Embed Size (px)
Citation preview
1Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Plasma Enhanced materials processing and
rarefied GAS dynamics Unified Simulation tools
PEGASUS
2Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Simulation of
DC hollow cathode discharge
Module ： TTBEQ (for fluid model) PHM (hybrid model, fluid model)
3Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Computational model and conditions
H
W
D Unit ： mmGas : Ar
30, 10, 2 4.5,1.6,0.5
133 1) 1330
2) 6650
1) -230 -3002) -2800.05 0.04
Hybrid model
Cathode
Case-1 Case-2
・ H, D, W : ・ Pressure [Pa]・ Cathode voltage [V]・ γ+
・ PHM Fluid model
4Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Anode （ GND ）
5
32
2
Cathode-230 [V]-280 [V]γ+= 0.05
Ar : 133 [Pa]Anode （ GND ）
0.8
5
0.5
Cathode
-300 [V]γ+= 0.04
Ar : 1330 [Pa] 6650 [Pa]
Hybrid model Fluid model
Unit:[mm]
5Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]
Electrondensity [/m3]
Electrondensity [/m3]
6Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]
Ar+
density [/m3]Ar+
density [/m3]
7Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]
Electric potential [V]
Electric potential [V]
8Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]
Electron Temp. [eV]
Electron Temp. [eV]
9Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]
Ar+
source rate [/m3 /s]
Ar+
source rate [/m3 /s]
10Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]
Reduced electric field
[Td]
換算電界 [Td] Reduced electric field
[Td]
11Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]Vc= - 230[V] Vc= - 280[V]
Ar+
Temp. [eV]
Ar+
Temp. [eV]
12Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]
2.8 [mA]
9.5 [mA]
0
0.03
13Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 133 [Pa]
-230[V] Mid.-230[V] Bottom
-280[V] Bottom-280[V] Mid.
×
×
Mid.
Bottom
yield=0.406
yield=0.086
yield=0.011
14Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 1330 [Pa] Ar : 6650 [Pa]
Electrondensity [/m3]
Electrondensity [/m3]
15Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
density [/m3]Ar+
density [/m3]
16Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 1330 [Pa] Ar : 6650 [Pa]
Electron Temp. [eV]
Electron Temp. [eV]
17Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 1330 [Pa] Ar : 6650 [Pa]
Electric potential [V]
Electric potential [V]
18Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
source rate [/m3 /s]
Ar+
source rate [/m3 /s]
19Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 1330 [Pa] Ar : 6650 [Pa]
換算電界 [Td] 換算電界 [Td] Reduced electric field
[Td]
Reduced electric field
[Td]
20Copyright 2002-2015 PEGASUS Software Inc., All rights reserved.
Ar : 1330 [Pa] Ar : 6650 [Pa]
Ar+
Temp. [eV]
Ar+
Temp. [eV]
