Tk Robotik 2009 E Lowres

®

Handling and more

Automat i on Componen tsfor the Semiconductor Industry

2009/2010

About Us

Genera

l

2

The product offerings contained in this catalog area subset of robotic products offered by the isel group.

Our products are specifically designed and engineeredto address the unique needs and requirements of thesemiconductor, flat panel display, nano-technology,and related industries.

Should you have a special application or productrequirement not fully addressed by the offerings in thiscatalog, please contact us we will be delighted to workwith you to find a solution that meets your needs.

Our company's Mission:

isel Germany AG

isel Germany AG

isel Germany AG

isel Germany AG

was founded in 1972 and is the corecompany of the global isel Group.

The company develops, manufactures, markets, sells and ser-vices systems and components used for automation, automa-tion control systems, robots and related handling systems.

The company supports the global market needs of the Semi-conductor Equipment and related industries, its activities arecentered on the company's expertise in automation andinterrelated technologies and include a broad array ofcustomer applications using the isel product line as thefoundation to address those needs.

is located in Eichenzell (Hesse) andDermbach (Thuringia), Germany.

The mission of is to design, engineer andmanufacture, sell and service products that provide ourcustomers with reliable, high quality technical solutions,at a favorable price-performance ratio.

The foundation of all isel components and systems is focusedadherence to “design for modularity”, benefiting the customerin design flexibility, cost, and functional upgradability. Thismethodology assures seamless integration of mechanical,electronic and software functions from initial design, onthroughout all aspects of the total product life cycle.

isel's open interfaces for software and control systems providethe flexibility that is required to meet the integration needs anddemands of a customers existing applications and ensurescompatibility with implementations provided by othersuppliers.

maintains a permanent demonstration andapplication facility at its Eichenzell facility in central Germanyand at a facility in Fremont, California. Ask for an appointmentwith one of our applications engineers.

We look forward to your visit and an opportunity to serve yourautomation, robotic and handling needs.

Handling and more

Eichenzell facility

Dermbach facility

Genera

l

Best Service

3 Service

Handling and more

3

We're there for you...

...because you'll get it all from one sourceBecause we control all aspects of our products life cycle, from design, production, sales and service, we ensure you will receivecompetent contacts for all questions concerning our products.



...with more than 30 years of market presenceiselRobotikSupporting department is the renowned and internationally-active .

Benefit from our market presence of many years in a variety of industry lines.isel Germany AG

...in the heart of EuropeFrom our location in Eichenzell (Hessen), in central Germany there is a maximum distace of 400 km to Europe'ssemiconductor key locations.

Desig

nProduction

Sales

Handling and more

isel IWH F-1 Wafer Handling Robotswith two-link arm

Wafe

r H

andling

4

Characteristics

■

■

■

■

■

■

■

■

■

■

■

Excellent structural rigidity

Maximum reliability and precision

Top mounted (TA) or bottom mounted (BA) versionsavailable

Customized designs

Optional internal or external controller

Absolute (digital) or incremental encoder

Seamless integration with prealigner, linear track and otherperiphal components

Optional high-end controller for controlling complexsystems

Including Robot Control Center (RCC)

Class 1 clean-room environment compatible

Made in Germany

Handling and more

Specifications

Repeatability

Working range

Payload

T

R

Z

Z

radial

theta

Maximum speed

Main interface

Power supply

T

R

Z

360°/s

1,000 mm/s

450 mm/s

110 / 230 V AC

±0.02°

±0.03 mm

±0.03 mm

10”, 13”, 17”

10", 14"

450°

0.75 kg

RS-232 [DB9]Option:Ethernet [RJ-45]

Peripheral interface RS-485 [RJ-45],RJ-11

Figure:IWH TA10S10 F-1

isel IWH F-1 Wafer Handling Robotswith two-link arm

Wafe

r H

andling

5

Handling and more

Dimensions

IWH TA S F-1__ __

IWH TA S F-110 10IWH TA S F-113 10IWH TA S F-117 10


Possible Configurations

IWH BA S F-1__ __

IWH BA S F-110 10IWH BA S F-113 10IWH BA S F-117 10



92

57 65

77

57 65

513.

5(T

A)

10

588.

5(T

A)

13

690

(TA

)17

431.

8(T

A)

17

330.

2(T

A)

13

254

(TA

)10

365.8 (S )14

266.7 (S )10

365.8 (S )14

266.7 (S )10

620.

8(T

A)

10

695.

8(T

A)

13

797.

3(T

A)

17

254

(TA

)10

330.

2(T

A)

13 431.

8(T

A)

17

isel IWH F-1 Wafer Handling Robotswith two-link heavy duty arm

Wafe

r H

andling

6

Characteristics

■

■

■

■

■

■

■

■

■

■

■




Customized designs







Made in Germany

Handling and more

Specifications

Repeatability

Working range

Payload

T

R

Z

Z

radial

theta

Maximum speed

Main interface

Power supply

T

R

Z

360°/s

1,000 mm/s

450 mm/s

110 / 230 V AC

±0.02°

±0.03 mm

±0.03 mm

10”, 13”, 17”

10", 12", 14", 16", 20"

450°

2.75 kg



Figure:IWH TA10S10HD F-1

isel IWH F-1 Wafer Handling Robotswith two-link heavy duty arm

Wafe

r H

andling

7

Handling and more

Dimensions

IWH TA S F-1__ __ HD

IWH TA S HD F-110 10IWH TA S HD F-110 12IWH TA S HD F-110 14IWH TA S HD F-110 16IWH TA S HD F-110 20IWH TA S HD F-113 10IWH TA S HD F-113 12IWH TA S HD F-113 14

IWH TA S HD F-113 16IWH TA S HD F-113 20IWH TA S HD F-117 10IWH TA S HD F-117 12IWH TA S HD F-117 14IWH TA S HD F-117 16IWH TA S HD F-117 20


IWH BA S F-1__ __ HD

IWH BA S HD F-110 10IWH BA S HD F-110 12IWH BA S HD F-110 14IWH BA S HD F-110 16IWH BA S HD F-110 20IWH BA S HD F-113 10IWH BA S HD F-113 12IWH BA S HD F-113 14

IWH BA S HD F-113 16IWH BA S HD F-113 20IWH BA S HD F-117 10IWH BA S HD F-117 12IWH BA S HD F-117 14IWH BA S HD F-117 16IWH BA S HD F-117 20


513.

5(T

A)

10

588.

5(T

A)

13

690

(TA

)17

431.

8(T

A)

17

329.

9(T

A)

13

254

(TA

)10

266.7 (S )10

304.8 (S )12

365.8 (S )14

426.7 (S )16

508 (S )20

266.7 (S )10

304.8 (S )12

365.8 (S )14

426.7 (S )16

508 (S )20

633.

5(T

A)

10

708.

5(T

A)

13

810

(TA

)17

254

(TA

)10

330.

2(T

A)

13 431.

5(T

A)

17

105

Ø 235

Ø 277

Ø 330

75

90

Ø 235

185

225

175195

75

isel IWH F-1 Wafer Handling Robotswith three-link heavy duty arm

Wafe

r H

andling

8

Characteristics

■

■

■

■

■

■

■

■

■

■

■




Customized designs







Made in Germany

Handling and more

Specifications

Repeatability

Working range

Payload

T

R

Z

Z

radial

theta

Maximum speed

Main interface

Power supply

T

R

Z

360°/s

1,000 mm/s

450 mm/s

110 / 230 V AC

±0.02°

±0.03 mm

±0.03 mm

10”, 13”, 17”

16", 21", 24"

450°

2.75 kg




isel IWH F-1 Wafer Handling Robotswith three-link heavy duty arm

Wafe

r H

andling

9

Handling and more

Dimensions

IWH TA S F-1__ __

IWH TA S F-110 16IWH TA S F-110 21IWH TA S F-110 24IWH TA S F-113 16IWH TA S F-113 21

IWH TA S F-113 24IWH TA S F-117 16IWH TA S F-117 21IWH TA S F-117 24


IWH BA S F-2__ __

IWH BA S F-110 16IWH BA S F-110 21IWH BA S F-110 24IWH BA S F-113 16IWH BA S F-113 21

IWH BA S F-113 24IWH BA S F-117 16IWH BA S F-117 21IWH BA S F-117 24


75

185

225

175195

406.4 (S )16

533.4 (S )21

609.6 (S )24

406.4 (S )16

533.4 (S )21

609.6 (S )24

Ø 235

Ø 277

142

Ø 330

690

(TA

)17 58

8.5

(TA

)13

513.

5(T

A)

10

431.

8(T

A)

17

329.

9(T

A)

13

254

(TA

)10

127

670.

5(T

A)

10

745.

5(T

A)

13

847

(TA

)17

254

(TA

)10

330.

2(T

A)

13

431.

8(T

A)

17

isel IWH F-2 Wafer Handling Robotswith two-link arm and heavy duty body

Wafe

r H

andling

10

Characteristics

■

■

■

■

■

■

■

■

■

■

■




Customized designs







Made in Germany

Handling and more

Specifications

Repeatability

Working range

Payload

T

R

Z

Z

radial

theta

Maximum speed

Main interface

Power supply

T

R

Z

360°/s

1,000 mm/s

450 mm/s

110 / 230 V AC

±0.02°

±0.03 mm

±0.03 mm

13”, 17”, 21”

10", 14"

450°

0.75 kg




isel IWH F-2 Wafer Handling Robotswith two-link arm and heavy duty body

Wafe

r H

andling

11

Handling and more

Dimensions

IWH TA S F-2__ __




IWH BA S F-2__ __




87

Ø 330.2

57 65

72

273255

57225

265

215235

65

557

(TA

)13

659

(TA

)17

760

(TA

)21

330.

2(T

A)

13431.

8(T

A)

17

523.

4(T

A)

21

365.8 (S )14

266.7 (S )10365.8 (S )14

266.7 (S )10

659.

3(T

A)

13

761.

3(T

A)

17

862.

3(T

A)

21

330.

2(T

A)

13 431.

8(T

A)

17

523.

4(T

A)

21

isel IWH HD F-2 Wafer Handling Robotswith two-link heavy duty body/arm

Wafe

r H

andling Characteristics

■

■

■

■

■

■

■

■

■

■

■




Customized designs







Made in Germany

Handling and more

Specifications

Repeatability

Working range

Payload

T

R

Z

Z

radial

theta

Maximum speed

Main interface

Power supply

T

R

Z

360°/s

1,000 mm/s

450 mm/s

110 / 230 V AC

±0.02°

±0.03 mm

±0.03 mm

13”, 17”, 21”

10", 12", 14", 16", 20"

450°

2.75 kg



Figure:IWH TA13S10HD F-2

12

isel IWH HD F-2 Wafer Handling Robotswith two-link heavy duty body/arm

Wafe

r H

andling

Handling and more

Dimensions

IWH TA S HD F-2__ __

557

(TA

)13

659

(TA

)17

100

Ø 330.2

760

(TA

)21

253

533.

1(T

A)

21

431.

8(T

A)

17

330.

2(T

A)

13

266.7 (S )10

365.8 (S )14426.7 (S )16

508 (S )20

75

304.8 (S )12

672

(BA

)13

85

774

(BA

)17

533.

4(B

A)

21

330.

2(B

A)

13

255

273

875

(BA

)21

431.

8(B

A)

17

225

265

215235

266.7 (S )10304.8 (S )12

365.8 (S )14426.7 (S )16

508 (S )20

75

IWH TA S HD F-213 10IWH TA S HD F-213 12IWH TA S HD F-213 14IWH TA S HD F-213 16IWH TA S HD F-213 20IWH TA S HD F-217 10IWH TA S HD F-217 12IWH TA S HD F-217 14

IWH TA S HD F-217 16IWH TA S HD F-217 20IWH TA S HD F-221 10IWH TA S HD F-221 12IWH TA S HD F-221 14IWH TA S HD F-221 16IWH TA S HD F-221 20


IWH BA S HD F-213 10IWH BA S HD F-213 12IWH BA S HD F-213 14IWH BA S HD F-213 16IWH BA S HD F-213 20IWH BA S HD F-217 10IWH BA S HD F-217 12IWH BA S HD F-217 14

IWH BA S HD F-217 16IWH BA S HD F-217 20IWH BA S HD F-221 10IWH BA S HD F-221 12IWH BA S HD F-221 14IWH BA S HD F-221 16IWH BA S HD F-221 20


IWH BA S HD F-2__ __

13

isel IWH F-2 Wafer Handling Robotswith three-link heavy duty body/arm

Wafe

r H


■

■

■

■

■

■

■

■

■

■

■




Customized designs







Made in Germany

Handling and more

Specifications

Repeatability

Working range

Payload

T

R

Z

Z

radial

theta

Maximum speed

Main interface

Power supply

T

R

Z

360°/s

1,000 mm/s

450 mm/s

110 / 230 V AC

±0.02°

±0.03 mm

±0.03 mm

13”, 17”, 21”

16", 21", 24"

450°

2.75 kg




14

isel IWH F-2 Wafer Handling Robotswith three-link heavy duty body/arm

Wafe

r H

andling

Handling and more

Dimensions

IWH TA S F-2__ __

IWH TA S F-213 16IWH TA S F-213 21IWH TA S F-213 24IWH TA S F-217 16IWH TA S F-217 21

IWH TA S F-217 24IWH TA S F-221 16IWH TA S F-221 21IWH TA S F-221 24


IWH BA S F-2__ __

IWH BA S F-213 16IWH BA S F-213 21IWH BA S F-213 24IWH BA S F-217 16IWH BA S F-217 21

IWH BA S F-217 24IWH BA S F-221 16IWH BA S F-221 21IWH BA S F-221 24


659

(TA

)17 557

(TA

)13

Ø 330.2

137

533,

4(T

A)

21

431,

5(T

A)

17

330,

2(T

A)

13

760

(TA

)21

406.4 (S )16

533.4 (S )21

609.6 (S )24

75

709

(BA

)13

811

(BA

)17

122

431,

8(B

A)

17

330,

2(B

A)

13

533,

4(B

A)

2191

2(B

A)

21273255

225

265

215235

75

406.4 (S )16

533.4 (S )21

609.6 (S )24

15

isel IWH F-3 Wafer Handling Robot with dual arm

Wafe

r H

andling

16

Handling and more

Specifications

Repeatability

Working range

Payload

T

R

Z

Z

radial

theta

Maximum speed

Main interface

Power supply

T

R

Z

360°/s

1,100 mm/s

425 mm/s

110 / 230 V AC

±0.02°

±0.03 mm

±0.03 mm

13” (330.2 mm)

14.4" (365.8 mm)

450°

max. 1.25 kg /arm



Characteristics

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■

■

■

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■


Wafer handling of up to 300mm


Easy connection of a linear track to the robotcontroller

Real time motion control

Very smooth running

Brushless, maintenance free servo motors withlow inertia

Backlash free Harmonic Drive gears

Absolute Encoder

Various communication interfaces

Class 1 clean room compatible

MTBF:>50.000 operating hours

Including Robot Control Center

®

Wafe

r H

andling

17

Handling and more

Dimensions

10

708

335

559

312

Ø 555

555

Ø 300 Wafer

M84

x

182.9

250

225

isel Wafer Handling Vacuum Robot

Wafe

r H

andling

18

Handling and more

Specifications

Cleanliness

Weight

T

R

Z

Z

radial

theta

Maximum speed

T

R

Z

360°/s

500 mm/s

100 mm/s

110 V AC

±0.02°

±0.05 mm

±0.05 mm

1.5” (38.4 mm)

14" (355.6 mm)

380°

1.0 to 2.2 kg

<5x10 Torr-9

Class 1

21.8 kg (48 lbs)


150° C (302° F)

80° C (176° F)

Al 6061, Stainless steel,Ferrofluid, Viton

Configuration

Top or bottom of chamber base

Modular, interchangeable arms

Main interface

Power supply

Max. temperature

Max. operating temperature

Exposed materials

Mounting style

Repeatability

Working range

Payload

Leak rate

Characteristics

■

■

■

■

■

■

■

■

■

■

■

■

■

Industry standard footprint and mountingconfigurations

Wafer handling of up to 300mm

High precision user configurable 14", 16" and18" arms


Ferrofluidic vacuum seal

Vacuum levels at <5x19 Torr

Real time motion control

Very smooth running

Brushless, maintenance free servo motorswith low inertia

Absolute Encoder


Class 1 cleanliness

MTBF:>50.000 operating hours

-9

isel Wafer Handling Vacuum Robot

Wafe

r H

andling

19

Handling and more

Dimensions

Ø 11.00

B B

AFULL Z STROKE

1.56

1.60

Ø 9.30 [236.2]

17.40

3.35

.49EC

.75(Hard Stop)

D

1

1

2

2

RECOMMENDED WAFER TRANSFEREE PLANE

RECOMMENDED CHAMBER HOLE Ø 9.5" [241.3]

Arm 7 Arm 8 Arm 9 Arm 9 HD

in [mm] 10-20-0046 10-20-0057 10-20-0045 10-20-0050

A 14.381 [365.28] 15.37 [390.3] 18.5 [471] 18.5 [471]

B 7.48 [190] 7.99 [203] 9.6 [245] 9.6 [245]

C 2.14 [54.35] 2.27 [57.8] 2.14 [54.35] 2.7 [68.5]

D 0.87 [22.05] 1.04 [26.5] 0.868 [22.05] 1.2 [31]

E 1.181 [30] 1.14 [29] 1.18 [30] 1.3 [32.5]

Wafe

r H


■

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■

■

■

■

■

Class 1 Cleanliness

Feedback: Absolute Encoder

Repeatability: 0.001"

Maximum vertical stroke: 406 mm [16"]

Maximum Vacuum: 1.0x10 Torr

Motors: AC Servo

Elevator weight: 18.2 kg [

-10

40 lbs]

Elevator payload: 5.5 kg [12 lbs]

Surface: aluminium, stainless steel

Sensors: Cassette present

Z stroke: 304.8 mm [12"]

Handling and more

20

isel Vacuum Elevator

isel Vertical RobotIVR Series

Wafe

r H

andling

DescriptionThe vertical robot series represents a high-qualitycompact design. By using robust-industry-provencomponents and by reducing the number of inter-connecting parts we were able to build a very rigidand dynamic robot system.

trans-porting . respon-sive low-inertia

This new handling solution is suitable forwafers and substrates Extremely

brushless motors, coupled withdirectly driven Harmonic Drive transmissionsguarantee precise and interference-proof armmovements.

The robust-industry-proven external servo controllerwith it's 32-bit real-time kernel provides for aseamless integration of traversing axes and otherperipheries. This controller ensures smooth axistraversing along multiple path segments.

The controller supports RS-232, RS-485, TeachPendant and Ethernet interfaces.

®

Characteristics■

■

■

■

■

■

■

■

■

■

■


Maximum speed >1 m/s

Z axis up to 1,200 mm

Optimal acceleration - user programable

Easy connection of a traversing axis to the robot controller

Real-time movement control

Very smooth operation - vibration free

Brushless, maintenance-free servo motors with lowmoment of inertia

Harmonic Drive transmission with zero backlash


MTBF > 50,000 hours

®

Example:Custom solution with1,200 mm axis lengthand lateral axis module

Handling and more

21

isel Linear TrackILT Series

Lin

ear

Tra

cks

DescriptionDue to their flexibility, the linear tracks of the ILTseries can easily be integrated into your availableinstallation. The tracks are controlled incombination with our IWH series robots.

By this combination of the linear tracks with therobots, the system is very effective and

provides high throughputs.

Depending on the type of application, the lineartracks can be mounted underneath the robots orlateral. The use of brushless servo motors ensuresour linear tracks are operationally dynamic, smoothand service-free.

isel

Characteristics■

■

■

■

■

■

■

High speed and dynamics

Overall lengths user definable, according to the application

Configurable lateral or bottom mounting


Robust-industry-proven reliability and precision

Simple to connection to the robot controller

Driven by linear motor or spindle isel

isel

Linear Trackwith lateral mounted

Wafer HandlingRobot seriesIWH-TA

Handling and more

22

isel Linear TrackILT Series

Lin

ear

Tra

cks

isel

isel

Linear Trackwith top-mounted

Wafer HandlingRobot seriesIWH-BA

Handling and more

23

Access

ories

for

Wafe

r H

andle

rs

isel End EffectorsIEE Series

2 05 40 x x x x

Option

0000 = Standard0002 = Flip module0003 = Vacuum control with display9xxx = Customized end effector

8 = Scanner Cyberoptics EX-43QS9 = Scanner Cyberoptics EX-73QS

07 = 2x horse shoe08 = Pocket end effector09 = Exclusion zone grip10 = Exclusion zone vacuum

5 = 2 - 5"6 = 6 - 8"7 = 4 - 8"8 = 12”9 = 8 - 12”

Wafer mapping

End effektor type

Wafer size

0 = No wafer mapping sensor2 = Scanner SUNIX M-DW14 = Thru beam sensor horseshoe

01 = Paddle02 = Horse shoe03 = Edge grip04 = 2x paddle05 = Paddle/horse shoe

Automation componentsfor the semiconductor industry,

product group end effectorsIEE Series 1

x x x x

Handling and more

25

Product Key

PrealignersLPA Series

Pre

aligners Characteristics (Three-axis prealigners)

■

■

■

■

■

■

■

■

■

■

■

Innovative all-in-one design

Alignment cycle time <3.5 Seconds

Repeating accuracylinear. ±0.025 mm, circular ± 0.05°

Contactless measuring via LED and CCD sensor

Integrated scan electronics

Stand-alone capable

Chuck- or pinload as well as wafer size changingwithout mechanical changes

Transparent, semi-transparent, punched andopaque wafers alignable

SEMI, flat and notch wafer specifications

For wafer sizes from 2" up to 12"

Bottom-entry and side-entry cable configurations

Description

The prealigners are innovative, high precision,class 1 compatible prealigner solutions with integratedscan electronics.

LPA series

Characteristics (Single axis Prealigners)

■

■

■

■

■

■

■

■

■

Alignment cycle time <2.5 Seconds

Contactless measuring via LED and CCD sensor

Integrated scan electronics

Chuck load

Wafer size changing without mechanical changes

Transparent, semi-transparent, punched andopaque wafers alignable

SEMI, flat and notch wafer specifications

For wafer sizes from 3" up to 12"

Side-entry and back-entry cable configurations Single axisprealignerwith back-entry cableconfiguration

LPA Series

Three-axisprealignerwith lateral connectorsand PEEK pin/chuck

LPA Series

Handling and more

26

Pre

aligners

LPA

PrealignersLPA Series

Handling and more

27

312 3 V 40 P 1 S 23 S V 500 P N ****

Interface

N

Contact material

PVKSC

Pin length in inch*10

Pin Type

VEC

= Ethernet interface

= Peek= Viton= Kalrez= Stainless Steel= Custom

= Vacuum= Edge handling= Custom

-3

500

Cable entry

SB

Height in mm

23

CCD Sensitivity

SH

= Standard

= Side cable entry= Bottom cable entry

= Standard

= Standard= High

Wafer sizes

25

Number of axes

13

Chuck type

Chuck diameter in mm

23

= 2" to 5"

= Single axis= Three axes

= 2" to 5"

2638583128126EH8EH12EH

VEC

2340404076

Contact material

PVKATC

Chuck encoder

12

= 2" to 6"= 3" to 8"= 5" to 8"= 3" to 12"= 8" to 12"= 6" only= 8" only

= 12" only

= Vacuum= Edge handling= Custom

= 2" to 6"= 3" to 8"= 5" to 8"= 3" to 12"= 8" to 12"

= Peek= Viton= Kalrez= Aluminum= Teflon= Custom

= 10K PPR= 24K PPR

( for edge handling)EH

Standard sizes:

(Standard)

(Standard)

Series Customization code

Not applicable forsingle axis models

Chuck Lighthouse Pins

Product Key

Optional

Example:

Access

ories

for

Wafe

r H

andling

Controllers

Internal Controller■

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■

■

■

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■

IWH series 1, IWH-HD series 2, IVR series, prealigners

Control of incremental encoders

3+1 axes

4 inputs, 3 outputs

RS232 and Ethernet communication

RCC software

- I/O extensionOptional:

External Controller■

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■

■

■

■

■

■

Vacuum Robots, Dual Arm Robots, IWH Series 4

Compact, pre-integrated networkable & I/O control

6+2 axes

32 digital inputs, 14 digital outputs

Autotuning, autocalibration, DWC, adaptive control

Total Graphics GUI

Semiconductor Toolkit Software

Dimensions: 285 x 219 x 81 mm

Internalcontroller

Externalcontroller

RCC softwarescreenshot

SemiconductorToolkit softwarescreenshot

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Access

ories

for

Wafe

r H

andling

Controllers / Wafer Mapping Sensors

Handling and more

Internal ControllerExternal Controller■

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■

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IRC 331IRC 331 ex

Suitable for IWH Series 1, IWH HD Series 2, IVR Series,Dual Arm series

Control of incremental and absolute encoders

3 + 1 axes, upgradable

14 inputs, 13 outputs

RS-232 and Ethernet communication interfaces

Robot Control Center (RCC) software

Dimensions: 480 x 180 x 150 mm

Options:- I/O extensions- Hand terminal

RCC softwarescreenshot

Figure:IRC 331ex

29

Wafer Mapping Sensors

IMS-EX43(73)QS■

■

■

IMS-MDW1■

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IMS

Laser class 1 light source

Measuring distance 38 / 56 mm (1,5" / 2,2”)

Sensor flexibly configurable

LED light source

Measuring distance 45 mm (1.75")

PNP / NPN switchable

Access

ories

for

Wafe

r H

andling

Other Accessories

Flip Module■

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IFM-300-2Accurate flipping of wafers with most precisepositioning by means of positive stops

Universal end effector adapter

Mapping sensor

DC Motor with transmission unit

Electrical end-of-travel damping

Continuously variable speeds

Hand Terminal■

■

■

■

■

■

IHTOptimal support when teaching an wafer handler

Keyboard layout optimized for wafer handlers

RS-485

isel

isel

Terminal function

Teach function

Diagnosis function

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30

Custom Solutions - Why isel?

Some important reasons to choose us:■

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We develop, design and manufacture almost all necessarycomponents on our own premises. Thus we achievehighest planning flexibility and extremely shortimplementation phases

We maintain an extensive portion of production in-houseand possess a vast amount of high volumn productionexperience

We offer you excellent service and support throughout theproduct life cycle, from initial design through finalacceptance and production use

The emulation and integration of third party software isvirtually seamless. Your engineering time and costexpenditure is therefore minimal

Due to our location in Central Europe and a favorableinfrastructure we are on the spot in a short time

Project Development

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In order to ensure optimal results, well-trained andexperienced project engineers oversee the projects atiselRobotik. The project procedure typically proceedsas follows:

Define the boundary conditions on-site

Cooperative creation of the customer requirementsspecification

Creation of a conceptional with 3D CAD systems

Issue of a project-specific quotation and statement ofwork including the product requirements specificationwith all project-specific parameters

Release of the product requirements specificationsand the provisional conceptional design

Creation of the detailed conceptional design specificationof the project

Upon your release of the detailed conceptional designspecification we start with the manufacturing of yourcustomized robotic system

System acceptance is completed upon the successfulproduct installation and the meeting all of yourspecifications

design

Cust

om

Solu

tions

Handling and more

31

Note

s and D

raft

s

Notes and Drafts

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32

Notes and Drafts

Note

s and D

raft

s

Handling and more

33

Note

s and D

raft

s

Notes and Drafts

Handling and more

34

Refe

rences

References

I O S . I N S T R U M E N T S

HSEB

INNOLASInnovative

Lasertechnologie

Subsequently you'll find a selection of companies thatparticipated in a successful co-operation with us andthat successfully use our products:

Handling and more

35

mechatronic

systemtechnik gmbh

970250 TE005 // 40_2009

i s e l G e r m a n y A GR o b o t i c s D e p a r t m e n tBuergermeister-Ebert-Str. 40D - 3 6 1 2 4 E i c h e n z e l l

Tel.: +49 (0) 66 59 981 - 0Fax: - 776

E-Mail: [email protected] w w . i s e l r o b o t i k . c o m

+49 (0) 66 59 981

Handling and more

Business

Tk Robotik 2009 E Lowres