects



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Thinchip Integration on MEMS

Example Wafer Level : AMR Sensor-ASIC-Stack

ESTLES

Baumgartner, Klein, Lutz, Röder, von Suchodoletz, Töpper



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BCB / PBO + Cu Pillar on top

Baumgartner / Lopper / Töpper

Waferlevel System Device



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All Test passed (except one)Example: Reliability: 3000 cycles passed (-40°C/+150°C)

First Failures after 300 cycles: +150°C Iced Water

System Test with Automotive Standards



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3D Roadmap

Source: Yole

Automotive

Logistic,Communication

µP Modules

Security



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• toxicity -> legislation, governments, industrial associations, company

• rebound effect -> consumer behavior

• criticality -> governments, industrial associations

• material lost, ubiquitary allocation-> ? , recycling companies, governments

• leverage effect -> governmental and industrial incentives

• energy consumption, water consumption

Environmental and Resource Aspects

energy and toxicity materials and energy



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“New kid on the block": Product Carbon Footprint

ESPRIMO E9900

Intel® CoreTMi5-670 Processor

2 x 2 GB DDR3 Memory

250 GB Hard Disc

Optical Drive Supermulti

Nvidia® Geforce® 9500 GS Graphics Card

Operating System

Keyboard

Mouse



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Product Carbon Footprint

Analysis for Desktop PC ESPRIMO E9900 / 5 years (Germany)

k g

C O 2

e q u i v a l e n t s

Use Phase 373 kg CO2e

Transport/Distribution 34 kg CO2e

Assembly 3 kg CO2

e

Raw Materials 302 kg CO2e

Mainboard 90 kg CO2e

2 Memory 72 kg CO2e

Graphic card 36 kg CO2e

Power Supply Unit 32 kg CO2e

Credit Recycling -7 kg CO2e

NET RESULT 705 kg CO2e



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Results

LCI Data Set - Summary

Data referring to a waferprocessed by an average number of mask layers

3.9 m³

waste water

1.2 kgorganic chemicals

1.8 kgother technical gases

59 kgnitrogen

1.06 kginorganic chemicals

1.67 kginorganic acids

3.9 m³water

215 kWhenergy

2.8 kgwaste

14 gVOC emissions

0.8 g

acidic emissions

0.44 kgcarbon dioxide

Process Assessments – Motorola Fab case study



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Wafer

Energy

Water

Chemicals(fluid / solid)

Gases

Processed Wafer

centralplant

processcooling water

compresseddry air

recirculatingair

exhaust

Air

Waste water

Exhaust air

Waste

make up air

thermal

thin films

dry etch

ion implant

watertreatment

MaterialRevalorisation

Reuse

Recycling

EnergyRevalorisation

Incineration

CMP / backend

Wet benches /

cleaning

patterning

Results

Mass Flows - Example: Chemicals and Waste

ultrapurewater

Process Assessments – Motorola Fab case study



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Fresh water usage of developing and

developed industrialized countries

0

20

40

60

80

100

Developing Countries Developed Countries s h a r e o n f r e s h w a t e r u s a g e i n %

Agriculture

Industry

Households

• about 335 Million people 1991 live in countries with a lag of fresh

water

• up to 3,3 Bill. people 2005 live in countries with a lag of fresh water

• up to 50 of the water used by industry is not able to be used again.

Challenge Fresh Water



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Input Output

Product

Waste

PreliminaryProduct(s)

Auxiliaries Emissions (Water)

Process(es)

Product part (%)

Sy s te m ounda r ie s

Emissions (Exhaust)

Calculation of process-related TPI value (either focusing on inputs, outputs, orboth)

Assess Process Toxicity – ProTox (Process ToxicityIndicator)



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New Base MaterialsIn reaction to diminishing fossil fuel supplies and oil price fluctuations newmaterial sources become viable.

Efficient renewable materials have a better CO2 balance.

Not all renewable materials will be “greener”.

Developments center on best technical properties with the lowestenvironmental overhead.

From “low end materials” to “customized materials” in electronic applications

Pure material recycling or bio-recycling secondary to compatibility with EEE-waste streams (i.e. shredder mix or directly to metal recovery)

Low cost potential (for unmodified polymers)

Electronics from Renewable Materials





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TVs to be labelled from Nov 2011 onwards

Televisions: Energy Efficiency Labelling



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N u m b e r o f u n i t s

s o l d

Environmental performance, e.g. energy efficiency

EuP minimumperformance

standard

Before

EuP

with EuPminimum

performancestandard

with EuP minimumperformance standard

and labelling

class G class F class E class D class C class B class A

Effect ofMinimum Requirements + Energy Efficiency Labelling

Nissen, Schischke, Stobbe



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Prepared by The Basel Action Network (BAN)

Silicon Valley Toxics Coalition (SVTC)

(Original Report 2001/2002)

With Contributions by Toxics Link India SCOPE (Pakistan)

Greenpeace China

Looking back 10 years:More awareness; some progress (legislation and enforcement)But essentially electronic waste sites are still growing in Africa and Asia

The High-Tech Trashing of Asia



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Bloom laptop, Prototype for„recyclable“ laptops; Stanford /Aalto

Ecodesign trends

Solar-LaptopDesign study Nikoladesign

LG Electronics,Concept study, 2006,fuel cell and OLED

display

Bamboo laptop parts,source: Asus

13-inch MacBook Air

weight: 1,3 kg

• Mercury-free display• Arsenic-free display glass• BFR-free• Polyvinyl chloride (PVC)–free internal

cables and power adapter DC cable

source: Apple

One Laptop Per Child,MIT

Schischke



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Eco-Design Directive

EuP (alt):Directive 2005/32/EC of 6 July 2005 establishing a framework for thesetting of ecodesign requirements for energy-using products

ErP (recast):Directive 2009/125/EC of 21 October 2009 establishing a framework for the

setting of ecodesign requirements for energy-related products

http://ec.europa.eu/energy/efficiency/ecodesign/eco_design_en.htm

Legislation trends – a little bit eco for the Design



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Trade-offs

D4R =

Design for minimised production waste

Design for production waste recycling /downcycling

Design for lifetime extension

Design for reuse

Design for repair

Design for disassembly

Design for depollution

Design for material recycling Design in recycled materials

Middendorf, Schischke, Marwede, Schlösser

Always „Re-Invent“ Design for Recycling



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S t a n d a r d i s a t i o n

M a n d a t e

( C E N E L E C )

EuP Preparatory Studies

Least LifeCycle Costs

ImprovementPotential

Significant

EnvironmentalImpacts

Measurement /

StandardisationRequirements

EuPImplementing Measures

rP

GenericRequirements

SpecificRequirements

EUEco-Label

EU EnergyEfficiency Label

voluntary mandatorymandatory

VoluntaryAgreements

Whenambitiouscomparedwith businessasusual andsignificantshare of themarket

or

Revision 5-10 years depending on product group and progress of technology but staged requirements possible Dynamic but predictable to encourage improvement products while providing clarity on investments for Industry Consistent - Thresholds to be maintained (A becomes D etc.)

- Reward Development of ‘good’ products, compatibility of incentives

Nissen, Schischke, Stobbe

Synergies of EU Policies



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Energy Harvesting for Condition Monitoring Systems

Workflow – From ambient energy profiles to sustainable energy harvesting solution

Feasibility study:Concept forenergy supply

1st prototype:Field test andevaluation

Final

demonstrator:Integration andoptimization



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Analysis of housing concepts

M1

M2

M3M4

0

500

1000

1500

2000

2500

0 0,2 0,5 1

A v e r a

g e p o w e r g e n e r a t e d [ µ W ]

Velocity of air [m/s]

Module Design

M1

M2

M3

M4

CFD simulation oftemperature distribution for

various housing concepts Varying size of

thermoelectric device andcooler

Comparison of housingmaterials

Varying ambient conditions(flow of surrounding air)

Simulation of net poweravailable after voltageconversion and buffering

Optimum design dependingon ambient conditions

Benecke, S.1, Rueckschloss, J. 1, Middendorf, A.1, Nissen, N. F.2, Lang, K.-D.1,2: Energy Harvesting for Distributed Microsystems – The Link betweenEnvironmental Performance and Availability of Power Supply, in Proceedings of ECODESIGN 2011, Kyoto, Japan, Springer Publishing 2011



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Availability of Power vs. Resource Criticality

RARI 2011:

Requirement for innovation,evaluating the statisticalrange of coverage

Origin, evaluatingconcentration (andtherefore possible

monopolies) on countries Origin, evaluating the

political stability ofproducing countries

0% 100% 200%

M1

M2M3

M4

0% 100% 200%

M1

M2

M3

M4

0% 100% 200%

M1

M2

M3

M4

0% 100% 200%

M1

M2

M3

M4

Increase of environmental indicator (RARI2011)

Average power generated

Natural convection

v=0,2m/s

v=0,5m/s

v=1,0m/s

RARI evaluation:

Hotspot active materials(esp. bismuth) and solder(tin) due to limitation tofew local concentrations

Reduction of dissipativeactive materials through

large scale usage of passivematerials for cooling - ifmetal recycling is an option

Trade-off solution for‘mount-and-forget’ systems

Application-oriented designfor minimization of

environmental impacts

Benecke, S.1, Rueckschloss, J. 1, Middendorf, A.1, Nissen, N. F.2, Lang, K.-D.1,2: Energy Harvesting for Distributed Microsystems – The Link betweenEnvironmental Performance and Availability of Power Supply, in Proceedings of ECODESIGN 2011, Kyoto, Japan, Springer Publishing 2011





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Joint International Congress and Exhibition

A Co-Operation of theWorld‘s Leading Conferences

Program Overview

Sun Sept. 9th Tutorials, Get Together

Sept. 10th -12th Conference and Exhibition

Thu Sept. 13th Technical Tours

Location the Dahlem Cube / Seminaris CampusHotel, Berlin

Chairman Prof. Dr. Klaus-Dieter Lang

organized by

Taking Green to the Next Level

September 9 – 13, 2012 · Berlin, Germany

Thank You for Your Attention!

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Middendorf Brasilien 2011