6
 Feasibility study and on-chip antenna fo r fully integrated μRFID tag at 60 GHz in 65 nm CMOS SOI A. Fonte, S. Saponara, G. Pinto, B. Neri Dipartimento di Ingegneria dell’Informazione, Università di Pisa, I-56122, Pisa, Italy  Abstract  —This paper reports the feasibility study of a novel passive tag for μRFID applications in the worldwide available free 60-GHz band. The feasibility analysis indicates that a passive fully-integrated μRFID tag, with on-chip antenna, can be realized in 65-nm SOI CMOS technology at 60 GHz with an operating range of about 20 cm. The 65-nm SOI CMOS technology represents a good candidate due to its better performance in terms of low-losses, low-power consumption and lower leakage current if compared with standard bulk process. The proposed circuit does not require complex package or bonding, thanks to the on-chip antenna, and it does not need battery. The low-cost technology and low-weight and low-area occupation are important features of this μRFID, especially if produced in large scale for the mass-market. Since the design of integrated antennas in silicon technology is one of the main challenge, especially for this proposal, two 60-GHz antennas have been designed by means of 3D-EM simulator: a CPW double-slot antenna and a CPS dipole one. The simulation results show a gain of 4.44 dBi and 3.23 dBi for the proposed double slot and dipole on-chip antennas, respectively.  Index Terms  — 60-GHz, 65nm CMOS SOI (Silicon on Insula- tor), CoPlanar Waveguide (CPW), CoPlanar Strip (CPS), On- chip integrated antenna, Radio Frequency IDentification (RFID) I. I  NTRODUCTION ADIO Frequency Identification (RFID) technology is now extensively utilized in many commercial applications such as access control, security and also in the modern supply chain management in order to identify and track the goods. A  basic RFID system consists of at least two components, one or more transponders (tags), which are located on the objects to  be identified and tracked, and the reader, which, depending on the technology used and the application, can be a read or a read/write device. The operating principle is very easy: the tag receives a signal from the reader and then sends back a signal including the unique serial number and some additional data. There are generally three types of RFID tags: i) active tags, which include a battery for their working and to transmit the signal to the reader autonomously; ii) passive tags, which have no battery and collect from the reader all the energy required for their working and to transmit the signal back to the reader; iii) semi-passive tags, which include a battery only for their working but collect from the reader the energy to transmit the signal. Though active RFID tags have better performance in terms of maximum operating range and more embedded func- tions, they are mainly used for high-price merchandise due to their high-manufacturing cost. On the other hand, the passive tags dominate the market due to a lower production cost, even if the size of these devices is often limited to the external an- tenna [1-3]. Indeed, passive μRFID tags can be efficiently adopted for a series of new short-range applications (see Fig. 1) such as con- tact-less cards (e.g. credit or debit card), secure keys (secure automobile or door keys) and they can also be integrated into  banknotes in order to increase the security against falsifica- tion. The key limitations of these tags are the power consump- tion and the difficulty to design the system as small as possible  preserving a low manufacturing-cost. The passive μRFID tag presented in this paper has been de- signed to achieve these goals. In detail, in Section II, a feasi-  bility study o f a 60-GHz fully integrated passive μRFID tag in 65-nm CMOS SOI technology is presented. In Section III the 3D-EM designs of different 60-GHz on-chip integrated anten- nas are shown. Finally, in Section IV conclusions are drawn. II. 60-GHZ RFIDS OVERVIEW The proposed chip for the 60-GHz μRFID tag is made up of an on-chip integrated single-ended antenna, the radio- frequency front-end and the digital circuits. I/O pins and  battery are not requir ed thus simplifying packaging and bond- ing. The architecture of the passive tag is shown in Fig. 2. In detail the chip consists of i) the integrated antenna which rece- ives the reader signal and collects the energy for the tag opera- tion, ii) the matching network in order to ensure the maximum  power transfer from the transponder’s antenna to the input of the rectifier, iii) the rectifier which provides the power supply to the analog blocks, iv) the voltage regulator to supply stable output voltage, v) the ring oscillator for the clock generation, vi) the backscatter modulator which modules the load of the antenna in order to send the unique serial number and/or some additional data to the reader and finally vii) the digital section which typically is a very simple finite-state machine able to manage the communication protocol. R  Fig. 1. Some possible applications o f the fully integrated 6 0-GHz passive μRFID tag: a) contact-less smart card, b) secure banknote, c) secure car keys. 2011 IEEE International Conference on RFID-Technologies and Applications 978-1-4577-0027-9/11/$26.00 ©2011 IEEE 457

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Feasibility study and on-chip antenna for fully integrated μRFID

tag at 60 GHz in 65 nm CMOS SOI

A. Fonte, S. Saponara, G. Pinto, B. Neri

Dipartimento di Ingegneria dell’Informazione, Università di Pisa, I-56122, Pisa, Italy

Abstract —This paper reports the feasibility study of a novelpassive tag for μRFID applications in the worldwide available

free 60-GHz band. The feasibility analysis indicates that a passive

fully-integratedμRFID tag, with on-chip antenna, can be realized

in 65-nm SOI CMOS technology at 60 GHz with an operating

range of about 20 cm. The 65-nm SOI CMOS technology

represents a good candidate due to its better performance in

terms of low-losses, low-power consumption and lower leakage

current if compared with standard bulk process. The proposed

circuit does not require complex package or bonding, thanks to

the on-chip antenna, and it does not need battery. The low-cost

technology and low-weight and low-area occupation are

important features of this μRFID, especially if produced in large

scale for the mass-market. Since the design of integrated

antennas in silicon technology is one of the main challenge,

especially for this proposal, two 60-GHz antennas have beendesigned by means of 3D-EM simulator: a CPW double-slot

antenna and a CPS dipole one. The simulation results show a

gain of 4.44 dBi and 3.23 dBi for the proposed double slot and

dipole on-chip antennas, respectively.

Index Terms — 60-GHz, 65nm CMOS SOI (Silicon on Insula-

tor), CoPlanar Waveguide (CPW), CoPlanar Strip (CPS), On-

chip integrated antenna, Radio Frequency IDentification (RFID)

I. I NTRODUCTION

ADIO Frequency Identification (RFID) technology is

now extensively utilized in many commercial applications

such as access control, security and also in the modern supply

chain management in order to identify and track the goods. A

basic RFID system consists of at least two components, one or

more transponders (tags), which are located on the objects to

be identified and tracked, and the reader, which, depending on

the technology used and the application, can be a read or a

read/write device. The operating principle is very easy: the tag

receives a signal from the reader and then sends back a signal

including the unique serial number and some additional data.

There are generally three types of RFID tags: i) active tags,

which include a battery for their working and to transmit the

signal to the reader autonomously; ii) passive tags, which have

no battery and collect from the reader all the energy required

for their working and to transmit the signal back to the reader;

iii) semi-passive tags, which include a battery only for theirworking but collect from the reader the energy to transmit the

signal. Though active RFID tags have better performance in

terms of maximum operating range and more embedded func-

tions, they are mainly used for high-price merchandise due to

their high-manufacturing cost. On the other hand, the passive

tags dominate the market due to a lower production cost, even

if the size of these devices is often limited to the external an-

tenna [1-3].

Indeed, passive μRFID tags can be efficiently adopted for a

series of new short-range applications (see Fig. 1) such as con-

tact-less cards (e.g. credit or debit card), secure keys (secure

automobile or door keys) and they can also be integrated into

banknotes in order to increase the security against falsifica-

tion. The key limitations of these tags are the power consump-

tion and the difficulty to design the system as small as possible

preserving a low manufacturing-cost.

The passive μRFID tag presented in this paper has been de-

signed to achieve these goals. In detail, in Section II, a feasi-

bility study of a 60-GHz fully integrated passive μRFID tag in

65-nm CMOS SOI technology is presented. In Section III the

3D-EM designs of different 60-GHz on-chip integrated anten-nas are shown. Finally, in Section IV conclusions are drawn.

II. 60-GHZ RFIDS OVERVIEW

The proposed chip for the 60-GHz μRFID tag is made up of

an on-chip integrated single-ended antenna, the radio-

frequency front-end and the digital circuits. I/O pins and

battery are not required thus simplifying packaging and bond-

ing. The architecture of the passive tag is shown in Fig. 2. In

detail the chip consists of i) the integrated antenna which rece-

ives the reader signal and collects the energy for the tag opera-

tion, ii) the matching network in order to ensure the maximum

power transfer from the transponder’s antenna to the input of

the rectifier, iii) the rectifier which provides the power supply

to the analog blocks, iv) the voltage regulator to supply stable

output voltage, v) the ring oscillator for the clock generation,

vi) the backscatter modulator which modules the load of the

antenna in order to send the unique serial number and/or some

additional data to the reader and finally vii) the digital section

which typically is a very simple finite-state machine able to

manage the communication protocol.

R

Fig. 1. Some possible applications of the fully integrated 60-GHz passiveμRFID tag: a) contact-less smart card, b) secure banknote, c) secure car keys.

2011 IEEE International Conference on RFID-Technologies and Applications

978-1-4577-0027-9/11/$26.00 ©2011 IEEE 457

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Since this tag is completely passive (no battery), the operat-

ing range is small (tens of centimeters): it has been estimated

by considering the restriction applied for devices operating in

the 60-GHz frequency range.

A. Operating Range

Around 60 GHz there are 7-GHz of unlicensed bandwidth

with few regulatory specifications. The allocated frequency

bandwidth varies from country to country. In detail, EuropeanTelecommunications Standards Institute (ETSI) has recently

published a new version of a European standard which prom-

ises to significantly increase the broadband capacity to meet

the ever-growing demands foreseen for European communica-

tions [4]. The standard now covers microwave links that oper-

ate in the frequency bands between 57 and 66 GHz. Moreover,

the Federal Communications Commission (FCC) in the fre-

quency allocation table provides, for Canada and USA, fre-

quency bands between 57 and 64 GHz for unlicensed applica-

tions [5]. Different specifications are adopted in Australia

(59.4 – 62.9 GHz) and Japan (59 – 66 GHz), but in any case

there is an overlap of about 3 GHz around 60 GHz which is

worldwide available, as shown in Fig. 3.

In order to estimate the operating range, defined as the max-

imum distance between reader and tag at which the link radio

can be considered reliable, some considerations have been

made and the power limits required in the 60-GHz bandwidth

have been taken into account.

The ETSI and FCC specifications limit the average power

density of any emission in this band to 9 µW/cm2 and the peak

power density to 18 µW/cm2, both measured at a distance of

3 meters from the radiating structure. These average and peak

power density limits are equivalent to average and peak of the

Effective Isotropic Radiated Power (EIRP) limits of 10 W

(40 dBm) and 20 W (43 dBm), respectively. The rules alsolimit the peak transmitter output power to 500 mW (27 dBm)

with an emission bandwidth of at least 100 MHz. Anyhow, the

Wireless Communications Association International (WCAI)

requests that the EIRP emission limit for point-to-point sys-

tems, employing very high gain antennas, should be 82 dBm

less 2 dB for every dB that the systems’ antenna gain is below

51 dBi. In this way, the EIRP limits are those in Table I.

By taking into account the specifications in term of antenna

gain, EIRP limit and frequency bandwidth, the operating range

of the 60-GHz passive tag has been estimated. Plausible val-

ues of the reader antenna gain (G R) and EIRP for our applica-

tion can be 30 dBi and 40 dBm, respectively. Since the system

works correctly when the power collected by the tag (PTAG) is

higher than the minimum power consumption of the tag, then

the maximum distance between the reader and the tag ( RTAG)

can be calculated as:

0max1

4

TAG

TAG

EIRP Gr

P

λ

π

⋅= ⋅

(1)

where GTAG is the antenna gain of the tag, and λ0 is the wave-

length.

However, the signal power received by the reader from the

tag has to be higher than the reader sensitivity (SR ). Therefore,

taking into account this limit, the maximum distance between

the reader and the tag can be estimated by using the following

formula:

04

max24

R TAG

R

EIRP G Gr

S

λ

π

⋅ ⋅= ⋅

(2)

Obviously the operating range is the smaller between r max1

and r max2. Now, by considering a plausible value of the tag an-

tenna gain GTAG of at least 0 dBi (see results in Section III),

the minimum tag power consumption of about 5 μW as in [6],

and the efficiency of the rectifier at 60 GHz close to 5% as in

[7], then the P TAG has to be at least 100 μW, and then

r max1 = 12.6 cm. Moreover, S R depends on the bit error rate

(BER) of the system and the noise figure of the reader. A feas-ible value of S R for 60 GHz designs can be close to -60 dBm

with a BER of 10-6 [8] and then r max2 = 70.76 cm. Therefore

the operating range for 60-GHz μRFID tags is due to r max1.

The RFID tag architecture in Fig. 2 is similar to other state-

of-art designs apart the on-chip antenna, the new key element

of this design described in details in Section III. In order to

build the 60-GHz fully-integrated tag proposed in this paper,

an accurate design of the on-chip antenna is required for

transmission and reception. It is worth nothing that the inte-

gration of antennas on silicon substrates is a critical require-

Fig. 2. Block diagram of the fully integrated 60-GHz passive μRFID tag.

Fig. 3. Worldwide frequency allocation around 60 GHz.

TABLE I - EIRP LIMITS FOR THE READER (WCAI)

Reader

Antenna Gain

EIRP limit Transmitter Power

30 dBi 40 dBm (10 W) 10 dBm

40 dBi 60 dBm (1 KW) 20 dBm

50 dBi 80 dBm (100 KW) 27 dBm

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ment enabling the entire system to be realized as a monolithic

unit that does not require any external transmission line con-

nections or sophisticated packaging. As shown in the next sec-

tion the 65-nm SOI CMOS process is a good candidate to effi-

ciently implement integrated antennas in the 60 GHz band.

B. SOI CMOS: Technology description

The SOI CMOS technology shows very attractive perfor-

mance for the millimeter-wave system-on-chip design, since

the high active performance of MOS transistors, such those

available in standard CMOS technology used in digital de-

signs [16-24], are combined with the high-resistivity (HR) of

the SOI substrate. Indeed, the feature that the circuit elements

are isolated dielectrically allows the SOI technology to signif-

icantly reduce junction capacitances and allows the circuits to

operate at high speed or substantially with lower power at the

same speed. Moreover, the device structure also eliminates the

latch-up in bulk CMOS and improves the short channel effect

immunity. A comparison between SOI and bulk CMOS tech-

nologies is shown in Fig. 4, in which the buried oxide (BOX)

layer (εr = 4) and the high resistive (HR) substrate (εr = 11.7 ,

σ Si = 0.0001 S/m, and hSi = 355 μm) can be noted in the SOI process. Finally, the performance of the antennas designed in

SOI CMOS process are better than those designed on standard

CMOS process, as demonstrated in [9-13]. This improvement

is due to a reduced amount of energy stored in the supporting

substrate.

III. 60-GHZ A NTENNAS DESIGN

In this section the designs and the simulation results of two

different antennas, integrated in 65-nm SOI CMOS technolo-

gy, will be described.

A. Cross-section of the SOI CMOS process

The cross-section of a standard industrial SOI CMOS back-end is shown in Fig. 5a. In this technology the back-end con-

sists of a very complex multi-layer in which the dielectric

multi-layer is composed by an alternation of SiO2 and Si2 N4.

For computing time reasons, since the 3D-EM simulator used

is a volume field solver (i.e. Ansoft HFSS), the multi-layer

back-end has been simplified to an equivalent back-end with a

reduced number of equivalent ticker layers that results in a

more efficient solution. In detail, the parameters took into ac-

count in order to build the simplified cross-section of the SOI

CMOS process are the metallization thickness made of 6 thick

copper staked layers (M1-M6Z), the aluminum capping layer

(AP) and the multi-layer dielectrics. The simplified cross-

section for the 3D-EM simulations are reported in Fig. 5b

where the multi-layer stack has been significantly compressed

without compromising the accuracy. For that purpose, a

weighted average of the dielectric material properties and

thickness calculated by means of the formula described in [14]

has been applied. The relative permittivity of each equivalent

layer (εr,eq) is calculated by:

( )2

1, 1

1

ne eq n n n

n n

h

h hε ε ε ε −

⎡ ⎤= + −⎢ ⎥

+⎣ ⎦

(3)

where n is the layer index, εn and hn are the relative permittivi-

ty and the thickness of the nth layer, respectively.

B. Antennas design

According to the above analysis, the CPW (Coplanar wave-

guide) topology is a good candidate to design the antenna for

the 60-GHz μRFID tag. The work in [15] has also demonstrat-

ed that in HR SOI substrates the losses are drastically reduced

if compared with the bulk silicon technology, in which the

CPW transmission lines are made only on top metal layer in

order to reduce substrate losses. The design presented hereinmakes use of staked structure (M1-AP) for the ground paths

and AP and M6Z metal layers for the signal paths. It is worth

noting that the ground planes have to be large enough to intro-

duce negligible effects on the antenna property, and then a

compromise has been reached between infinite ground planes

and suitable dimensions for silicon applications. Fig. 6 shows

the simplified CPW architecture dedicated to SOI CMOS

process; in Fig 6 W is the width of the signal line and G is the

gap between the signal line and the ground plane.

To realize a balanced and simpler feeding line for the radia-

Fig. 4. a) Simplified cross section of SOI CMOS process and b) Simplified

cross-section of bulk CMOS process.

Fig. 5. a) Cross section of SOI CMOS back-end and b) Simplified cross-

section of SOI CMOS back-end for 3D-EM simulations.

Fig. 6. Simplified CPW architecture implemented for the SOI CMOS tech-

nology.

Fig. 5. a) Cross section of SOI CMOS back-end and b) Simplified cross-

section of SOI CMOS back-end for 3D-EM simulations.

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tion structure, also the CPS (Coplanar strip) topology has been

looked at. In Fig 7, a CPS with a finite dielectric thickness

configuration is depicted, where S, W, H, and εr represent the

slot width, strip width, substrate thickness, and relative dielec-

tric constant of the substrate material, respectively. The design

presented herein makes use of M6Z metal layers for the signal

paths.

The integrated antennas proposed hereafter in Sections III.C

and III.D are designed taking into account the followingguidelines: i) the 65-nm SOI CMOS process by ST-

Microelectronics has been used, ii) the 3D-EM designs did not

consider the pad effects since these parasitic effects will be

removed by de-embedding during the measurements, iii) the

knowledge of the effective dielectric constants are necessary

to determine the resonant frequency.

At the operating frequency the antenna reactance ( ImZ IN )

must be null and the real part of intrinsic antenna impedance

( ReZ IN ) must be matched to the communication circuit out-

put impedance. In the considered case of an on-chip integrated

antenna the impedance value can be taken as a parameter ofthe design.

C. CPW Double slot antenna

The first proposed antenna is a CPW double slot (see geo-

metrical parameters and layout in Fig. 8). There are many

coupling matching networks that can be used to connect the

transmission line to the antenna element such as quarter-

wavelength transformer, stub, T-match and others. For exam-

ple, a λ /4 transformer can be used to match CPW double slot

antenna to the canonical 50 Ω impedance. In order to provide

the matching, the λ /4 transformer characteristic impedance Z λ /4

has been set equal to:

/4 0 IN Z R Z λ = ⋅

where Z 0 = 50 Ω represents the characteristic impedance of

the CPW transmission line and R IN = ReZ IN is the input im-

pedance of the antenna.

In this design, the gap between ground plane and antenna

(GS1 and GS2 in Fig. 8) is carefully selected to obtain a good

radiation pattern and resonant behavioral at the operating fre-

quency. An unbalanced CPW feed line is choice as input of

the antenna.

The final 60 GHz fully integrated double-slot antenna is

realized with the following parameters: slot’s length = 910.22

μm (LS), width = 22.76 μm (WS) and 40 μm gap between

ground plane and antenna’s arm. The CPW parameters are W

= 12 μm and G = 12.2 μm. The feeding line’s length is of 560

μm (LCPW). Output impedance is about 14.3 Ω at work fre-

quency. The simulated radiation pattern of this antenna is

mainly directed toward the SOI substrate, therefore, with a

backside metallization the radiation pattern is directed outward

the substrate. The distance between radiating arms and the ref-

lector (355 μm ~ λ g/4) is close to the optimal distance to pre-

vent TM mode which reduces radiation efficiency.

The area needed for the antenna design is roughly 1 mm2,

compliant with on-chip realization. The 3D polar plot of the

antenna gain and the radiation pattern obtained by means of

3D-EM simulations are shown in Fig. 9. In detail, a maximum

Fig. 8. 60-GHz SOI CMOS CPW double slot antenna a) geometrical para-meters and b) design on the 3D-EM simulator.

Fig. 9. 60-GHz SOI CMOS CPW double slot antenna. 3D polar plot of theantenna gain and radiation pattern.

Fig. 7. Simplified CPS architecture implementation.

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gain of 4.44 dBi, a return loss (S11) equal to - 21.82 dB and an

efficiency of 67% at 59.4 GHz have been obtained. Finally, a

directivity peak of about 4.15 is obtained. With a tag antenna

gain (GTAG) of 4.44 dBi the value of r max1 in equation (1),

which determines the operating range, is about 21 cm.

D. CPS dipole antenna

As alternative to the antenna in Section III.C we also de-

signed and characterized by 3D-EM simulations a CPS dipoleantenna. The antenna we designed (see Fig. 10) is directly fed

by a coplanar strip (CPS) input matching network. The area

occupied by the antenna is 0.244 mm2, which is suited for on

chip integration. The radiation pattern of the CPS dipole an-

tenna obtained by means of 3D-EM simulations is shown in

Fig. 11. In detail, a maximum gain of 3.23 dBi and a return

loss (S11) equal to -23.7 dB at 60 GHz, respectively, have

been obtained. With a tag antenna gain (GTAG) of 3.23 dBi the

value of r max1 in equation (1), which determines the operating

range, amounts to 18.25 cm.

In this design, the arm width is carefully selected to reduce

the quality factor of resonance and obtain a wider operating

bandwidth. A balanced CPS feed line is choice as input of the

dipole antenna, and its length is tuned in order to obtained the

wished input impedance (≈ 20 Ω at work frequency). The final

60 GHz fully integrated dipole antenna is realized with the fol-

lowing parameters: dipole's length = 760 μm (LD), width =

22.76 μm (WD) and 1.1 μm gap between the two dipole’s

arms. The feeding line’s length is of 300 μm (LCPS).

The radiation pattern of the integrated dipole shows that the

radiation is mainly directed toward the SOI substrate, where

losses occur. The backside metallization under the wafer can

be advantageously used to act as a reflector. The radiation pat-

tern is directed outward of the substrate when backside metal-

lization is added. The distance between radiating arms and thereflector (355 μm ~ λ g/4) is close to the optimal distance. Fi-

nally, the dipole antenna has 68.8% of radiation efficiency,

with peak directivity of about 3.

Both designed antennas are suitable for on chip integration.

The first type of antenna is the most conventional, and takes

larger chip area, but it presents a higher gain and a particular

behavioral of imaginary part of impedance. As we can see in

Fig. 12, there are many resonant points, so the antenna can be

useful in different frequency ranges. The bandwidth of the

double-slot antenna is thin, only 900 MHz, however, it’s

enough for the RFID applications. The dipole antenna, instead,

presents a balanced feed line, useful in differential elaboration

of signals, and a very small chip area.

IV. CONCLUSION

A fully integrated passive μRFID tag for applications in the

60-GHz license-free band has been presented and the advan-

tages of a fully integration have been described. The 60-GHz

tag does not require pads, bonding or package and does not

needs battery, therefore it represents an important innovation

to further extend the applications of RFIDs. The 65-nm SOI

CMOS process by ST-Microelectronics used in the design,

allowed us, to design a more efficient antenna thanks to its

higher isolation between the substrate and active region, if

compared with a traditional CMOS bulk process. Two inte-

grated 60-GHz antennas have been designed and simulated by

means of the 3D-EM simulator HFSS. The results have shown

a gain of 4.44 dBi and 3.23 dBi, respectively, for the double-

slot and dipole antennas.

Finally, the low-cost, the very low-weight, and the low-area

occupation due to the fact that there are no external elements,

makes the proposed μRFID tag very attractive for the mass-

market, especially in those sectors where traditional tags can-

not be used.

Fig. 10. 60-GHz SOI CMOS Dipole antenna: a) geometrical parameters

and b) design on the 3D-EM simulator.

Fig. 11. 60-GHz SOI CMOS CPS dipole antenna: radiation pattern.

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-300

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30 35 40 45 50 55 60 65 70 75 80 85 90

Freq [GHz]

Imag(Zin),Re(Zin)

im_Zin

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Fig. 12. 60-GHz SOI CMOS CPW double slot antenna a) input resistance and b) input reactance.

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