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Confidential and Proprietary
JUSUNG Technology is Innovation, Culture is JUSUNG Product. 1 www.jusung.com
“O”LED Manufacturing
Technology
Kae Huang
SEMI LED Manufacturing Technology
Conference
October 19th,2012
Confidential and Proprietary
JUSUNG Technology is Innovation, Culture is JUSUNG Product. 2
Solar Why OLED For Display
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JUSUNG Technology is Innovation, Culture is JUSUNG Product. 3
Performance Comparison of OLED and LCD Displays
OLED Also Allows For Thinner Displays
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Cost Estimates for 4” LTPS display
OLED Displays Already Account for 20% in the Smartphone Market
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AMOLED Demand vs Supply Forecast
2014 suggest very tight suply driven by an assumed increase of
AMOLED TV shipments.
Source: DisplaySearch July 2012
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Typical Structure of an RGB OLED
Bottom Emission Is Most Common
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Key Competing Manufacturing Technologies - Display
TFT
LTPS vs. Oxide TFT
Oxide, Lower Organic Deposition Costs and Thin Film Are the Key
Manufacturing Technologies To Focus On
Encapsulation
Metal/Glass Lid, Frit Sealing, Face Seal, Thin Film,…
Organics
Evaporation, RGBW + CF, LITI and Hybrid
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Comparison of substrate types
Significant R&D Momentum on Oxide TFT (using IGZO)
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Solar Why OLED For General
Lighting
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Thin Area Light Source
Glare-free, Directly Viewable
Harmless to Human Eye
Flexible/Bendable Lighting
Environment Friendly
Color Tunable
Transparent Lighting
Energy Efficient
• Highly Efficient Light Source
Environment
• No Mercury, Recyclable
• CO2 Emission Reduction
Sensibility
• Natural Illumination by 3 Primary
Color Mixing [Red, Green and Blue]
• Harmless to Human Eye
Advantages of OLED Lighting
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Comparing the Differing Light Sources
OLED Lighting Is Still At Its Infancy of The Evolution
Courtesy: Konica Minolta
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OLEDs Forecast Used in General Lighting
November 2011
OLED may account for 3% of total General Lighting by 2020
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China Government Support
Specific Target of 80lm/W has already been set as part of its
12th 5-Yr Plan
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These targets scale to $30/klm in 2015, $17/klm
in 2017 and $10/klm in 2020.
US Government Support
From DOE SSL Roadmap August 2012
The critical factors include:
Cycle time – target 1 minute;
Area of substrate that is converted into
product – target 80%;
Yield of good product – target 80%; and
Downtime for repairs or maintenance –
target 20%.
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Projections For the Costs of OLED Luminaire
OLED Luminaire Will Continue To Lag Behind LEDs in 2020
Source: DOE SSL Aug 2012
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OLED Lighting Panel Structure
A Much Simpler Structure Relative to AMOLED
Conventional Encapsulation
Thin Film Encapsulation
Polymer Film
Thin Film
Cathode
Organic
Anode
Glass
Glass
Getter
Cathode
Organic
Sealant Anode
Glass
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Total OLED Market Forecast
Source: BCC Research
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R2R Technology
Figure 1: Schematic drawing of the
R2R vacuum coater which includes
the winding unit, plasma pre-
treatment with a linear ion source,
organic linear evaporators, a
magnetron and metal evaporators.
Source: IPMS – COMEDD; Courtesy:
EETimes Europe
An Opportunity for Cost Reduction Over Sheet-to-Sheet
Opportunity For:
Higher throughput
Cheaper metal foil
Plastic web as substrates
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Type Metal/Glass Lid Type Frit Seal Face Seal
Structure
Concept Organic Sealing Frit Sealing Film Face Sealing
Emission Bottom Emission Top/Bottom Emission Top/Bottom Emission
Size Small Size Panel (<15 inch)
Middle Size Panel (~20 inch)
Large Size Panel (>40 inch)
Advantages Simple Process Simple Process High Shock Resistance Stable Gap
Disadvantages Thicker Panel Low Shock Resistance
OLED Encapsulation
Glass substrate
OLED
Encap. Substrate
Frit
Glass substrate
Encap. Substrate
OLED Film
SiN
Glass substrate
OLED
Encap. Substrate
Getter
Sealant N2 Filling
N2 Filling
In addition, thin film technology is an emerging encapsulation
manufacturing technology
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OLED Luminaires – Key Manufacturing Issues
Sizing and brightness
Variability and binning
Light shaping
Standardization of luminaire components
Reliability issues
Search for new technolgies:
Material Improvements, Solutions-based Printing Technology, Spin-Coating
Technology
OLED luminaires are still high-end, high-cost, artistic luminaires,
manufacturers need to incorporate OLEDs cost-effectively into
general illumination applications
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Solar Jusung’s OLED Programs
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JUSUNG Engineering at a Glance
Korea’s Largest Manufacturer of Production
Technology Equipment for Semiconductors, Solar,
Lighting, and Flat Panel Displays
Founded in 1995
Headquarters: Gyeonggi-Do (Seoul Area), South
Korea
Listed on KOSDAQ in 1999, Ticker Symbol
036930
Global Sales and Service Offices in Algeria,
Middle East, North America, South America,
China, Taiwan, Japan, and Europe
Strong Track Record with Large Customers
– SK Hynix, LG Display, IBM, TSMC, and more
Profitable and Growing
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Standardization
LCD &
Solar Thin Film R&D
BIPV R&D
SEMI & LED R&D
Solar c-Si R&D
OLED R&D
Manufacturing
Manufacturing
6 out of 8 JUSUNG Buildings are R&D Centers
Fully Equipped Facilities and Pilot Lines for Device Integration
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JUSUNG Product Portfolio
Production Proven Innovative Complementary Markets
① Semiconductor
② Display ③ Solar
④ LED Lighting ⑤ OLED Lighting
Core Technologies Renewable and Energy
Conservation Technologies
Complementary Photo Electricity
Light Emitting Technology
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JUSUNG 730*920 OLED Lighting Panel Announcement
The korean semiconductor equipment maker Jusung Engineering released today a OLED lighting panel. The OLED Panel has a size of 730× 920 mm which is deposited on glass substrates. This is a result from the 4th generation of Jusungs OLED production equipment. Jusung want to ramp up a pilot production line in Kwangiu.
920 m
m
730 mm
JUSUNG RELEASED A 730x920MM LARGE OLED LIGHTING PANEL
Source:
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Decorative Lighting
General Lighting
Transparent/ Flexible Lighting
◊ OLED lighting Evolves from Decorative Lighting into Flexible lighting
OLED Lighting Product Trends
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Encapsulation PECVD System Overview
Low Temp. PECVD System (<100℃)
Item Description
Glass Size - 2G (370× 470mm2) ~ 8G (2200× 2500mm2)
System Configuration
- 3 Process Chamber - 1 Transfer Chamber - 1 Load lock & 1 Unload lock Chamber - 1 Mask Stocker
Alignment &
Vision system
- Align Stage: Mask & Glass Alignment (~20㎛)
- Vision System: Confirmation of Alignment
Low Temp
High Quality Film
Process
-Low Process Temp
-Low Wet Etch Rate
-Low Stress
-Low WVTR
Production Proven Low Temp. SiNx Deposition & Alignment Technology
PC
PC PC
Mask Stocker
L/L U/L T/C
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JUSUNG IGZO MOCVD Development History
Solar ZnO MOCVD
LED GaN MOCVD
Oxide TFT IGZO MOCVD
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Core Technology MOCVD PVD
1. Composition control Ga vs. In Composition : 50~200% Controllable
Not Possible
2. High Temp Deposition < 400 ℃ <100 ℃
3. In-Vacuum Continuous Deposition
G.I/IGZO/ESL In-Vacuum Deposition
Not Possible
Benefits of JUSUNG IGZO MOCVD
A Challenging Process But Has Promising Benefits
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■ G.I + IGZO + ESL In-Vacuum Process
Interface Impurities Control
Improved TFT Performance
Minimized Particles
In-Vacuum Continuous Process
In-Vacuum Continuous Process Provides Improved TFT Performance
G.I Active (IGZO) ESL Anneal
JUSUNG IGZO In-situ
Integration
Depo. (PECVD)
Depo. (PECVD)
Depo. (MOCVD)
Anneal
Without Vacuum Break
MOCVD PECVD Integration System
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Summary
OLED technology used in display has already taken off;
–Continuosly improving display performance on small devices
–Ramp up of large size TV coming soon
–Monitors and laptops years away
OLED technology used for lighting still evolving
– In the near term, OLED can’t compete with HB-LEDs and fluorescent lights
–OLED Lighting industry will need to meet the expectations of lighting designers,
contractors, regulators as well as end users.
Frost & Sullivan estimates market to reach $7.39 billion in 2016 at a CAGR of 34
percent. (For lighting, difficult to determine consumers willingness to pay)
Oxide, Organic Deposition Process and Materials, Encapsulation
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Solar THANK YOU!
Kae Huang
+86-21-6465-5851