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Dynamic reference vacuum system for calibration and characterization of Quadrupole Mass Spectrometers TUBITAK UME. Rifat Kangi Bled , Slovenia - 12.04.2012. Dynamic Reference Vacuum System. Mass Flow: Variable Leak Valve Orifice. Orifice Method. Throughput Method. Mass Flow: - MFC. - PowerPoint PPT Presentation
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Dynamic reference vacuum system for calibration and characterization of
Quadrupole Mass Spectrometers
TUBITAK UME
Rifat KangiBled, Slovenia -12.04.2012
Dynamic Reference Vacuum System
Throughput Method
Orifice Method
Mass Flow:- MFC
ba ppCQ Mass Flow:-Variable Leak Valve-Orifice
2
1
1
32d
dLM
RTC D
0PP
QS
10
0
bb
aa
PP
PPCS
System design information and examination (ISO 21360, 5302, 27892)
Dynamic Reference Vacuum System
Single Chamber System
Throughput Method
Double Chamber System
Orifice Method
Dynamic Reference Vacuum System
Mass flow traceability chain needed in the future
The MFC system is not enough to cover the mass flow traceability chain necessary in the vacuum metrology field. Must design and build other mass flow standard in UME.
10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103
10-9
10-8
10-7
10-6
10-5
10-4
10-3
10-2
10-1
100
101
102
103
104
1 sccm: min. commercially available
Effective Area: High Vacuum Pumps
Effective Area: Low Vacuum Pumps500 slm
30 slm
2000 sccm
100 sccm
5 sccm
MFP [m] = 5x10-5/P(Torr)
Space Environment Simulation: generation, measurement & control
iQDP80 Vendor iQDP80a Experiment V1000A Vendor V1000HT Vendor WS 600 L/min Vendor E02k150 Vendor iQMB250 Vendor VacIonPlus500 Vendor STP H1303C Vendor Ebara 30000L/min Vendor
Thr
ough
put [
mba
r-L
/s]
Pressure [mbar]
10-14
10-13
10-12
10-11
10-10
10-9
10-8
10-7
10-6
10-5
10-4
10-3
10-2
10-1
Mas
s, N
2 [kg
/s]
± 2 %
CVFM
Sonic Nozzle
± 0.2 %
CPFM± 5 %
OrificeMetho
d
Under Establishment:[>110-2 mbar.L/s]
System can be used for
• Gas Flow Measurement [Q=C×∆P] (Double Chamber System)
• TMP Evaluation (High Vacuum Pumps)
• Scroll Pump Evaluation (Low Vacuum Pump)
• Mass Flow Rate Measurement [dP/dt] at Constant Volume Chamber
• System can be improved to continuous expansion system
• QMS Evaluation
Long Term Stability Results of Leak Valve
Pressure (mbar) St.Dev.Base Pr. 1,2E-115,00E-09 8,8E-111,00E-08 1,0E-101,00E-07 1,1E-091,00E-06 8,2E-091,00E-05 3,2E-08
0 300 600 900
8.3E-09
8.3E-08
8.3E-07
8.3E-06
Long term stability of leak valve (MDC/ULV-150)
Base Pressure
5.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
Time (s)
Pre
ssu
re (
mb
ar)
Long Term Stability Results of Leak Valve
0 300 600 9009.0E-09
1.0E-08
1.1E-08
1.2E-08
1.00E-08
Time (s)
Pre
ssu
re (
mb
ar)
0 300 600 9009.0E-08
1.0E-07
1.1E-07
1.2E-07
1.00E-07
Time (s)
Pre
ssu
re (
mb
ar)
0 300 600 9009.0E-07
1.0E-06
1.1E-06
1.2E-06
1.00E-06
Time (s)
Pre
ssu
re (
mb
ar)
0 300 600 9009.0E-06
1.0E-05
1.1E-05
1.2E-05
1.00E-5
Time (s)
Pre
ssu
re (
mb
ar)
