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    Journal of Computational Electronics 3: 512, 2004

    c 2004 Kluwer Academic Publishers. Manufactured in The Netherlands.

    Modeling of Current Density Boundary Conditions for a HeterodimensionalContact of 3D-Metal to 2D-Semiconductor

    RAJESH A. KATKAR AND GREGORY B. TAIT

    Electrical Engineering Department, Virginia Commonwealth University, Richmond, VA 23284, USA

    Abstract. We have investigated semi-classical carrier transport at the heterodimensional contact between a three-

    dimensional (3D)-metal and two-dimensional (2D)-semiconductor system. Formulated for easy inclusion in nu-

    merical device simulators, current density boundary conditions for the heterodimensional contact are theoretically

    derived for both electrons and holes. Unlike conventional metal-semiconductor-metal (MSM) photodetectors, in

    which planar surface electrodes are fabricated to establish contact with the semiconductor, a novel MSM device is

    considered by utilizing recessed electrodes that directly contact the 2D-quantum well. The newly derived current

    density boundary conditions have been incorporated in a commercial numerical device simulator to investigate the

    steady-state and transient behavior of a novel quantum-well MSM photodetector. Results for devices with 1-m

    electrode spacing at 2 V DC bias indicate a nominal 3-dB bandwidth of 25 GHz and low dark currents in the

    quantum well of the order of a few femto-amps.

    Keywords: GaAs/AlGaAs quantum well, current density boundary conditions, heterodimensional Schottky con-

    tact, MSM photodetector

    1. Introduction

    A comprehensive research towards exploring the the-

    oryand realization of low dimensional systems is aimed

    at achieving superior performance of semiconductor

    devices. Although optical and electronic properties of

    these reduced dimensional systems are significantly

    different from the bulk materials, the electronic con-

    tact between these different dimensional systems is in-

    evitable to transfer the information to and from the ex-

    ternal circuits. Thus, an extensive study is required toanalyze the contact between a 3D-bulk metal and 2D as

    well as 1D-semiconductor to keep pace with thecontin-

    uous demand to improve speed, responsivity, transport

    efficiency and overall device performance.

    Various models have been developed in the past to

    accurately describe the current density at the Schot-

    tky boundary, a metal contact with the bulk semicon-

    ductor. If the depletion region is sufficiently large,

    the electrons undergo many collisions within this re-

    gion. In such case, drift-diffusion models (put for-

    ward by Schottky in 1938) more closely model the

    current density in the bulk semiconductor as it takes

    into account the scattering in the bulk. When the de-

    pletion region is sufficiently small and the career free

    path length is large with respect to the thickness of

    the potential barrier, electron current from semicon-

    ductor into the metal is governed by thermionic emis-

    sion mechanism in which scattering is not very impor-

    tant. Hence, thermionic emission model (put forward

    by Bethe in 1942) more accurately models the cur-

    rent density at the contact. Thus, the major models,

    which most accurately describe the current density atthe Schottky contact, are based on the combined model

    called the combined drift-diffusion/thermionic emis-

    sion (DD/TE) model [1]. This combined DD/TE model

    enables us to accurately describe the current density in

    a self-consistent manner throughout the device. Vari-

    ous revisions have been suggested to correct several

    theoretical problems in the original DD/TE equations

    due to various assumptions in its derivations. The uni-

    directional normalization to calculate average electron

    velocities was suggested as the first revision [1], while

    the second revision [2] allowed the surface velocity of

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    6 Katkar

    the electron flux moving from semiconductor to metal

    to vary under bias conditions. A third revision [3] wasmade to determine the separate flux surface velocities

    and a fourth revision [4,5] introduced the fraction of

    total carriers involved in each flux term. It also allowed

    the fraction of total electrons that move from semicon-

    ductor into the metal to vary with the applied voltage.

    In this paper, we investigate the heterodimensional

    Schottky contact where bulk metal is in contact with

    the quantum well. In a quantum well, the energies are

    discretized in the direction normal to the direction of

    growth which affects the carrier density of states, their

    concentration, carrier surface velocity and also the frac-

    tion of carriers moving from semiconductor into the

    metal andfrom themetal into thesemiconductor. In thiswork, we derive the two dimensional current density

    expression and the boundary conditions for both elec-

    trons and holes across this heterodimensional Schottky

    contact.

    2. Current Density Boundary Conditions

    for Electrons

    A quantum well is formed by sandwiching a GaAs

    layer between two AlGaAs layers. Note that, through-

    out the calculations, z-direction is the direction of crys-

    tal growth. The semi-classical electron current density

    Je,x in x-direction in the QW can be given as

    Je,x = q

    vege feve,x dve (1)

    where ve is the electron velocity and ve,x is the x-

    component of electron velocity, ge is the 2D density

    of states of electrons in velocity space and fe is the ve-

    locity dependent distribution function for electrons. To

    keepthe dark current low inMSMdevices, weuse a low

    doping concentration in the semiconductor. Thus, an

    approximate displaced Maxwellian distribution func-tion becomes

    fe = expEc + n + 12 me [(ve,x vd,e)2 + v2e,y

    EFnKB T

    (2)

    where Ec is conduction band edge, n is the elec-

    tron sub-band energy in the quantized z-direction,

    while vd,e is the effective electron drift-diffusion ve-

    locity in x-direction which is identical to the displace-

    ment of electron distribution along ve,x axis. vd,e is

    calculated as

    vd,e = Je,xqn

    (3)

    If we consider the negative x-directional and positive

    x -directional velocity components of electrons sepa-

    rately, (1) can be rewritten as [5]

    Je,x = q

    Iy

    0ve,x=

    ge fe,xve,x dve,x

    q

    Iy

    ve,x=0

    ge fe,xve,x dve,x

    , where

    Iy =

    f

    e,ydv

    e,y. (4)

    We introduce an average velocity term from (4) in the

    following manner,

    Je,x = q

    Iy0 ge fe,xve,x dve,x

    Iy0 ge fe,x dve,x

    Iy

    0

    ge fe,x dve,x

    q

    Iy

    0ge fe,xve,x dve,x

    Iy 0 ge fe,x dve,x

    Iy

    0

    ge fe,x dve,x

    (5)

    where

    Iy0 ge fe,xve,x dve,x

    Iy0 ge fe,x dve,x

    = Je,xqn

    ve,x and

    Iy

    0ge fe,xve,x dve,x

    Iy

    0ge fe,x dve,x

    = Je,x+qn+

    ve,x+(6)

    Here ve,x and ve,x+ are the average velocities of elec-trons moving in negative x-direction and positive x-

    direction respectively. We introduce the fraction of

    electron terms (fraction of electrons moving in posi-

    tive and negative x-direction) from (5) as,

    Je,x =qve,x

    Iy0 ge fe,x dve,xve

    ge fedve

    ve

    ge fedve

    qve,x+

    Iy

    0ge fe,x dve,x

    vege fedve

    ve

    ge fedve

    (7)

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    Modeling of Current Density Boundary Conditions 7

    where

    Iy

    0 ge fe,x dve,xve

    ge fedve= n

    n Fe,x and

    Iy

    0ge fe,x dve,x

    vege fedve

    = n+

    n Fe,x+

    (8)

    Here Fe,x and Fe,x+ are the fractions of total elec-

    trons moving in negative and positive x -directions re-

    spectively. Thus electron current density expression be-

    comes

    Je,x = q(ve,x )(Fe,x )n q(ve,x+ )(Fe,x+ )n (9)

    The average electron velocities in thex and +x direc-tion have been calculated for a displaced Maxwellian

    (2) as,

    ve,x = vd,e vt,eexp

    2e1 erf(e)

    ve,x+ = vd,e + vt,eexp

    2e1 erf(e)

    (10)

    Note that sign for the error function in ve,x isused when vd,e 0, respectively. In case of the error

    function in ve,x+ term, sign is used when vd,e >< 0,respectively.In (10), vt,e is the one-dimensional electron thermal

    velocity given as

    vt,e =

    2KB T

    me(11)

    and, the term e is given as

    e = |vd,e|

    mn2KB T

    = 1

    vd,e

    vt,e

    . (12)

    The fraction of electrons terms have been calculated

    using (8) as,

    Fe,x = 12

    [1 erf(e)] Fe,x+ = 12

    [1 erf(e)](13)

    sign for the error function in Fe,x is used whenvd,e 0, respectively. In case of the error function in

    Fe,x+ term,signisusedwhenvd,e >< 0, respectively.Consider the Schottky contact in which metal is on

    the left and the semiconductor is on the right. Current

    density due to electrons moving from metal into the

    semiconductor is constant. Under equilibrium as to-tal current density is zero and Je,M>S is constant andis equal and opposite to Je,S>M . We can also calcu-late from (13) that under equilibrium, the fraction F

    of electrons moving in either direction (x or+x di-rection) is exactly 1/2. ve,x+ , the average velocity of

    electrons from metal to semiconductor under equilib-

    rium, calculated by putting vd,e+ in (10), becomes vt,e.

    If we assume the equilibrium electron density to be n0at the semiconductor interface, current density due to

    electrons from metal to semiconductor becomes

    Je,x+

    =Je,M

    >S

    = qvt,e

    n0

    2

    (14)

    Thus, electron current density expression can be rewrit-

    ten as

    Je,x = qvs,eFn vt,e n0

    2

    (15)

    where vs,e = |ve,x | is the electron surface velocityand F = Fe,x, the fraction of electrons moving fromsemiconductor into the metal.

    When forward bias is applied to the Schottky con-

    tact, the effective electron drift-diffusion velocity vd,ebecomes negative. At higher voltages, F increases to

    1 while electron surface velocity vs,e is asymptotic to

    |vd,e|. Hence under high forward bias, most of the elec-trons from the semiconductor side are thermally emit-

    ted into the metal.

    If the Schottky contact is subjected to reverse bias,

    vd,e becomes slightly positive. For reverse bias volt-

    ages, F = 1/2 and n reduces to zero. Hence, totalelectron current density is primarily composed of the

    electrons emitted from the metal to the semiconductor

    only.

    Total number of electrons at the boundary is calcu-

    lated self-consistently in the numerical simulator as

    n =

    vege f dve

    =

    1

    L z

    meKB Th2

    n

    exp

    n

    KB T

    exp

    EFn ECKB T

    (16)

    In (16), the term 1Lz

    meKB Th

    2

    n exp( nKB T ) = N2DC

    is the effective 2D density of states of the conduction

    band.

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    8 Katkar

    Equation (15) allows us to implement the new cur-

    rent density boundary condition for electrons at aheterodimensional Schottky contact in commercial nu-

    merical device simulators.

    3. Current Density Boundary Conditions

    for Holes

    While we calculate the hole current density, we must

    take into account thefactthat it iscomposedof transport

    of heavy holes andlightholes. Hole current density Jp,xin x-direction can be given as

    Jp,x = q i=l,h

    vPi

    gpi (1 fpi )vpi,x dvpi (17)where vpi is the hole velocity (i represents heavy holeor light hole), gpi is the 2D-hole density of states in v-

    space while fpi is the velocity dependent distribution

    function for holes.

    The hole distribution function can be approximated

    by a displaced Maxwellian distribution given as

    1 fpi

    = expEV n,pi +12

    mpi [(vpi,xvd,pi )

    2

    +v2pi,y ] E f pKB T

    (18)

    where vd,pi is the effective drift-diffusion velocity of

    theholes and mpi is the massof the hole (light or heavy)in the nth valence sub-band.

    As we calculated for electrons, considering posi-

    tive and negative x-directional velocity components of

    holes, the hole current density expression canbe rewrit-

    ten as

    Jp,x = q i=l,h

    Iiy0

    vpi,x=gpi (1 fpi,x )vpi,x dvpi,x

    +

    vpi,x=0gpi (1 fpi,x )vpi,x dvpi,x

    (19)

    If we follow the same steps as we did for electron cur-

    rent density in (4)(15), we get

    Jp,x = q

    i=l,h[(vpi,x )(Fpi,x )p q(vpi,x+ )(Fpi,x+ )p]

    (20)

    The final expression for hole current density for the

    Schottky contact in which metal is on the left whilesemiconductor is on the right, can be written analo-

    gously to (15) as

    Jp,x = qvt,p

    p0

    2 vs,pF p

    (21)

    where vs,p = |vp,x | is the hole surface velocity,F = Fp,x is the fraction of holes moving from semi-conductor into the metal and vt,p is the combined (i.e.

    light and heavy) hole thermal velocity which can be

    expressed, taking into account only the first sub-band,

    as

    vt,p =

    i=l,h

    mpi exp 1,pi

    KB T

    vt,pi

    i=l,h

    mpi exp 1,pi

    KB T

    ,

    vt,pi =

    2KB T

    mpi(22)

    At equilibrium, the hole surface velocity approaches

    the combined hole thermal velocity value, while frac-

    tion F reaches 1/2 and hole current density subse-

    quently becomes zero.

    When forward bias is applied to theSchottkycontact,

    the hole drift-diffusion velocityvd,pi becomes negative.At higher voltages, F increases to 1 while hole surface

    velocity vs,p is asymptotic to the effective hole drift-

    diffusion velocity |vd,pi |. Hence under high forwardbias, a majority of holes from the semiconductor side

    is emitted into the metal.

    Total number of holes at the boundary is calculated

    self-consistently in the numerical simulator as,

    p =i=l,h

    vpi

    gpi (1 fpi )dvpi

    =1

    L z

    KB T

    h2

    i=l,h

    mpi

    nexp

    n,piKB T exp

    EV EF p

    KB T

    (23)

    In (23), the term 1Lz

    KB T h2

    i=l,h (m

    pi

    n exp( n,piKB T ))= N2DV is the effective 2D density of states of the va-

    lence band.

    Equation (21) allows us to implement the new cur-

    rent density boundary condition for holes at a heterodi-

    mensional Schottky contact in commercial numerical

    device simulators.

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    Modeling of Current Density Boundary Conditions 9

    4. Results and Discussion

    ConventionalMSM devicesuse planer metal electrodes

    which are deposited at the top of the deviceand theyare

    not in actual contact with the 2DEG [68]. This pro-

    duces non-uniform electric field across the device and

    creates weak electric field intensity regions deep inside

    the device. Carriers move slowly deep inside the device,

    effectively increasing their transit time and reducing

    device speed. In this work, we have investigated MSM

    devices with recessed electrodes to establish a direct

    contact between 3D metal and 2-D quantum channel

    [5,912]. This makes the electric field in the semicon-

    ductor layers of the device more uniformly strong and

    more uni-directional, as shown in Fig. 1. Thus, the car-

    rier motion is mostly constrained in the direction of

    the field, which ultimately increases the speed of the

    device.

    Various numerical device simulations with the new

    boundary conditions incorporated, were performed

    with the aid of Silvacos device simulation software

    [13]. For illustrative purposes, we have considered sim-

    ple single-quantum-well structures formed by sand-

    wiching a GaAs layer between two AlGaAs layers. For

    the devices studied, the thickness of both AlGaAs lay-

    ers have been kept constant at 500 A while the GaAs

    Figure1 . Electric fieldprofile insideGaAs/AlGaAsquantum-well MSM photodetector with recessed anode(left vertical boundary) and cathode

    (right vertical boundary) contacts. The 150-A GaAs quantum well is located between the AlGaAs confining layers.

    layer thickness has been varied at 50, 100 and 150 A.

    The DC-bias performance of the devices is shownin Fig. 2. The electron barrier height for the metal-

    quantum well (GaAs channel) contact is 0.8 eV while

    for metal-AlGaAs (with 40% Al concentration) con-

    tact, it is 1.12 eV. Bias voltage of 2 V is applied across

    the device. Figure 2 shows the dark current generated

    in all three devices with different quantum well thick-

    ness. The sub-band energies of the quantum well are

    inversely proportional to the well thickness. The cur-

    rent density decreases exponentially with the barrier

    height at the metal-semiconductor contact. Thus, cur-

    rent flowing in the device with smaller QW thickness is

    considerablyless than that in the device with larger QW

    thickness, primarily because of their different sub-band

    energies (both conduction band and valence band) that

    effectively increase the barrier height. Smaller cross-

    sectionalarea of GaAs QW in devices with smaller QW

    thickness is also another factor for the current being

    lower. The current flowing in AlGaAs layers is very

    small compared to the GaAs channel current, due to

    the higher barrier height, despite the AlGaAs cross-

    sectional area being an order of magnitude larger than

    GaAs channel area. As AlGaAscurrent is much smaller

    than the GaAs current, total current is primarily due

    to the GaAs current contribution, although some real

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    10 Katkar

    Figure 2. Dark current characteristics of quantum-well MSM photodetectors with 1-m electrode spacing.

    Figure 3. Transient quantum-well MSM photocurrent response to 820-nm light impulse.

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    Modeling of Current Density Boundary Conditions 11

    Figure 4. Frequency response of 50-A quantum-well MSM photodetector at 2-V DC bias and 1-m electrode spacing.

    space transfer of electrons is observed. The dark cur-

    rent we simulated in these single-quantum-well MSM

    structures is in the range 1 10161 1014 A/m(Fig. 2).

    A light impulse of wavelength 820 nm and intensity

    10,000 W/cm2 at 2V bias is shined on the device. At

    820 nm, all the electron-hole pairs are generated in the

    GaAs channel. Figure 3 shows the total current tran-

    sients in all three devices. We can see the increase in

    the total current in the devices according to the increase

    in well thickness. Figure 4 shows the 3 dB electrical

    bandwidth response of the 50 A QW MSM device de-

    rived by Fourier Transform of the full transient cur-

    rent responses in Fig. 3. We observe comparable 3 dB

    bandwidths for the three QW device thicknesses in this

    study. Thenominal 3 dB-bandwidthis 25 GHzfor these

    devices with 1-micron electrode finger spacing at 2V

    DC bias.

    5. Conclusion

    Current density boundary conditions for heterodimen-

    sional Schottky contacts (a contact between 3D-metal

    and 2D-semiconductor) are derived in this work. The

    boundary conditions have been successfully incorpo-

    rated in a numerical device simulator to investigate the

    dark current characteristics and the transient response

    of MSM quantum-well photodetectors. The simulation

    results show low dark currents and encouraging 3 dB-

    bandwidths at low DC bias voltages. The extension of

    this work towards modeling of similar boundary con-ditions between heterodimensional Schottky contact of

    3D-metal to 1D-semiconductor can be accomplished

    by the straightforward incorporation of equivalent 1-D

    density of states and energy terms for the conduction

    and valence sub-bands.

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