ECR-CVD&HIT: :20:(49614024)(49614049)

(CVD) CVD (Chemical Vapor Deposition)()

plasma)CVDPlamsa Enhanced CVDCVDThermal CVDCVD photo- CVD

ECR-CVD

1982NTT

ECR?ECR()

(electron cyclotron resonance,ECR)

ECR-CVDfceHZBT fce = 2.8X1010 B

2.45GHZECR87.5mT

ECRECR (300K)10-210-3 Pa(1050 eV)(10-2)10111013 cm-3

/Pa105~102102 ~10-110-1 ~10-510-5 ~10-9

HIT

90%

H.I.T1992(SANYO) Floating Zone n-(Hetero-junction with Intrinsic Thin layer ,HIT)22%

HIT

HIT

ECRCVD HIT

ECRCVD HIT

[1], [2][3][4][5]VHF ECR/ICP

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